Patent US2650701A successfully refreshed from Google Patents.
EP0244951A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Method and apparatus for handling and processing wafer like materials
Assignee: Tokyo Electron Ltd
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Filing: 1987-04-03
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Granted: —
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Expires: 2007-04-03
Abstract
Abstract The apparatus comprises a plenum or main chamber which is divided into two chamber halves. A rotatable index plate is disposed in the chamber. An article to be processed is inserted into a load-lock station formed in the main chamber. After the article is inserted into the load-lock, it is engaged by an article holding device mounted in a position of the rotatable index plate. The index plate is then rotated to a second station, at which a process can be performed upon the substrate, for example, an etching or sputtering process. The process is performed in a processing chamber which is fully isolated from the main chamber and other processing chambers. After rotation by one position, a processed substrate is removed from the load-lock and a new substrate inserted into the load-lock for processing. After a process step is carried out on a substrate, the index plate is again rotated to the next station where another process or removal through the load-lock may be performed.
Inventors
- 👤 Steven D. Hurwitt
- 👤 Miroslav Eror
- 👤 Richard E. Biehl
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-30 02:09
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/34; H10P72/3411; H10P72/04; H10P72/0402; H10P72/33; H10P72/3304; H10P72/3306; H10P72/3308
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
196 words
Apparatus for transporting a wafer-like article and subjecting the article to at least one process step comprising: means defining a first chamber maintained substantially continuously at a vacuum or presssure level; aperture means in said first chamber through which an article to be subjected to the process step can be introduced into the first chamber; means in said first chamber for receiving and holding the article; means for moving the article held by said receiving and holding means substantially in a plane of movement to a position in the first chamber adjacent where the process step is to be performed on the article; movable means for isolating the second chamber from communication with said first chamber while said process step is performed on the article and for thereafter opening said second chamber to the first chamber so that the second chamber is in communication with the first chamber after tne article has been subjected to the process step, said receiving and holding means remaining in contact with the article during the performance of the process step; and means for removing the article from said first chamber after the article has been subjected to the process step.
Claim 2
Dependent Claim
196 words
Apparatus for transporting a wafer-like article and subjecting the article to at least one process step comprising: means defining a first chamber maintained substantially continuously at a vacuum or presssure level; aperture means in said first chamber through which an article to be subjected to the process step can be introduced into the first chamber; means in said first chamber for receiving and holding the article; means for moving the article held by said receiving and holding means substantially in a plane of movement to a position in the first chamber adjacent where the process step is to be performed on the article; movable means for isolating the second chamber from communication with said first chamber while said process step is performed on the article and for thereafter opening said second chamber to the first chamber so that the second chamber is in communication with the first chamber after tne article has been subjected to the process step, said receiving and holding means remaining in contact with the article during the performance of the process step; and means for removing the article from said first chamber after the article has been subjected to the process step.
Claim 3
Dependent Claim
27 words
The apparatus recited in claim 1, wherein said moving means comprises rotatable plate means disposed for movement in said plane of movement and said means for removing
Claim 4
Dependent Claim
219 words
Apparatus for transpcrting a wafer-like article and subjecting the article to at least one process step comprising: means defining a first chamber maintained substantially continuously at a vacuum or pressure level; aperture means in said first chamber through which an article to be subjected to the process step can be introduced into the first chamber; means in said first chamber for receiving and holding the article; a plurality of second chambers in any of which a process step can be performed on the article; means for moving the article held by said receiving and holding means substantially in a plane of movement to a position in the first chamber adjacent a selected one of said second chambers where the process step is to be performed; movable means for isolating the selected second chamber from communication with the first chamber while said process step is performed on the article and for thereafter opening said second chamber to the first chamber so that the second chamber is in communication with the first chamber after the article has been subjected to the process step, said receiving and holding means remaining in contact with the article during the performance of the process step; and means for removing the article from the first chamber after the article has been subjected to the process step.
Claim 5
Dependent Claim
219 words
Apparatus for transpcrting a wafer-like article and subjecting the article to at least one process step comprising: means defining a first chamber maintained substantially continuously at a vacuum or pressure level; aperture means in said first chamber through which an article to be subjected to the process step can be introduced into the first chamber; means in said first chamber for receiving and holding the article; a plurality of second chambers in any of which a process step can be performed on the article; means for moving the article held by said receiving and holding means substantially in a plane of movement to a position in the first chamber adjacent a selected one of said second chambers where the process step is to be performed; movable means for isolating the selected second chamber from communication with the first chamber while said process step is performed on the article and for thereafter opening said second chamber to the first chamber so that the second chamber is in communication with the first chamber after the article has been subjected to the process step, said receiving and holding means remaining in contact with the article during the performance of the process step; and means for removing the article from the first chamber after the article has been subjected to the process step.
