EP0230936A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Photosensitive compositions containing microgels
Assignee: EIDP Inc
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Filing: 1987-01-17
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Granted: —
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Expires: 2007-01-17
Abstract
Abstract A solid photopolymerizable composition, contains addition polymerizable ethylenically unsaturated monomer, initiating system, polymer binder and a microgel wherein preferably the binder and microgel form substantially a single phase and have a similar glass transition temperature above 25°C. Although less preferred the solid composition can function without the binder. A preferred use is as a photoresist.
Inventors
- 👤 Michael Fryd
- 👤 Terry Roland Suess
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-05 14:17
CPC Classifications
G; G03; G03C; G03C1/00; G03C1/72; G03C1/725; G03F; G03F7/00; G03F7/004; G03F7/027; G03F7/032; G03F7/033; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/106; Y10S430/107; Y10S430/111
Claims Analysis
Total Claims: 44
Claim 1
Independent Claim
87 words
A photosensitive composition comprising (a) addition polymerizable ethylenically unsaturated monomer, (b) initiating system activated by actinic radiation, (c) preformed macromolecular polymer binder, and (d) microgel, wherein the photosensitive composition is a solid and wherein at least one of the following is present: (i) the polymer binder and microgel form substantially one phase as viewed by the naked eye, or (ii) the polymer binder and microgel have glass transition temperatures which do not differ by more than 50°C with the microgel having a glass transition temperature above 25°C.
Claim 2
Dependent Claim
87 words
A photosensitive composition comprising (a) addition polymerizable ethylenically unsaturated monomer, (b) initiating system activated by actinic radiation, (c) preformed macromolecular polymer binder, and (d) microgel, wherein the photosensitive composition is a solid and wherein at least one of the following is present: (i) the polymer binder and microgel form substantially one phase as viewed by the naked eye, or (ii) the polymer binder and microgel have glass transition temperatures which do not differ by more than 50°C with the microgel having a glass transition temperature above 25°C.
Claim 3
Dependent Claim
12 words
The composition of claim 1 wherein properties (i) and (ii) are present.
Claim 4
Dependent Claim
20 words
The composition of claim 1 wherein the substantially one phase is present and observable after a magnification of 10 times.
Claim 5
Dependent Claim
20 words
The composition of claim 2 wherein the substantially one phase is present and observable after a magnification of 100 times.
Claim 6
Dependent Claim
24 words
The composition of claim 1 wherein the glass transition temperature of the polymer binder and the microgel do not differ by more than 25°C.
Claim 7
Dependent Claim
82 words
The composition of claim 1 wherein the microgel swells at least 10% in at least one of the following solvents: n-heptane, carbon tetrachloride, toluene, methylene chloride, ethyl acetate, acetone, acetonitrile, acetic acid, dimethylsulfoxide, dimethylformamide, formamide, water, aqueous ammonium hydroxide solution containing up to 10% by weight ammonia, aqueous potassium hydroxide solution containing up to 10% by weight potassium hydroxide, methylene chloride-methanol solution containing by weight 92% methylene chloride and 8% methanol, and aqueous sodium carbonate solution containing by weight 1% sodium carbonate.
Claim 8
Dependent Claim
19 words
The composition of claim 6 wherein the microgel swells at least 50% in at least one of the solvents.
Claim 9
Dependent Claim
15 words
The composition of claim 1 which has a creep viscosity of at least 20 megapoise.
Claim 10
Dependent Claim
15 words
The composition of claim 8 which has a creep viscosity of at least 40 megapoise.
Claim 11
Dependent Claim
108 words
An article comprising a storage stable photosensitive composition supported by a flexible film with the article wound in a roll whereby the photosensitive composition comprises (a) addition polymerizable ethylenically unsaturated monomer, (b) initiating system activated by actinic radiation, (c) preformed macromolecular polymer binder, and (d) microgel, wherein the photosensitive composition is a solid and wherein at least one of the following is present: (i) the polymer binder and microgel form substantially one phase as viewed by the naked eye, or (ii) the polymer binder and microgel have glass transition temperatures which do not differ by more than 50°C with the microgel having a glass transition temperature above 25°C.
Claim 12
Dependent Claim
108 words
An article comprising a storage stable photosensitive composition supported by a flexible film with the article wound in a roll whereby the photosensitive composition comprises (a) addition polymerizable ethylenically unsaturated monomer, (b) initiating system activated by actinic radiation, (c) preformed macromolecular polymer binder, and (d) microgel, wherein the photosensitive composition is a solid and wherein at least one of the following is present: (i) the polymer binder and microgel form substantially one phase as viewed by the naked eye, or (ii) the polymer binder and microgel have glass transition temperatures which do not differ by more than 50°C with the microgel having a glass transition temperature above 25°C.
