EP0211667A2
Expired / Lapsed
EP
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Radiation-sensitive resin composition
Assignee: JSR Corp
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Filing: 1986-08-07
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Granted: —
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Expires: 2006-08-07
Abstract
Abstract A radiation-sensitive resin composition comprises a solution of an alkali-soluble resin and a radiation-sensitive compound in a solvent comprising a monooxymonocarboxylic acid ester. This composition has a high storgage stability (i.e., a very small amount of fine particles are formed during storage) and is suited for use as a resist for making integrated circuits.
Inventors
- 👤 Yoshihiro Hosaka
- 👤 Ikuo Nozue
- 👤 Masashige Takatori
- 👤 Yoshiyuki Harita
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-24 00:44
CPC Classifications
C; C08; C08J; C08J7/00; C08J7/12; C08J7/16; C08J7/18; G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/0226; G03F7/0048; G03F7/008; G03F7/0085
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
28 words
A radiation-sensitive resin composition comprising a solution of an alkali-soluble resin and a radiation-sensitive compound in a solvent, characterized in that said solvent comprises a monooxymonocarboxylic acid ester.
Claim 2
Dependent Claim
28 words
A radiation-sensitive resin composition comprising a solution of an alkali-soluble resin and a radiation-sensitive compound in a solvent, characterized in that said solvent comprises a monooxymonocarboxylic acid ester.
Claim 3
Dependent Claim
74 words
A composition according to Claim 1, wherein the monooxymonocarboxylic acid ester is a compound represented by the formula (I): wherein R 1 represents a hydrogen atom, an alkyl group having from 1 to 3 carbon atoms or an acyl group having from 1 to 4 carbon atoms; R 2 represents an alkylene group having from 1 to 4 carbon atoms; and R 3 represents an alkyl group having from 1 to 4 carbon atoms.
Claim 4
Dependent Claim
37 words
A composition according to Claim 2, wherein the monooxymonocarboxylic acid ester is at least one of alkyl oxyacetates, alkyl alkoxyacetates, alkyl 3-oxypropionates, alkyl 3-alkoxypropionates, alkyl 2-oxypropionates, alkyl 2-alkoxypropionates, alkyl 2-oxy-2-methylpropionates, alkyl 2-alkoxy-2-methylpropionates, alkyl 2-oxy-3-methylbutanoates and alkyl 2-alkoxy-3-methylbutanoates.
Claim 5
Dependent Claim
71 words
A composition according to Claim 2, wherein the monooxymonocarboxylic acid ester is methyl oxyacetate, ethyl oxyacetate, butyl oxyacetate, methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate, methyl 3-oxypropionate, ethyl 3-oxypropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 2-oxypropionate, ethyl 2-oxypropionate, propyl 2-oxypropionate, ethyl 2-methoxypropionate, propyl 2-methoxypropionate, methyl 2-ethoxypropionate, ethyl 2-ethoxypropionate, methyl 2-oxy-2-methylpropionate, ethyl 2-oxy-2-methylpropionate, methyl 2-methoxy-2-methylpropionate, methyl 2-ethoxy-2-methylpropionate, methyl 2-oxy-3-methylbutanoate, ethyl 2-oxy-3-methylbutanoate, methyl 2-methoxy-3-methylbutanoate, methyl 2-ethoxy-3-methylbutanoate, ethyl 2-methoxy-3-methylbutanoate or ethyl 2-ethoxy-3-methylbutanoate.
Claim 6
Dependent Claim
20 words
A composition according Claim 2, wherein the monooxycarboxylic acid ester is at least one of methyl 2-oxypropionate and ethyl 2-oxypropionate.
Claim 7
Dependent Claim
33 words
A composition according to any one of the preceding Claims, wherein the solvent comprising a monooxymonocarboxylic acid ester is present in an amount of from 40 to 90% by weight of the composition.
Claim 8
Dependent Claim
44 words
A composition according to any one of the preceding Claims, wherein the solvent consists of said monooxymonocarboxylic acid ester and at least one other solvent, the amount of said other solvent(s) being less than 30% by weight of the total weight of the solvent.
Claim 9
Dependent Claim
23 words
A composition according to Claim 7, wherein said other solvent is at least one ether, ester, ketone, fatty acid, alcohol or aromatic hydrocarbon.
Claim 10
Dependent Claim
82 words
A composition according to Claim 7, wherein said other solvent is at least one of ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, benzyl ethyl ether, dihexyl ether, ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethyl acetate, butyl acetate, benzyl acetate, ethyl benzoate, diethyl oxalate, diethyl maleate, ethylene carbonate, propylene carbonate, γ-butyrolactone, methyl ethyl ketone. cyclohexanone, diisobutyl ketone, acetonitrile, isophorone, caproic acid, capric acid, 1-octanol, 1-nonanol, benzyl alcohol, toluene and xylene.
References Cited (Backward Citations)
No citation records indexed.
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