Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
115 words
A method for etching an aluminum alloy pattern on a semiconductor substrate, comprising the steps of: forming a layer of aluminum alloy on a semiconductor substrate having an insulation layer thereon; forming a resist pattern on said aluminum alloy layer; etching an exposed portion of said aluminum alloy layer by the use of said resist pattern as a mask, whereby said aluminum alloy layer is patterned; stripping said resist pattern in an atmosphere containing a reactive species; and heating the substrate in a vacuum at a temperature higher than 100°C, whereby residual etching agent on the substrate is removed, said heating step being carried out concurrently with said stripping step or after said stripping step.
Claim 2
Independent Claim
115 words
A method for etching an aluminum alloy pattern on a semiconductor substrate, comprising the steps of: forming a layer of aluminum alloy on a semiconductor substrate having an insulation layer thereon; forming a resist pattern on said aluminum alloy layer; etching an exposed portion of said aluminum alloy layer by the use of said resist pattern as a mask, whereby said aluminum alloy layer is patterned; stripping said resist pattern in an atmosphere containing a reactive species; and heating the substrate in a vacuum at a temperature higher than 100°C, whereby residual etching agent on the substrate is removed, said heating step being carried out concurrently with said stripping step or after said stripping step.
Claim 3
Dependent Claim
17 words
A method according to claim 1 wherein said etching is carried out by a dry etching method.
Claim 4
Dependent Claim
21 words
A method according to claim 2 wherein said dry etching is carried out by the use of a gas containing chlorine.
Claim 5
Dependent Claim
27 words
A method according to claim 3 wherein said gas is chosen from the group of chlorine gas, silicon tetrachloride gas, boron trichloride gas, and carbon tetrachloride gas.
Claim 6
Independent Claim
19 words
A method according to any preceding claim wherein the temperature in said heating step is lower than approximately 400°C.
Claim 7
Independent Claim
23 words
A method according to any preceding claim, wherein said reactive species are produced from a mixture of a fluorinated gas and oxygen gas.
Claim 8
Independent Claim
27 words
A method according to any one of claims 1 to 5, wherein said reactive species are produced from a mixture of a nitrogen-containing gas and oxygen gas.
Claim 9
Independent Claim
22 words
A method according to any preceding claim, wherein said reactive species is produced by excitation by microwave power of approximately 2.45 GHz.
Claim 10
Independent Claim
15 words
A method according to any preceding claim wherein said aluminum alloy is an aluminum-copper alloy.