Claim 13
Dependent Claim
12 words
The article of claim 10 wherein properties (i) and (ii) are present.
Claim 14
Dependent Claim
20 words
The article of claim 10 wherein the substantially one phase is present and observable after a magnification of 10 times.
Claim 15
Dependent Claim
20 words
The article of claim 12 wherein the substantially one phase is present and observable after a magnification of 100 times.
Claim 16
Dependent Claim
24 words
The article of claim 10 wherein the glass transition temperature of the polymer binder and the microgel do not differ by more than 25°C.
Claim 17
Dependent Claim
82 words
The article of claim 10 wherein the microgel swells at least 10% in at least one of the following solvents: n-heptane, carbon tetrachloride, toluene, methylene chloride, ethyl acetate, acetone, acetonitrile, acetic acid, dimethylsulfoxide, dimethylformamide, formamide, water, aqueous ammonium hydroxide solution containing up to 10% by weight ammonia, aqueous potassium hydroxide solution containing up to 10% by weight potassium hydroxide, methylene chloride-methanol solution containing by weight 92% methylene chloride and 8% methanol, and aqueous sodium carbonate solution containing by weight 1% sodium carbonate.
Claim 18
Dependent Claim
19 words
The article of claim 15 wherein the microgel swells at least 50% in at least one of the solvents.
Claim 19
Dependent Claim
15 words
The article of claim 10 which has a creep viscosity of at least 20 megapoise.
Claim 20
Dependent Claim
15 words
The article of claim 17 which has a creep viscosity of at least 40 megapoise.
Claim 21
Dependent Claim
64 words
An article comprising a storable stable photosensitive composition supported by a flexible film with the article wound in a roll whereby the photosensitive composition comprises (a) addition polymerizable ethylenically unsaturated monomer, (b) initiating system activated by actinic radiation, and (c) microgel, wherein the photosensitive composition is a solid with the proviso that the photosensitive composition is substantially free of any preformed macromolecular polymer binder.
Claim 22
Dependent Claim
64 words
An article comprising a storable stable photosensitive composition supported by a flexible film with the article wound in a roll whereby the photosensitive composition comprises (a) addition polymerizable ethylenically unsaturated monomer, (b) initiating system activated by actinic radiation, and (c) microgel, wherein the photosensitive composition is a solid with the proviso that the photosensitive composition is substantially free of any preformed macromolecular polymer binder.
Claim 23
Dependent Claim
82 words
The article of claim 19 wherein the microgel swells at least 10% in at least one of the following solvents: n-heptane, carbon tetrachloride, toluene, methylene chloride, ethyl acetate, acetone, acetonitrile, acetic acid, dimethylsulfoxide, dimethylformamide, formamide, water, aqueous ammonium hydroxide solution containing up to 10% by weight ammonia, aqueous potassium hydroxide solution containing up to 10% by weight potassium hydroxide, methylene chloride-methanol solution containing by weight 92% methylene chloride and 8% methanol, and aqueous sodium carbonate solution containing by weight 1% sodium carbonate.
Claim 24
Dependent Claim
19 words
The article of claim 20 wherein the microgel swells at least 50% in at least one of the solvents.
Claim 25
Dependent Claim
15 words
The article of claim 19 which has a creep viscosity of at least 20 megapoise.
Claim 26
Dependent Claim
15 words
The article of claim 22 which has a creep viscosity of at least 40 megapoise.
Claim 27
Dependent Claim
163 words
In a process for laminating a photosensitive film to a substrate comprising the steps of (a) laminating to the substrate a supported solid photosensitive film, (b) imagewise exposing the layer to actinic radiation, (c) removing unexposed areas of the layer to form resist areas, (d) permanently modifying areas of the substrate which are unprotected by the resist areas by etching the substrate or by depositing a material onto the substrate, and wherein the improvement comprises the photosensitive film which contains (a) addition polymerizable ethylenically unsaturated monomer, (b) initiating system activated by actinic radiation, (c) preformed macromolecular polymer binder, and (d) microgel, wherein the photosensitive composition is a solid and wherein at least one of the following is present: (i) the polymer binder and microgel form substantially one phase as viewed by the naked eye, or (ii) the polymer binder and microgel have glass transition temperatures which do not differ by more than 50°C with the microgel having a glass transition temperature above 25°C.
