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EP0217584A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Highly thermoconductive ceramic substrate

Assignee: Toshiba Corp
•
Filing: 1986-09-15
•
Granted: —
•
Expires: 2006-09-15
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Abstract

Abstract A highly thermoconductive ceramic substrate, which is characterized by having formed on a ceramic substrate (1) an electroconductive coating (2) consisted of a mixture of tungten and or molybdenum with the nitride of a transition metal belonging to Group IVa of the Periodic Table of Elements. As the ceramic substrate in the present invention, a non-oxide type ceramic substrate is used because of satisfactory strength. The formation of the electroconductive coating consisted preponderantly of a mixture of tungsten and/or molybdenum with the nitride of a metal belonging to Group IVa of the Periodic Table Elements is accomplished, for example, by preparing a metallizing composition in the form paste or solution containing a metal salt of tungstic acid or molybdic acid and a transition metal of Group IVa or a compound thereof, applying the metallizing composition on the ceramic substrate, heating the resulting composite, then firing the composite.

Inventors

  • 👤 Shunichiro Tanaka
  • 👤 Akio Sayano
  • 👤 Yasuyuki Sugiura
  • 👤 Hiroyuki Ishizuka

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-10-30 03:59
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/45; C04B41/50; C04B41/51; C04B41/5177; C04B41/5133; H; H10; H10W; H10W40/00; H10W40/20; H10W40/25; H10W40/259; H10W70/00; H10W70/01; H10W70/05; H10W70/60; H10W70/67; H10W70/69; H10W70/692; H05; H05K; H05K1/00; H05K1/02; H05K1/09; H05K1/092; H10W72/00; H10W72/50; H10W72/551; H10W72/552; H10W72/5524; H10W72/851; H10W72/874; H10W72/884; H10W90/00; H10W90/701; H10W90/731; H10W90/734; H10W90/751; H10W90/754; H10W90/756; Y; Y10; Y10S; Y10S428/00; Y10S428/901; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24917; Y10T428/24926

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 41 words
(1 ) A highly thermoconductive ceramic substrate, characterized by forming on a ceramic substrate (1) an electroconductive coating (2) comprising mixture of tungsten and/or molybdenum with the nitride of a transition metal of Group IVa of the Periodic Table of Elements.
Claim 2
Dependent Claim 26 words
(2) A highly thermoconductive ceramic substrate according to Claim 1, wherein said electroconductive coating (2) is a patterned circuit in consequence of electropolishing and/or chemical etching.
Claim 3
Dependent Claim 26 words
(3) A highly thermoconductive ceramic substrate according to claim 1 or Claim 2, which further comprises a metal coating (3) deposited on said electroconductive coating (4.
Claim 4
Dependent Claim 59 words
(4) A highly thermocoductive ceramic substrate according to any of Claims 1 through 3, wherein said electrocoductive coating (2) contains tungsten and/or molybdenum and the nitride of a transition metal of Group IVa in a total amount of not less than 50 mol% and contains either of the two components in an amount of not less than 2 mol%.
Claim 5
Dependent Claim 25 words
(5) A highly thermoconductive ceramic substrate according to any of Claims 1 through 4, wherein said electroconductive coating (2) is comprised molybdeum and titanium nitride.
Claim 6
Dependent Claim 26 words
(6) A highly thermoconductive ceramic substrate according to any of Claims 1 through 5, wherein said ceramic substrate 1 is made of a non-oxide type ceramic.
Claim 7
Dependent Claim 20 words
(7) A highly thermoconductive ceramic substrate according to Claim 6, wherein said non-oxide type ceramic is a nitride type ceramic.
Claim 8
Dependent Claim 20 words
(8) A highly thermocoductive ceramic substrate according to Claim 7, wherein said ceramic substrate is a substrate for a semiconductor.

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