EP0245688A1
Expired / Lapsed
EP
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Method of forming diamond film
Assignee: Nissin Electric Co Ltd
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Filing: 1987-04-28
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Granted: —
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Expires: 2007-04-28
Abstract
Abstract A method of forming a diamond film (20) on a substrate (2) comprises the steps of depositing carbon on said substrata (2) in vacuum by vapor deposition, and irradiating accelerated ions (12) onto said substrate, said ions being obtained by ionizing a gas (G) composed of at least one of hydrogen gas, inert gases, hydrocarbon gases, organic compound gases and silicon base gases.
Inventors
- 👤 Kiyoshi Ogata
- 👤 Eiji Kamijo
- 👤 Yasunori Ando
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-06 09:02
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/06; C23C14/0605; C23C14/0611; C30; C30B; C30B23/00; C30B23/02; C30B29/00; C30B29/02; C30B29/04
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
59 words
A method of forming a diamond film on a substrate, comprising the steps of: depositing carbon atoms onto said substrate in vacuum by vapor deposition; and irradiating accelerated ions onto said substrate, said ions being obtained by ionizing a gas composed of at least one of hydrogen gas, inert gases, hydrocarbon gases, organic compound gases and silicon base gases.
Claim 2
Independent Claim
59 words
A method of forming a diamond film on a substrate, comprising the steps of: depositing carbon atoms onto said substrate in vacuum by vapor deposition; and irradiating accelerated ions onto said substrate, said ions being obtained by ionizing a gas composed of at least one of hydrogen gas, inert gases, hydrocarbon gases, organic compound gases and silicon base gases.
Claim 3
Dependent Claim
15 words
The method of claim 1, wherein said silicon base gases are monosilane or disilane gases.
Claim 4
Dependent Claim
31 words
The method of claim 1 or 2, wherein the degree of vacuum is 10 -5 to 10 -7 Torr and the energy of said accelerated ions is less than 40 KeV.
Claim 5
Independent Claim
33 words
The method of any one of claims 1 to 3, wherein said depositing and irradiating steps are carried out at a temperature within the range of from room temperature to several hundred degrees.
Claim 6
Independent Claim
89 words
A method of forming a diamond film comprising the steps of transporting carbon atoms and neon ions having kinetic energy to a substrate in vacuum, wherein said energy (eV) of said neon ions and the ratio (%) of the quantity of said transported neon ions to that of said transported carbon atoms are selected within the region enclosed with four points (10, 10), (10, 73), (1 000, 1) and (1 000, 15) in rectangular coordinates made up of said energy as the abscissa and said ratio as the ordinate.
Claim 7
Independent Claim
89 words
A method of forming a diamond film comprising the steps of transporting carbon atoms and neon ions having kinetic energy to a substrate in vacuum, wherein said energy (eV) of said neon ions and the ratio (%) of the quantity of said transported neon ions to that of said transported carbon atoms are selected within the region enclosed with four points (10, 10), (10, 73), (1 000, 1) and (1 000, 15) in rectangular coordinates made up of said energy as the abscissa and said ratio as the ordinate.
Claim 8
Dependent Claim
28 words
The method of claim 5, wherein the incident angle of said transported neon ions relative to a perpendicular of a surface of said substrate is 0° to 60°.
Claim 9
Dependent Claim
19 words
The method of claim 5 or 6, wherein the degree of vacuum is 10 -5 to 10 -7 Torr.
Claim 10
Independent Claim
31 words
The method of any one of claims 5 to 7, wherein said transporting steps are carried out at a temperature within the range of from room temperature to several hundred degrees.
References Cited (Backward Citations)
US4490229A
Cited
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