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EP0224911A2
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EP
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High-molecular-weight soluble novolak resin and process for preparation thereof
Assignee: Toray Industries Inc
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Filing: 1986-12-02
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Granted: —
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Expires: 2006-12-02
Abstract
Abstract Disclosed is a novel, organic solvent-soluble novolak resin having a high molecular weight and an inherent viscosity of at least 0.1. This high-molecular-weight novolak resin can be prepared with a good reproducibility by reacting an aldehyde with a polyfunctional phenol at an aldehyde/ polyfunctional phenol molar ratio of from 0.85 to 1.20 in the presence of an acidic catalyst in a solution state. This high-molecular-weight novolak resin is valuable as the resin component of a radiation-sensitive resist.
Inventors
- 👤 Takashi Kubota
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-05 15:14
CPC Classifications
C; C08; C08G; C08G8/00; C08G8/04; C08G8/08; C08G8/10; G; G03; G03F; G03F7/00; G03F7/004; G03F7/008; G03F7/012; G03F7/022; G03F7/023; G03F7/0233; G03F7/0236
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
27 words
1 . An organic solvent-soluble, high-molecular-weight novolak resin having an inherent viscosity of at least 0.1, which is obtained by reacting a polyfunctional phenol with an aldehyde.
Claim 2
Dependent Claim
27 words
1 . An organic solvent-soluble, high-molecular-weight novolak resin having an inherent viscosity of at least 0.1, which is obtained by reacting a polyfunctional phenol with an aldehyde.
Claim 3
Dependent Claim
20 words
A high-molecular-weight novolak resin according to claim 1 which has a solubility in acetone of at least 95% at 25°C.
Claim 4
Dependent Claim
16 words
A high-molecular-weight novolak resin according to claim 1, wherein the inherent viscosity is at least 0.15.
Claim 5
Dependent Claim
28 words
A high-molecular-weight novolak resin according to claim 1, wherein the molar ratio of the aldehyde to the polyfunctional phenol is within the range of from 0.85 to 1.20.
Claim 6
Dependent Claim
74 words
A high-molecular-weight novolak resin according to claim 1, wherein the polyfunctional phenol is at least one member selected from the group consisting of phenol and compounds represented by the formulae and OH in which R 1 and R 2 independently represent an alkyl group having 1 to 10 carbon . atoms, a phenyl group, a halogen atom or a hydroxyl group, and X represents -CH 2 -, -C(CH 3 ) 2 - or -0-.
Claim 7
Dependent Claim
27 words
A high-molecular-weight novolak resin according to claim 5, wherein the polyfunctional phenol comprises at least 30 mole% of a phenol having a functionality of at least 3.
Claim 8
Dependent Claim
27 words
A high-molecular-weight novolak resin according to claim 6, wherein the polyfunctional phenol comprises at least 50 mole% of a phenol having a functionality of at least 3.
Claim 9
Dependent Claim
49 words
A high-molecular-weight novolak resin according to claim 5, wherein the polyfunctional phenol is at least one member selected from the group consisting of phenol, compounds represented by the formulae in which R 3 and R 4 independently represent an alkyl group having 1 to 3 carbon atoms, and resorcinol.
Claim 10
Dependent Claim
29 words
A high-molecular-weight novolak resin according to claim 8, wherein the polyfunctional phenol is at least one member selected from the group consisting of phenol, o-cresol, m-cresol, p-cresol and 3,5-xylenol.
Claim 11
Dependent Claim
27 words
A high-molecular-weight novolak resin according to claim 1, wherein the aldehyde is at least one member selected from the group consisting of formaldehyde, trioxane, tetraoxane and paraformaldehyde.
Claim 12
Dependent Claim
52 words
ll. A process for the preparation of an organic solvent-soluble, high-molecular-weight novolak resin having an inherent viscosity of at least 0.1, which comprises reacting a polyfunctional phenol with an aldehyde at an aldehyde/polyfunctional phenol molar ratio of from 0.85 to 1.20 in the presence of an acidic catalyst in a solution state.
