Patent US4469620A successfully refreshed from Google Patents.
EP0230348A2
Expired / Lapsed
EP
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Test probe
Assignee: HP Inc
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Filing: 1987-01-07
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Granted: —
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Expires: 2007-01-07
Abstract
Abstract A test probe for integrated circuits is presented. This probe has a flexible membrane with leads and contacts formed with lithographic techniques. The leads can be formed to minimize voltage reflections and crosstalk. Also, termination devices can be added near the device under test in order to match the impedance of the device under test. This combination facilitates the testing of high density integrated circuits at high frequencies while the circuits are still on the wafer. Also, high density substrates for multi-chip carriers can be tested with this probe.
Inventors
- 👤 Garrett A. Garrettson
- 👤 Clinton C. Chao
- 👤 Armand P. Neukermans
- 👤 Brian C. Leslie
- 👤 Jack D. Foster
- 👤 Michael Greenstein
- 👤 Farid Matta
- 👤 Robert Joly
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-02 14:56
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307; G01R1/0735
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
71 words
A test probe for making contact with multiple contact points of an integrated circuit, having a plurality of contacts on a contact member, each contact being connected by a lead to an output terminal, wherein the contact member is a flexible membrane (1) carrying a plurality of leads (15) connected to a plurality of contact pads (17), and in that deflection means (9, 67) are provided for the flexible membrane (1).
Claim 2
Dependent Claim
71 words
A test probe for making contact with multiple contact points of an integrated circuit, having a plurality of contacts on a contact member, each contact being connected by a lead to an output terminal, wherein the contact member is a flexible membrane (1) carrying a plurality of leads (15) connected to a plurality of contact pads (17), and in that deflection means (9, 67) are provided for the flexible membrane (1).
Claim 3
Dependent Claim
20 words
A test probe as claimed in Claim 1, wherein shielding means for said leads is located adjacent to said leads.
Claim 4
Dependent Claim
27 words
A test probe as claimed in Claim 2, wherein said shielding means comprises a first grounded layer located adjacent to said flexible membrane and near said leads.
Claim 5
Dependent Claim
25 words
A test probe as claimed in Claim 2, wherein said shielding means further comprises a plurality of grounded conducting strips located adjacent to said leads.
Claim 6
Dependent Claim
28 words
A test probe as claimed in any preceding claim, wherein said leads (15) and/or components (5) connected thereto electrically modify signals passed to from the contact pads (17).
Claim 7
Dependent Claim
18 words
A test probe as claimed in any preceding claim wherein said contact pads (17) have a semi-spherical shape.
Claim 8
Dependent Claim
26 words
A test probe as claimed in any preceding claim, wherein the contact pads (17) are formed by a deposition technique, such as electroplating, evaporation, or sputtering.
Claim 9
Dependent Claim
20 words
A test probe as claimed in any preceding claim, wherein said flexible membrane (1) is mounted in a frame (7).
Claim 10
Dependent Claim
23 words
A test probe as claimed in any preceding claim, wherein said deflection means comprises a polymeric spring located adjacent to said flexible membrane.
Claim 11
Dependent Claim
27 words
A test probe as claimed in any of Claims 1 to 8, wherein said deflection means comprises an enclosure having said flexible membrane forming a wall thereof.
Claim 12
Dependent Claim
19 words
A test probe as claimed in Claim 10, wherein said enclosure can be pressurized to deflect said flexible membrane.
Claim 13
Dependent Claim
26 words
A test probe as claimed in Claim 11, wherein another wall of said enclosure can be moved to produce pressurization causing said flexible membrane to deflect.
Claim 14
Dependent Claim
21 words
A test probe as claimed in any preceding claim, wherein said flexible membrane has reduced thickness adjacent to said contact pads.
Claim 15
Independent Claim
64 words
A method of making a test probe comprising the steps of: providing a conductor pattern on one surface of a flexible membrane; providing a plurality of contact pads at appropriate spacings and each in contact with a conductor of said pattern; mounting said membrane in a frame; causing said conductor pattern to contact a further conductor pattern leading to output terminals on said frame.
Claim 16
Independent Claim
64 words
A method of making a test probe comprising the steps of: providing a conductor pattern on one surface of a flexible membrane; providing a plurality of contact pads at appropriate spacings and each in contact with a conductor of said pattern; mounting said membrane in a frame; causing said conductor pattern to contact a further conductor pattern leading to output terminals on said frame.
Claim 17
Independent Claim
60 words
A method of conducting tests on integrated circuits comprising bringing a flexible membrane carrying a conductor pattE-n into registration with an integrated circuit to be tested; clamping the membrane in relation to the integrated circuit; and causing pressure to be applied between contact pads of said conductor pattern and contact points of the integrated circuit, during which the membrane deflects.
Claim 18
Independent Claim
60 words
A method of conducting tests on integrated circuits comprising bringing a flexible membrane carrying a conductor pattE-n into registration with an integrated circuit to be tested; clamping the membrane in relation to the integrated circuit; and causing pressure to be applied between contact pads of said conductor pattern and contact points of the integrated circuit, during which the membrane deflects.
Claim 19
Dependent Claim
27 words
A method as claimed in Claim 15, wherein with deflection of the membrane the contact pads scrub across the contact points to ensure a good electrical contact.
Claim 20
Dependent Claim
25 words
A method as claimed in Claim 15 or 16, wherein the pressure is applied by a fluid medium in a chamber bounded by the membrane.
References Cited (Backward Citations)
No citation records indexed.
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