EP0212713A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Process for manufacturing a mask for use in X-ray photolithography using a monolithic support and resulting structure
Assignee: Micronix Corp
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Filing: 1986-07-22
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Granted: —
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Expires: 2006-07-22
Abstract
Abstract A process for manufacturing a mask for use in x-ray photolithography begins with a step of providing a glass disk (50) which is coated with a layer of boron nitride (52). The glass disk is about ¼ of an inch thick and about 4.5 to 6 inches in diameter. A circular portion (50a) of the boron nitride layer on one side of the glass disk is removed thus exposing a circular portion of the glass disk. The exposed portion of the glass disk is then removed, leaving a glass ring coated with a boron nitride membrane on one side. A layer of polyimide (54) and a layer of x-ray opaque substance (58) is deposited on the boron nitride membrane. The x-ray opaque que substance is then patterned, the resulting structure being a mask which is used in x-ray photolithography.
Inventors
- 👤 Alexander R. Shimkunas
- 👤 James J. Labrie
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 09:39
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/22; Y; Y10; Y10S; Y10S430/00; Y10S430/167
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
100 words
A process for manufacturing a mask comprising the steps of providing a disk of a first material, covering said disk with a layer of x-ray transparent material, removing a portion of said disk after said step of covering said disk, and forming a patterned layer of x-ray opaque material on said layer of x-ray transparent material, the remaining portion of said first material providing mechanical support for said layer of x-ray transparent material, said process characterized in that said remaining portion of said first material remains substantially flat without the need for bonding said remaining portion to an additional support.
Claim 2
Dependent Claim
100 words
A process for manufacturing a mask comprising the steps of providing a disk of a first material, covering said disk with a layer of x-ray transparent material, removing a portion of said disk after said step of covering said disk, and forming a patterned layer of x-ray opaque material on said layer of x-ray transparent material, the remaining portion of said first material providing mechanical support for said layer of x-ray transparent material, said process characterized in that said remaining portion of said first material remains substantially flat without the need for bonding said remaining portion to an additional support.
Claim 3
Dependent Claim
22 words
The process of Claim 1 further characterized in that said first material is glass and said x-ray transparent material is boron nitride.
Claim 4
Dependent Claim
14 words
The process of Claim 1 further characterized in that said first material is borosilicate.
Claim 5
Dependent Claim
15 words
The process of Claim 1 further characterized in that said first material is fused silica.
Claim 6
Dependent Claim
14 words
The process of Claim 1 further characterized in that said first material is silicon.
Claim 7
Dependent Claim
24 words
The process of Claim 1 further characterized in that said disk has a cavity formed therein prior to said step of covering said disk.
Claim 8
Dependent Claim
17 words
The process of Claim 1 further characterized in that said disk is at least 1/4 inches thick.
Claim 9
Dependent Claim
16 words
The process of Claim 1 further characterized in that said disk has a 6 inch diameter.
Claim 10
Dependent Claim
33 words
The process of Claim 1 characterized in that said x-ray transparent material is under a tension greater than or equal to 6 x 10 8 dynes/cm 2 at the conclusion of said process.
Claim 11
Dependent Claim
95 words
A process for manufacturing a mask comprising the steps of providing a support member of a first material, covering said support member with a layer of x-ray transparent material, removing a portion of said support member after said step of covering said support member, and forming a patterned layer of x-ray opaque material on said layer of x-ray transparent material, said process being characterized in that the remaining portion of said first material is sufficiently strong so that the stress in said layer of x-ray transparent material does not cause said support member to bow.
Claim 12
Dependent Claim
95 words
A process for manufacturing a mask comprising the steps of providing a support member of a first material, covering said support member with a layer of x-ray transparent material, removing a portion of said support member after said step of covering said support member, and forming a patterned layer of x-ray opaque material on said layer of x-ray transparent material, said process being characterized in that the remaining portion of said first material is sufficiently strong so that the stress in said layer of x-ray transparent material does not cause said support member to bow.
Claim 13
Dependent Claim
27 words
The process of Claim 10 further characterized by comprising the step of removing a portion of said layer of x-ray transparent material with an air abrasive tool.
