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EP0244504A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

X-ray source

Assignee: Shimadzu Corp
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Filing: 1986-08-21
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Granted: —
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Expires: 2006-08-21
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Abstract

Abstract An X-ray source comprises a thin film X-ray target (22) for generating X-rays in response to the application of electron beams, and a capillary tubular element (20) for allowing the X-rays to pass. The capillary tubular element (20) has such a diameter that the beams of the X-rays impinging on the inner surfaces of the capillary tubular element (20) are totally reflected. Additionally, a thin film (24) is provided for absorbing the electron beams, but allowing the X-rays to penetrate.

Inventors

  • 👤 Hiroyoshi Soezima

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-10-31 16:51
CPC Classifications
G; G21; G21K; G21K7/00; G21K1/00; G21K1/06; H; H01; H01J; H01J35/00

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 70 words
An X-ray source comprising: X-ray target means for generating X-rays in response to the application of electron beams; characterized by: capillary tubular means (20) for allowing the X-rays to pass, said capillary tubular means having such a diameter that beams of the X-rays impinging on the inner surfaces of the capillary tubular means (20) are totally reflected and said capillary tubular means being faced to said X-ray target means (22).
Claim 2
Dependent Claim 70 words
An X-ray source comprising: X-ray target means for generating X-rays in response to the application of electron beams; characterized by: capillary tubular means (20) for allowing the X-rays to pass, said capillary tubular means having such a diameter that beams of the X-rays impinging on the inner surfaces of the capillary tubular means (20) are totally reflected and said capillary tubular means being faced to said X-ray target means (22).
Claim 3
Dependent Claim 22 words
The X-ray source of claim 1, wherein a plurality of capillary tubular means (20) are provided in the form of a bundle.
Claim 4
Dependent Claim 40 words
The X-ray source of claim 1, further comprising film means (24) provided at the end of said capillary tubular means opposed to said X-ray target means (22), said film means absorbing the electron beams, but allowing the X-rays to penetrate.
Claim 5
Dependent Claim 20 words
The X-ray source of claim 1, wherein said X-ray target means (22) comprises an aluminum layer or a magnesium layer.
Claim 6
Dependent Claim 18 words
The X-ray source of claim 3, wherein said film means (24) is biased with a positive power source.
Claim 7
Dependent Claim 19 words
The X-ray source of claim 3, wherein said film means (24) is thinner than said X-ray target means (22).
Claim 8
Dependent Claim 20 words
The X-ray source of claim 1, wherein said X-ray source is provided for an X-ray photoelectron spectroscopy ( XPS ).

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