EP0224273A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Resist developing apparatus
Assignee: Daikin Industries Ltd
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Filing: 1986-11-28
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Granted: —
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Expires: 2006-11-28
Abstract
Abstract A resist developing apparatus comprising a developing tank (1) consisting of a top portion, a body portion, and a bottom portion, at least one of the top, body, and bottom portions being comprised of an inner wall and an outer wall, a heat exchange chamber (14, 14a) being defined between the inner and outer walls for being supplied with a heating medium; a chuck (16) disposed inside the developing tank (1) for holding a photoplate (W) in position, a nozzle (2) for spraying chemical liquid toward the photoplate (W) held in position by the chuck; a heating medium supply unit (7) for supplying heating medium at a specified temperature to the heat exchange chamber; and piping (76, 77) connecting between the heating medium supply unit and the heat exchange chamber, whereby the interior of the developing tank (1) is adapted to be controlled to a specified temperature.
Inventors
- 👤 Toshitaka Takei
- 👤 Tsunemasa Funatsu
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-08 18:42
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/30; G03F7/3021; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
232 words
A resist developing apparatus comprising: a developing tank (1, 99, 300, 500) consisting of a top portion (13, 130, 513), a body portion (11, 111, 511), and a bottom portion (12, 512), at least one of said top portion (13, 130, 513), body portion (11, 111, 511), and bottom portion (12, 512) being comprised of an inner wall and an outer wall, a heat exchange chamber (14, 14a, 14b, 14c, 14d, 14e, 14f, 14g) being defined between said inner and outer walls for being supplied with heating medium; a holding means (16, 516) disposed inside said developing tank (1, 99, 300, 500) for holding a work piece (W) in position; a spray means (2, 2a, 2b, 2c) disposed in said tank (1, 99, 300, 500) for spraying chemical liquid toward the work piece (W) held by said holding means (16, 516); a heating medium supply means (7) for supplying heating medium at a specified temperature to said heat exchange chamber (14, 14a, 14b, 14c, 14d, 14e, 14f, 14g), said supply means including a heating medium tank for storing the heating medium, a heating medium temperature control means for regulating the temperature of the heating medium, and a heating medium pump for supply of the heating medium; and piping (76, 77, 876) connecting between said heating medium supply means (7) and said heat exchange chamber (14, 14a, 14b, 14c, 14d, 14e, 14f, 14g).
Claim 2
Dependent Claim
232 words
A resist developing apparatus comprising: a developing tank (1, 99, 300, 500) consisting of a top portion (13, 130, 513), a body portion (11, 111, 511), and a bottom portion (12, 512), at least one of said top portion (13, 130, 513), body portion (11, 111, 511), and bottom portion (12, 512) being comprised of an inner wall and an outer wall, a heat exchange chamber (14, 14a, 14b, 14c, 14d, 14e, 14f, 14g) being defined between said inner and outer walls for being supplied with heating medium; a holding means (16, 516) disposed inside said developing tank (1, 99, 300, 500) for holding a work piece (W) in position; a spray means (2, 2a, 2b, 2c) disposed in said tank (1, 99, 300, 500) for spraying chemical liquid toward the work piece (W) held by said holding means (16, 516); a heating medium supply means (7) for supplying heating medium at a specified temperature to said heat exchange chamber (14, 14a, 14b, 14c, 14d, 14e, 14f, 14g), said supply means including a heating medium tank for storing the heating medium, a heating medium temperature control means for regulating the temperature of the heating medium, and a heating medium pump for supply of the heating medium; and piping (76, 77, 876) connecting between said heating medium supply means (7) and said heat exchange chamber (14, 14a, 14b, 14c, 14d, 14e, 14f, 14g).
Claim 3
Dependent Claim
64 words
A resist developing apparatus as set forth in claim 1, wherein the body portion (11) and the bottom portion (12) of said developing tank (99) are each comprised of an inner wall and an outer wall, heat exchange chambers (14b, 14c) being defined between said inner wall and said outer wall for being supplied with heating medium from said heating medium supply means (7).
Claim 4
Dependent Claim
69 words
A resist developing apparatus as set forth in claim 1, wherein the top portion (513), the body portion (511), and the bottom portion (512) of said developing tank (500) are each comprised of an inner wall and an outer wall, heat exchange chambers (14g, 14e, 14f) being defined between said inner wall and said outer wall for being supplied with heating medium from said heating medium supply means (7).
Claim 5
Dependent Claim
66 words
A resist developing apparatus as set forth in claim 1, wherein piping (50, 600a, 600b, 600c) for directing chemical liquids to said spray means (2, 2a, 2b, 2c) are disposed in the heat exchange chamber (14d, 14e) of said developing tank (300, 500) so that heat exchange may be effected between the chemical liquids in said piping and the heating medium in said heat exchange chamber.
Claim 6
Dependent Claim
71 words
A resist developing apparatus as set forth in claim 1, wherein a heat insulation member (602) for covering a part of said developing tank (500) is provided so as to define a heat insulation chamber (603) between said part and said heat insulation member (602), control means (802, 803) being disposed in said heat insulation chamber (603) for controlling the supply of chemical liquids to said spray means (2a, 2b, 2c).
Claim 7
Dependent Claim
68 words
A resist developing apparatus as set forth in claim 5, wherein said control means (802, 803) is held in contact with said piping (876) connecting between said heat exchange chamber and said heating medium supply means so that heat exchange may be effected between the heating medium flowing in said piping (876) and said control means (802, 803) to regulate the temperature of said control means (802, 803).
Claim 8
Dependent Claim
49 words
A resist developing apparatus as set forth in claim 1, wherein the bottom portion (512) of said developing tank (500) is connectably separated from said body portion (511), there being provided an actuator (589) for moving said bottom portion (512) up and down relative to said body portion (511).
Claim 9
Dependent Claim
41 words
A resist developing apparatus as set forth in claim 1, wherein the heating medium temperature control means of said heating medium supply means (7) includes a compressor (58), an evaporator (72), and a condenser (78) for formation of a refrigeration cycle.
Claim 10
Dependent Claim
22 words
A resist developing apparatus as set forth in claim 1, wherein said heating medium temperature control means includes an electric heater (71).
Claim 11
Dependent Claim
22 words
A resist developing apparatus as set forth in claim 8, wherein said heating medium temperature control means includes an electric heater (71).
References Cited (Backward Citations)
No citation records indexed.
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