Claim 14
Dependent Claim
21 words
The process of Claim 10 characterized in that said layer of x-ray transparent material is formed directly on said support member.
Claim 15
Dependent Claim
116 words
A mask comprising a support member of a first material having a hole therein, said support member having a top surface, said hole extending through said top surface, a boron nitride membrane formed directly on said top surface, a portion of said membrane extending over said hole, said portion of said membrane over said hole being coplanar with the portion of said membrane formed directly on said top surface, a patterned layer of x-ray opaque material formed on said membrane, said support member providing mechanical support for said membrane, said mask being characterized in that said support member is sufficiently strong so that said support member does not bow in response to tension in said membrane.
Claim 16
Dependent Claim
116 words
A mask comprising a support member of a first material having a hole therein, said support member having a top surface, said hole extending through said top surface, a boron nitride membrane formed directly on said top surface, a portion of said membrane extending over said hole, said portion of said membrane over said hole being coplanar with the portion of said membrane formed directly on said top surface, a patterned layer of x-ray opaque material formed on said membrane, said support member providing mechanical support for said membrane, said mask being characterized in that said support member is sufficiently strong so that said support member does not bow in response to tension in said membrane.
Claim 17
Dependent Claim
117 words
A mask comprising a ring of a first material, said ring having a top surface, a centrally defined hole being formed in said ring through said top surface, a boron nitride membrane formed directly on said top surface of said ring, a portion of said membrane extending over said hole, said portion of said membrane extending over said hole being coplanar with the portion of said membrane formed directly on said top surface, and a patterned layer of x-ray opaque material formed on said membrane, said mask being characterized in that said ring provides mechanical support for said membrane such that said ring remains substantially flat without the need for bonding said ring to an additional support.
Claim 18
Dependent Claim
117 words
A mask comprising a ring of a first material, said ring having a top surface, a centrally defined hole being formed in said ring through said top surface, a boron nitride membrane formed directly on said top surface of said ring, a portion of said membrane extending over said hole, said portion of said membrane extending over said hole being coplanar with the portion of said membrane formed directly on said top surface, and a patterned layer of x-ray opaque material formed on said membrane, said mask being characterized in that said ring provides mechanical support for said membrane such that said ring remains substantially flat without the need for bonding said ring to an additional support.
Claim 19
Dependent Claim
13 words
The mask of Claim 14 characterized in that said first material is glass.
Claim 20
Dependent Claim
13 words
The mask of Claim 14 characterized in that said first material is borosilicate.
Claim 21
Dependent Claim
14 words
The mask of Claim 14 characterized in that said first material is fused silica.
Claim 22
Dependent Claim
13 words
The mask of Claim 14 characterized in that said first material is silicon.
Claim 23
Dependent Claim
130 words
A process for manufacturing a mask comprising the steps of providing a support member of a first material, said support member having a surface, growing an x-ray transparent layer directly on said surface, removing a portion of said support member in contact with said x-ray transparent layer, thereby forming a hole in said support member, said hole extending through said support member, the portion of said x-ray transparent layer previously in contact with said removed portion extending over said hole, and forming a patterned layer of x-ray opaque material on said layer of x-ray transparent material, said process characterized in that the remaining portion of said first material is sufficiently strong so that the stress in said layer of x-ray transparent material does not cause said support member to bow.
Claim 24
Dependent Claim
130 words
A process for manufacturing a mask comprising the steps of providing a support member of a first material, said support member having a surface, growing an x-ray transparent layer directly on said surface, removing a portion of said support member in contact with said x-ray transparent layer, thereby forming a hole in said support member, said hole extending through said support member, the portion of said x-ray transparent layer previously in contact with said removed portion extending over said hole, and forming a patterned layer of x-ray opaque material on said layer of x-ray transparent material, said process characterized in that the remaining portion of said first material is sufficiently strong so that the stress in said layer of x-ray transparent material does not cause said support member to bow.
Claim 25
Dependent Claim
23 words
The process of Claim 19 characterized in that said x-ray transparent layer is grown on said surface with a chemical vapor deposition process.
References Cited (Backward Citations)
No citation records indexed.
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