Claim 28
Dependent Claim
163 words
In a process for laminating a photosensitive film to a substrate comprising the steps of (a) laminating to the substrate a supported solid photosensitive film, (b) imagewise exposing the layer to actinic radiation, (c) removing unexposed areas of the layer to form resist areas, (d) permanently modifying areas of the substrate which are unprotected by the resist areas by etching the substrate or by depositing a material onto the substrate, and wherein the improvement comprises the photosensitive film which contains (a) addition polymerizable ethylenically unsaturated monomer, (b) initiating system activated by actinic radiation, (c) preformed macromolecular polymer binder, and (d) microgel, wherein the photosensitive composition is a solid and wherein at least one of the following is present: (i) the polymer binder and microgel form substantially one phase as viewed by the naked eye, or (ii) the polymer binder and microgel have glass transition temperatures which do not differ by more than 50°C with the microgel having a glass transition temperature above 25°C.
Claim 29
Dependent Claim
17 words
The process of claim 24 wherein after step (d) the resist areas are removed from the substrate.
Claim 30
Dependent Claim
12 words
The process of claim 24 wherein properties (i) and (ii) are present.
Claim 31
Dependent Claim
20 words
The process of claim 26 wherein the substantially one phase is present and observable after a magnification of 10 times.
Claim 32
Dependent Claim
20 words
The process of claim 27 wherein the substantially one phase is present and observable after a magnification of 100 times.
Claim 33
Dependent Claim
24 words
The process of claim 26 wherein the glass transition temperature of the polymer binder and the microgel do not differ by more than 25°C.
Claim 34
Dependent Claim
82 words
The process of claim 26 wherein the microgel swells at least 10% in at least one of the following solvents: n-heptane, carbon tetrachloride, toluene, methylene chloride, ethyl acetate, acetone, acetonitrile, acetic acid, dimethylsulfoxide, dimethylformamide, formamide, water, aqueous ammonium hydroxide solution containing up to 10% by weight ammonia, aqueous potassium hydroxide solution containing up to 10% by weight potassium hydroxide, methylene chloride-methanol solution containing by weight 92% methylene chloride and 8% methanol, and aqueous sodium carbonate solution containing by weight 1% sodium carbonate.
Claim 35
Dependent Claim
19 words
The process of claim 30 wherein the microgel swells at least 50% in at least one of the solvents.
Claim 36
Dependent Claim
15 words
The process of claim 26 which has a creep viscosity of at least 20 megapoise.
Claim 37
Dependent Claim
15 words
The process of claim 32 which has a creep viscosity of at least 40 megapoise.
Claim 38
Dependent Claim
116 words
In a process for laminating a photosensitive film to a substrate comprising (a) laminating to the substrate a supported solid photosensitive film, (b) imagewise exposing the layer to actinic radiation, (c) removing unexposed areas of the layer to form resist areas, (d) permanently modifying areas of the substrate which are unprotected by the resist areas by etching the substrate or by depositing a material onto the substrate, and wherein the improvement comprises the photosensitive film which contains (a) addition polymerizable ethylenically unsaturated monomer, (b) initiating system activated by actinic radiation, and (c) microgel, wherein the photosensitive composition is a solid with the proviso that the photosensitive composition is substantially free of any preformed macromolecular polymer binder.
Claim 39
Dependent Claim
116 words
In a process for laminating a photosensitive film to a substrate comprising (a) laminating to the substrate a supported solid photosensitive film, (b) imagewise exposing the layer to actinic radiation, (c) removing unexposed areas of the layer to form resist areas, (d) permanently modifying areas of the substrate which are unprotected by the resist areas by etching the substrate or by depositing a material onto the substrate, and wherein the improvement comprises the photosensitive film which contains (a) addition polymerizable ethylenically unsaturated monomer, (b) initiating system activated by actinic radiation, and (c) microgel, wherein the photosensitive composition is a solid with the proviso that the photosensitive composition is substantially free of any preformed macromolecular polymer binder.
Claim 40
Dependent Claim
17 words
The process of claim 34 wherein after step (d) the resist areas are removed from the substrate.
Claim 41
Dependent Claim
82 words
The process of claim 34 wherein the microgel swells at least 10% in at least one of the following solvents: n-heptane, carbon tetrachloride, toluene, methylene chloride, ethyl acetate, acetone, acetonitrile, acetic acid, dimethylsulfoxide, dimethylformamide, formamide, water, aqueous ammonium hydroxide solution containing up to 10% by weight ammonia, aqueous potassium hydroxide solution containing up to 10% by weight potassium hydroxide, methylene chloride-methanol solution containing by weight 92% methylene chloride and 8% methanol, and aqueous sodium carbonate solution containing by weight 1% sodium carbonate.
Claim 42
Dependent Claim
19 words
The process of claim 36 wherein the microgel swells at least 50% in at least one of the solvents.
Claim 43
Dependent Claim
15 words
The process of claim 34 which has a creep viscosity of at least 20 megapoise.
Claim 44
Dependent Claim
15 words
The process of claim 38 which has a creep viscosity of at least 40 megapoise.
References Cited (Backward Citations)
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