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EP0241046A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Semiconductor device having fuse-type memory element

Assignee: NEC Corp
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Filing: 1987-04-10
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Granted: —
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Expires: 2007-04-10
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Abstract

Abstract A semiconductor device including a fuse-type memory element is disclosed. This device comprises a semi-­conductor substrate, a field insulating layer on the substrate in which a hollow or trench is formed, and a fuse formed on the field insulating layer so as to run across the hollow or trench. The fuse is broken down on the edge of the hollow so that the broken point of the fuse may be predetermined.

Inventors

  • 👤 Noboru Satoh

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-05 09:15
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/49; H10W20/493; H10D; H10D84/00; H10D84/80; H10D84/811; H10D84/817

Claims Analysis

Total Claims: 9
Claim 1
Independent Claim 40 words
A semiconductor device comprising a semiconductor substrate, an insulating layer formed on said semiconductor substrate, and a fuse formed on said insulating layer, characterized in that a hollow is formed in said insulating layer and said fuse crosses said hollow.
Claim 2
Dependent Claim 40 words
A semiconductor device comprising a semiconductor substrate, an insulating layer formed on said semiconductor substrate, and a fuse formed on said insulating layer, characterized in that a hollow is formed in said insulating layer and said fuse crosses said hollow.
Claim 3
Dependent Claim 48 words
A semiconductor device comprising a semiconductor substrate, an insulating layer covering said semiconductor substrate, a trench formed in said insulating layer, a conductive film operating as a fuse formed on said insulating layer so as to cross said trench, and a reflowable glass layer covering said conductive film.
Claim 4
Dependent Claim 48 words
A semiconductor device comprising a semiconductor substrate, an insulating layer covering said semiconductor substrate, a trench formed in said insulating layer, a conductive film operating as a fuse formed on said insulating layer so as to cross said trench, and a reflowable glass layer covering said conductive film.
Claim 5
Dependent Claim 16 words
The device as claimed in Claim 2, wherein said conductive film is made of polycrystalline silicon.
Claim 6
Dependent Claim 14 words
The device as claimed in Claim 2, wherein said reflowable glass is borophosphosilicate glass.
Claim 7
Dependent Claim 69 words
A semiconductor device comprising a semiconductor substrate, a transistor having a region formed in said semiconductor substrate, a thick field insulating layer formed on a field region of said semiconductor substrate, a hollow formed in said thick field insulating layer, a fuse formed on a surface of said thick field insulating film and crossing said hollow, and an interconnection line connecting said region of said transistor to said fuse.
Claim 8
Dependent Claim 69 words
A semiconductor device comprising a semiconductor substrate, a transistor having a region formed in said semiconductor substrate, a thick field insulating layer formed on a field region of said semiconductor substrate, a hollow formed in said thick field insulating layer, a fuse formed on a surface of said thick field insulating film and crossing said hollow, and an interconnection line connecting said region of said transistor to said fuse.
Claim 9
Dependent Claim 16 words
The device as claimed in Claim 5, further comprising a borophosphosilicate glass layer covering said fuse.

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