EP0242997A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Valve incorporating wafer handling arm
Assignee: Varian Medical Systems Inc
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Filing: 1987-03-23
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Granted: —
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Expires: 2007-03-23
Abstract
Abstract A valve for a wafer processing machine is formed with a wedge-shaped sliding gate. A folded wafer handling arm is stored within the wedge and pumped to keep the arm clean while the valve is closed.
Inventors
- 👤 Frederick P. Layman
- 👤 Phillip M. Hobson
- 👤 Paul H. Dick
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 01:48
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0451; H10P72/0452; H10P72/0456; B; B23; B23Q; B23Q7/00; B23Q7/04; B23Q7/043; B23Q7/046; H10P72/0441; H10P72/0462; H10P72/0466; H10P72/30; H10P72/33; H10P72/3304; H10P72/3306; H10P72/70; H10P72/76; H10P72/7604; H10P72/7612; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/137; Y10S414/139; Y10S414/14
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
107 words
A valve and workpiece handling arm comprising: a valve housing having input port and output port; a valve wedge having surfaces sealing to said input and output ports, said valve wedge sealing surfaces being sloped relative to each other, said valve wedge having a storage notch between said sealing surfaces; wedge driving means for sliding said valve wedge within said housing from a sealing position to an open position so that said valve wedge is clear of a line sight through said input and output ports; a workpiece handling arm capable of being stored in a folded position in said storage notch when said valve is closed.
Claim 2
Dependent Claim
107 words
A valve and workpiece handling arm comprising: a valve housing having input port and output port; a valve wedge having surfaces sealing to said input and output ports, said valve wedge sealing surfaces being sloped relative to each other, said valve wedge having a storage notch between said sealing surfaces; wedge driving means for sliding said valve wedge within said housing from a sealing position to an open position so that said valve wedge is clear of a line sight through said input and output ports; a workpiece handling arm capable of being stored in a folded position in said storage notch when said valve is closed.
Claim 3
Dependent Claim
160 words
The valve of claim 1 wherein said workpiece handling arm includes: a proximal support piece, a proximal extensor piece, a distal support piece, said distal support piece having means for supporting the workpiece on a distal end; a distal extensor piece, a pair of concentric shafts rotating about a first axis for delivering power and control to said arm, said proximal support piece being fixedly attached at right angles to a first of said concentric shafts, said proximal extensor piece being fixedly attached at right angles to a second of said pair of concentric shafts, said proximal extensor piece being pivotally attached to said distal extensor piece at a second axis, said proximal support piece and said distal extensor piece being pivotally attached to said distal support piece at third and fourth axes respectively, said first, second, third and fourth axes being parallel, spacings between said axes forming a parallelogram; and shaft rotation means for independently rotating said concentric shafts.
Claim 4
Dependent Claim
18 words
The valve and workpiece handling arm of claim 2 where said distal support arm is a flat blade.
Claim 5
Dependent Claim
22 words
The valve and workpiece handling arm of claim 3 wherein said proximal extensor piece is much shorter than said proximal support piece.
Claim 6
Dependent Claim
67 words
The valve and workpiece handling arm of claim 4 wherein said wedge driving means and said first and second shaft rotation means are mounted on a plate which is detachably attached to said valve housing, whereby said valve wedge, said wedge driving means, said workpiece handling arm, said first and second shaft driving means and said plate can as a unit be separated from said valve housing.
Claim 7
Dependent Claim
21 words
The valve and workpiece handling arm of claim 1 wherein said housing is formed integrally as part of a processing chamber.
References Cited (Backward Citations)
No citation records indexed.
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