Claim 6
Dependent Claim
54 words
The apparatus recited in claim 3, wherein said moving means comprises rotatable plate means disposed for movement in said plane, said moving means comprises a plurality of means for receiving and holding articles and said means for removing the article comprising said aperture means through which the article is inserted into the first chamber.
Claim 7
Dependent Claim
108 words
Apparatus for holding a wafer-like article in a movable support means and for allowing movement transverse to said suport means comprising: first means coupled to the support means and defining a first inner open area; first resilient means coupling said support means and first means; second means disposed in said inner open area and coupled to said first means, said second means defining a second inner open area contained within said first area for receiving the article; second resilient means coupling said second means to said first means; and means disposed on said second means for securing the article disposed in said second area to said second means.
Claim 8
Dependent Claim
108 words
Apparatus for holding a wafer-like article in a movable support means and for allowing movement transverse to said suport means comprising: first means coupled to the support means and defining a first inner open area; first resilient means coupling said support means and first means; second means disposed in said inner open area and coupled to said first means, said second means defining a second inner open area contained within said first area for receiving the article; second resilient means coupling said second means to said first means; and means disposed on said second means for securing the article disposed in said second area to said second means.
Claim 9
Dependent Claim
47 words
The apparatus recited in claim 5, further comprising a first chamber in which the apparatus is disposed and a second chamber in communication with the first chamber and wherein said first means comprises sealing surfaces on first and second surfaces thereof, one of said first and second
Claim 10
Independent Claim
191 words
A method for transporting a wafer-like article and subjecting the article to at least one process step comprising the steps of: introducing the article to be processed through aperture means into a first chamber maintained substantially continuously at a vacuum or pressure level; receiving and holding the article in receiving and holding means in the first chamber; moving the article held by said receiving and holding means to a position in the first chamber adjacent a second chamber where the process step is to be performed; isolating the second chamber from communication with said first chamber while said process step is performed on the article and thereafter opening said second chamber to the first chamber so that the second chamber is in communication with tne first cnamoer after the article nas been subjected to the process step, said receiving and holding means remaining in contact with the article during the performance of the process step, said receiving and holding means remaining in contact with the article during the performance of the process step; and removing the article from the first chamber after the article has been subjected to the process step.
Claim 11
Independent Claim
191 words
A method for transporting a wafer-like article and subjecting the article to at least one process step comprising the steps of: introducing the article to be processed through aperture means into a first chamber maintained substantially continuously at a vacuum or pressure level; receiving and holding the article in receiving and holding means in the first chamber; moving the article held by said receiving and holding means to a position in the first chamber adjacent a second chamber where the process step is to be performed; isolating the second chamber from communication with said first chamber while said process step is performed on the article and thereafter opening said second chamber to the first chamber so that the second chamber is in communication with tne first cnamoer after the article nas been subjected to the process step, said receiving and holding means remaining in contact with the article during the performance of the process step, said receiving and holding means remaining in contact with the article during the performance of the process step; and removing the article from the first chamber after the article has been subjected to the process step.
Claim 12
Dependent Claim
70 words
The method recited in claim 7, wherein said step of receiving and holding comprises clamping the article to said receiving and holding means coupled to support means, said step of moving comprises rotating said support means disposed in the first chamber about a central axis and said step of removing the article comprises removing the article through the aperture means through which the article is inserted into the first chamber.
Claim 13
Independent Claim
177 words
A method for transporting a wafer-like article and subjecting the article to at least one process step comprising the steps of: introducing the article to be processed through aperture means into a first chamber maintained substantially continuously at a vacuum or pressure level; receiving and holding the article in receiving and holding means in the first chamber; moving the article held by said receiving and holding means to a position in the first chamber adjacent a selected one of second chambers where the process step is to be performed; isolating the selected second chamber from communication with the first chamber while said process step is performed on the article and thereafter opening said second chamber to the first chamber so that the second chamber is in communication with the first chamber after the article has been subjected to the process step, said receiving and holding means remaining in contact with the article during the performance of the process step; and removing the article from the first chamber after the article has been subjected to the process step.
Claim 14
Independent Claim
177 words
A method for transporting a wafer-like article and subjecting the article to at least one process step comprising the steps of: introducing the article to be processed through aperture means into a first chamber maintained substantially continuously at a vacuum or pressure level; receiving and holding the article in receiving and holding means in the first chamber; moving the article held by said receiving and holding means to a position in the first chamber adjacent a selected one of second chambers where the process step is to be performed; isolating the selected second chamber from communication with the first chamber while said process step is performed on the article and thereafter opening said second chamber to the first chamber so that the second chamber is in communication with the first chamber after the article has been subjected to the process step, said receiving and holding means remaining in contact with the article during the performance of the process step; and removing the article from the first chamber after the article has been subjected to the process step.
References Cited (Backward Citations)
No citation records indexed.
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