EP0216603A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Microwave apparatus for generating plasma afterglows
Assignee: Machine Technology Inc
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Filing: 1986-09-17
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Granted: —
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Expires: 2006-09-17
Abstract
Abstract An apparatus for treating a workpiece by a plasma formed from a gas, said apparatus including plasma forming means for forming a plasma therein from said gas, said plasma forming means including first energy applying means for applying a first energy to said gas for forming said plasma, a process chamber for receiving a workpiece arranged in fluid communication with said plasma forming means for receiving said plasma therein, and second energy applying means for applying a second energy to said plasma within said process chamber to achieve treating of said workpiece, characterized in that said plasma forming means is arranged spaced apart from said process chamber to isolate said first energy from said workpiece within said process chamber, whereby said workpiece is treated within said process chamber by said plasma therein while being subjected to said second energy, and including generating means (150) for generating ultraviolet light said generating means arranged for directing said ultraviolet light into a portion of said plasma forming means, whereby said ultraviolet light ignites said plasma therein. The process chamber includes a pair of spaced-apart electrodes characterized in that the distance between said electrodes is substantially constant with one of said electrodes having a curved peripheral portion having a radius of curvature (X) corresponding to the constant distance between said electrodes.
Inventors
- 👤 John Edward Spencer
- 👤 Richard Alan Borel
- 👤 Kenneth Elgin Linxwiler
- 👤 Andrew Millard Hoff
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-30 15:17
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; G; G03; G03F; G03F7/00; G03F7/26; G03F7/36; G03F7/42; G03F7/427; H01J37/32082; H01J37/32192; H01J37/32211; H01J37/32247; H01J37/32357
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
139 words
An apparatus for treating a workpiece by a plasma formed from a gas, said apparatus including plasma forming means for forming a plasma therein from said gas, said plasma forming means including first energy applying means for applying a first energy to said gas for forming said plasma, a process chamber for receiving a workpiece arranged in fluid communication with said plasma forming means for receiving said plasma therein, and second energy applying means for applying a second energy to said plasma within said process chamber to achieve treating of said workpiece, characterized in that said plasma forming means is arranged spaced apart from said process chamber to isolate said first energy from said workpiece within said process chamber, whereby said workpiece is treated within said process chamber by said plasma therein while being subjected to said second energy.
Claim 2
Independent Claim
139 words
An apparatus for treating a workpiece by a plasma formed from a gas, said apparatus including plasma forming means for forming a plasma therein from said gas, said plasma forming means including first energy applying means for applying a first energy to said gas for forming said plasma, a process chamber for receiving a workpiece arranged in fluid communication with said plasma forming means for receiving said plasma therein, and second energy applying means for applying a second energy to said plasma within said process chamber to achieve treating of said workpiece, characterized in that said plasma forming means is arranged spaced apart from said process chamber to isolate said first energy from said workpiece within said process chamber, whereby said workpiece is treated within said process chamber by said plasma therein while being subjected to said second energy.
Claim 3
Dependent Claim
34 words
An apparatus according to Claim 1, characterized in that said first energy applying means comprises a microwave power source (134, 136) and said second energy applying means comprises a radio frequency power source (214).
Claim 4
Dependent Claim
37 words
An apparatus according to Claim 1 or 2, characterized in that said process chamber includes a support (196 or 224) for said workpiece, said support including means (194 or 226) for controlling the temperature of said workpiece.
Claim 5
Dependent Claim
22 words
An apparatus according to Claim 3, characterized in that said support (196 or 224) includes means (200) for centering said workpiece thereon.
Claim 6
Independent Claim
36 words
An apparatus according to any one of the preceding claims, characterized in that said process chamber includes a pair of spaced-apart electrodes (224, 232) of unequal surface area, the distance between said electrodes being substantially constant.
Claim 7
Dependent Claim
33 words
An apparatus according to Claim 5, characterized in that one of said electrodes (232) includes a curved peripheral portion having a radius of curvature (X) corresponding to the constant distance between said electrodes.
Claim 8
Independent Claim
132 words
An apparatus according to any one of the preceding claims, .,herein said plasma forming means includes a resonant cavity and transporting means extending through said resonant cavity for transporting a gas therethrough from a source thereof, characterized in that said transporting means is arranged to permit its movement relative to said resonant cavity, said process chamber having a portion (122 or 230) movable between an open position and a closed position for receiving said workpiece, said transporting means connected to said portion of said process chamber for transporting said plasma to said process chamber for treating said workpiece, whereby the relative movement between said transporting means and said resonant cavity permits said resonant cavity and said first energy applying means to remain stationary during the opening and closing of said process chamber.
Claim 9
Dependent Claim
28 words
An apparatus according to Claim 7, characterized in that said resonant cavity comprises an elongated, rectangular-shaped cavity having a longitudinal axis along which said first energy is propagated.
Claim 10
Dependent Claim
29 words
An apparatus according to Claim 7 or 8, characterized in that said transporting means includes a linear portion arranged substantially parallel to the longitudinal axis of said resonant cavity.