Claim 13
Dependent Claim
52 words
ll. A process for the preparation of an organic solvent-soluble, high-molecular-weight novolak resin having an inherent viscosity of at least 0.1, which comprises reacting a polyfunctional phenol with an aldehyde at an aldehyde/polyfunctional phenol molar ratio of from 0.85 to 1.20 in the presence of an acidic catalyst in a solution state.
Claim 14
Dependent Claim
34 words
A process for the preparation of a high-molecular-weight novolak resin according to claim 11, wherein the molar ratio of the aldehyde to the polyfunctional phenol is in the range of from 0.90 to 1.15.
Claim 15
Dependent Claim
80 words
A process for the preparation of a high-molecular-weight novolak resin according to claim 11, wherein the polyfunctional phenol is at least one member selected from the group consisting of phenol and compounds represented by the formulae and OH in which R 1 and R 2 inde- penaentiy represent an alkyl group having 1 to 10 carbon atoms, a phenyl group, a halogen atom or a hydroxyl group, and X represents -CH 2 -, -C(CH 3 ) 2 - or -0-.
Claim 16
Dependent Claim
33 words
A process for the preparation of a high-molecular-weight novolak resin according to claim 13, wherein the polyfunctional phenol comprises at least 30 mole% of a phenol having a functionality of at least 3.
Claim 17
Dependent Claim
33 words
A process for the preparation of a high-molecular-weight novolak resin according to claim 14, wherein the polyfunctional phenol comprises at least 50 mole% of a phenol having a functionality of at least 3.
Claim 18
Dependent Claim
55 words
A process for the preparation of a high-molecular-weight novolak resin according to claim 13, wherein the polyfunctional phenol is at least one member selected from the group consisting of phenol, compound represented by the formulae in which R 3 and R 4 independently represent an alkyl group having 1 to 3 carbon atoms, and resorcinol.
Claim 19
Dependent Claim
35 words
A process for the preparation of a high-molecular-weight novolak resin according to claim 16, wherein the polyfunctional phenol is at least one member selected from the group consisting of phenol, o-cresol, m-cresol, p-cresol and 3,5-xylenol.
Claim 20
Dependent Claim
29 words
A process for the preparation of a high-molecular-weight novolak resin, wherein the aldehyde is at least one member selected from the group consisting of formaldehyde, trioxane, tetraoxane and paraformaldehyde.
Claim 21
Dependent Claim
29 words
A process for the preparation of a high-molecular-weight novolak resin, wherein the aldehyde is at least one member selected from the group consisting of formaldehyde, trioxane, tetraoxane and paraformaldehyde.
Claim 22
Dependent Claim
22 words
A process for the preparation of a high-molecular-weight novolak resin according to claim 11, wherein the acidic catalyst is a protonic acid.
Claim 23
Dependent Claim
47 words
A process for the preparation of a high-molecular-weight novolak resin according to claim 11, wherein the reaction is proceeded in the presence of an alcohol or thioalcohol having 2 to 2 0 carbon atoms in an amount of at least 0.3 mole per mole of the aldehyde.
Claim 24
Dependent Claim
37 words
A process for the preparation of a high-molecular-weight novolak resin, wherein the alcohol is at least one member selected from the group consisting of aliphatic monohydric alcohols, alkyl and aryl ethers of polyhydric alcohols and hydroxycarboxylic acids.
Claim 25
Dependent Claim
37 words
A process for the preparation of a high-molecular-weight novolak resin, wherein the alcohol is at least one member selected from the group consisting of aliphatic monohydric alcohols, alkyl and aryl ethers of polyhydric alcohols and hydroxycarboxylic acids.
Claim 26
Dependent Claim
22 words
A radiation-sensitive resist comprises as the resin component an organic solvent-soluble, high-molecular-weight novolak resin having an inherent viscosity of at least 0.1.
Claim 27
Dependent Claim
22 words
A radiation-sensitive resist comprises as the resin component an organic solvent-soluble, high-molecular-weight novolak resin having an inherent viscosity of at least 0.1.
References Cited (Backward Citations)
No citation records indexed.
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