EP0222739A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Process for the production of a transmission mask
Assignee: Ims Ionen Mikrofabrikations Systems GmbH
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Filing: 1986-11-13
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Granted: —
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Expires: 2006-11-13
Abstract
Abstract In a process for the production of the mask, a mask foil, preferably of nickel or invar, is anchored in a stress-free manner using a frame, preferably made of silicon. <IMAGE>
Inventors
- 👤 Hans Dr. Löschner
- 👤 Gerhard Dr. Stengl
- 👤 Peter Dr. Wolf
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-01 08:09
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/20
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