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EP0244086A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Resonator device

Assignee: Nortel Networks Ltd
•
Filing: 1987-03-30
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Granted: —
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Expires: 2007-03-30
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Abstract

Abstract A strain or pressure responsive transducer comprises a pair of elongate beam resonators arranged end to end and provided with a flexible coupling therebetween. The arrangement oscillates e.g. in a double see-saw or butterfly mode. The transducer is disposed on a diaphragm whereby strain may be transmitted to the oscillatory system. The frequency of oscillation is a function of this strain.

Inventors

  • 👤 John Christopher Greenwood

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-03 07:29
CPC Classifications
G; G01; G01L; G01L9/00; G01L9/0001; G01L9/0008; G01L9/0013; G01L9/0014; G01L1/00; G01L1/10; G01L1/103; G01L1/18; G01L1/183; G01L1/186; G01L9/0019; G01L9/002; Y; Y10; Y10S; Y10S73/00; Y10S73/01

Claims Analysis

Total Claims: 9
Claim 1
Independent Claim 50 words
A strain or pressure responsive mechanically resonant sensor device, the device including first and second elongate members coupled at their one ends via a flexible coupling and each supported on respective stretched filaments so as, in use, to oscillate together each in an identical mode at their natural resonant frequency.
Claim 2
Dependent Claim 50 words
A strain or pressure responsive mechanically resonant sensor device, the device including first and second elongate members coupled at their one ends via a flexible coupling and each supported on respective stretched filaments so as, in use, to oscillate together each in an identical mode at their natural resonant frequency.
Claim 3
Dependent Claim 105 words
A strain or pressure responsive mechanically resonant sensor device, the device including a rigid frame having an opening across which a flexible diaphragm is supported, first and second elongate means extending from said diaphragm and disposed in a parallel configuration, first and second elongate members disposed end to end between the mesas and each supported adjacent its transverse axis by filaments extending from the mesas, a flexible coupling linking the adjacent ends of the elongate members, and optical means for applying energy to the coupling whereby, in use, the elongate members are driven into oscillation each in an identical mode at their natural resonant frequency.
Claim 4
Dependent Claim 105 words
A strain or pressure responsive mechanically resonant sensor device, the device including a rigid frame having an opening across which a flexible diaphragm is supported, first and second elongate means extending from said diaphragm and disposed in a parallel configuration, first and second elongate members disposed end to end between the mesas and each supported adjacent its transverse axis by filaments extending from the mesas, a flexible coupling linking the adjacent ends of the elongate members, and optical means for applying energy to the coupling whereby, in use, the elongate members are driven into oscillation each in an identical mode at their natural resonant frequency.
Claim 5
Dependent Claim 21 words
A sensor as claimed in claim 1 or 2, characterised in that it comprises a unitary construction of single crystal silicon.
Claim 6
Dependent Claim 31 words
A sensor as claimed in claim 1, 2 or 3, characterised in that the device is so constructed that, in use, the elongate members oscillate in antiphase in a see-saw mode.
Claim 7
Dependent Claim 30 words
A sensor as claimed in claim 4, characterised in that each said elongate member has an opening or cut-out adjacent the coupling whereby the flexibility of the coupling is enhanced.
Claim 8
Dependent Claim 18 words
A sensor as claimed in any one of claims 1 to 4, and provided with an evacuated housing.
Claim 9
Dependent Claim 21 words
An aircraft altimeter or a well logger provided with a sensor as claimed in any one of claims 1 to 6.

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