Claim 11
Dependent Claim
48 words
An apparatus according to Claim 7, 8 or 9, characterized in that said transporting means includes a displaced portion arranged outside said resonant cavity, whereby a portion of said transporting means exiting said resonant cavity is displaced from a portion of said transporting means entering said process chamber.
Claim 12
Independent Claim
45 words
An apparatus according to ny one of the preceding claims, further characterized by generating means (150) for generating ultraviolet light, said generating means arranged for directing said ultraviolet light into a portion of said plasma forming means, whereby said ultraviolet light ignites said plasma therein.
Claim 13
Independent Claim
87 words
An apparatus for treating a workpiece by a gas, said apparatus including a process chamber for receiving a workpiece, a pair of spaced-apart electrodes within said process chamber, and energy applying means coupled to said electrodes for applying energy to said gas within said process chamber to achieve treating of said workpiece, characterized in that the distance between said electrodes is substantially constant with one of said electrodes having a curved peripheral portion having a radius of curvature (X) corresponding to the constant distance between said electrodes.
Claim 14
Independent Claim
87 words
An apparatus for treating a workpiece by a gas, said apparatus including a process chamber for receiving a workpiece, a pair of spaced-apart electrodes within said process chamber, and energy applying means coupled to said electrodes for applying energy to said gas within said process chamber to achieve treating of said workpiece, characterized in that the distance between said electrodes is substantially constant with one of said electrodes having a curved peripheral portion having a radius of curvature (X) corresponding to the constant distance between said electrodes.
Claim 15
Dependent Claim
18 words
An apparatus according to Claim 12, characterized in that said pair of spaced-apart electrodes have unequal surface areas.
Claim 16
Independent Claim
91 words
An apparatus for treating a workpiece by a plasma formed from a gas, said apparatus including plasma forming means for forming a plasma from said gas, a process chamber for receiving a workpiece to be treated by said plasma, said process chamber arranged in fluid communication with said plasma forming means for receiving said plasma, said apparatus characterized by generating means (150) for generating ultraviolet light, said generating means arranged for directing said ultraviolet light into a portion of said plasma forming means, whereby said ultraviolet light ignites said plasma therein.
Claim 17
Independent Claim
91 words
An apparatus for treating a workpiece by a plasma formed from a gas, said apparatus including plasma forming means for forming a plasma from said gas, a process chamber for receiving a workpiece to be treated by said plasma, said process chamber arranged in fluid communication with said plasma forming means for receiving said plasma, said apparatus characterized by generating means (150) for generating ultraviolet light, said generating means arranged for directing said ultraviolet light into a portion of said plasma forming means, whereby said ultraviolet light ignites said plasma therein.
Claim 18
Dependent Claim
32 words
An apparatus according to Claim 14, characterized in that said process chamber includes a pair of spaced-apart electrodes (224, 232) of unequal surface area, the distance between said electrodes being substantially consent.
Claim 19
Dependent Claim
33 words
An apparatus according to Claim 15, characterized in that one of said electrodes (232) includes a curved peripheral portion having a radius of curvature (X) corresponding to the constant distance between said electrodes.
Claim 20
Dependent Claim
57 words
An apparatus according to Claim 14, 15 or 16, wherein said plasma forming means includes a resonant cavity and transporting means extending through said resonant cavity for transporting a gas therethrough from a source thereof, characterized in that said generating means (150) directs said ultraviolet light into a portion of said transporting means within said resonant cavity.
Claim 21
Independent Claim
102 words
An apparatus for treating a workpiece by a plasma formed from a gas, said apparatus including a resonant cavity having a longitudinal axis, transporting means extending through said resonant cavity for transporting a gas therethrough from a source thereof, a source of energy coupled to said resonant cavity for generating a plasma from said gas within said transporting means, and a process chamber arranged in fluid communication with said transporting means for receiving a workpiece to be treated by said plasma, characterized in that said transporting means includes a linear portion arranged substantially parallel to said longitudinal axis of said resonant cavity.
Claim 22
Independent Claim
102 words
An apparatus for treating a workpiece by a plasma formed from a gas, said apparatus including a resonant cavity having a longitudinal axis, transporting means extending through said resonant cavity for transporting a gas therethrough from a source thereof, a source of energy coupled to said resonant cavity for generating a plasma from said gas within said transporting means, and a process chamber arranged in fluid communication with said transporting means for receiving a workpiece to be treated by said plasma, characterized in that said transporting means includes a linear portion arranged substantially parallel to said longitudinal axis of said resonant cavity.
Claim 23
Dependent Claim
46 words
An apparatus according to Claim 18, characterized in that said transporting means includes a first displaced portion arranged outside said resonant cavity, whereby a portion of said transporting means exiting said resonant cavity is displaced from a portion of said transporting means entering said process chamber.
Claim 24
Dependent Claim
22 words
An apparatus according to Claim 19, characterized in that said transporting means includes a second displaced portion arranged within said resonant cavity.
References Cited (Backward Citations)
No citation records indexed.
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