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EP0211618A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Integrated circuit package

Assignee: Hitachi Ltd
•
Filing: 1986-07-31
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Granted: —
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Expires: 2006-07-31
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Abstract

Abstract An integrated circuit package has a semiconductor element (1) mounted on an insulating substrate (4) which has a coefficient of thermal expansion from 35 to 40 x 10 -7 /°C and a high thermal conductivity, preferably a sintered product of silicon carbide. The substrate (4), and the element (1) are covered by a cap (5) which has a coefficient of thermal expansion of 20 to 55 x 10 -7 /°C and an airtight seal is provided by sealing glass (6) which has a coefficient of thermal expansion from 30 to 55 x 10 -7 /°C. Leads (3) extend through the glass (6) and are connected to the substrate (1) via wires (2). The leads have a coefficient of thermal expansion less than 40 x 10- 7 / °C, e.g. an alloy of iron containing nickel and cobalt. In this way the coefficient of thermal expansion of the leads (3) is set approximately equal to, or less than the coefficient of thermal expansion of the substrate (4), and this prevents cracking of the glass (6) when the package cools from the glass sealing temperature, or when the package is tested by thermal cycles.

Inventors

  • 👤 Masatoshi Tsuchiya
  • 👤 Satoru Ogihara
  • 👤 Hiromi Kagohara
  • 👤 Kanji Otsuka
  • 👤 Tomoji Oishi

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-10-23 21:38
CPC Classifications
H; H10; H10W; H10W76/00; H10W76/10; H10W76/12; H10W76/15; H10W76/157; H10W70/00; H10W70/40; H10W70/456; H10W70/60; H10W70/67; H10W70/69; H10W70/692; H10W76/60; H10W90/00; H10W70/68; H10W70/682; H10W70/685; H10W72/00; H10W72/851; H10W72/874; H10W72/884; H10W90/701; H10W90/721; H10W90/722; H10W90/731; H10W90/734; H10W90/751; H10W90/756; Y; Y10; Y10S; Y10S428/00; Y10S428/901

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 145 words
An integrated circuit package in which at least one semiconductor element (1) is mounted on an insulating substrate (4), and is accommodated in an airtight cell defined by the substrate (4), a cap (5) and sealing glass (6), ends of lead pieces (3) extending into the cell and being connected by wires (2) to element(s) (1), wherein the insulating substrate (4) is of a ceramics having a coefficient of thermal expansion from 35 to 40 x 10 /°C and a high thermal conductivity, the cap (5) is composed of a ceramics having a coefficient of thermal expansion of from 20 and 55 x 10 -7 /°C, the sealing glass has a coefficient of thermal expansion from 30 to 55 x 10 -7 /°C, and the lead pieces are composed of an alloy having a coefficient of thermal expansion smaller than 40 x 10 -7 /°C
Claim 2
Dependent Claim 145 words
An integrated circuit package in which at least one semiconductor element (1) is mounted on an insulating substrate (4), and is accommodated in an airtight cell defined by the substrate (4), a cap (5) and sealing glass (6), ends of lead pieces (3) extending into the cell and being connected by wires (2) to element(s) (1), wherein the insulating substrate (4) is of a ceramics having a coefficient of thermal expansion from 35 to 40 x 10 /°C and a high thermal conductivity, the cap (5) is composed of a ceramics having a coefficient of thermal expansion of from 20 and 55 x 10 -7 /°C, the sealing glass has a coefficient of thermal expansion from 30 to 55 x 10 -7 /°C, and the lead pieces are composed of an alloy having a coefficient of thermal expansion smaller than 40 x 10 -7 /°C
Claim 3
Dependent Claim 18 words
An integrated circuit package according to claim 1, wherein the lead pieces (3) are of a Ni-Co-Fe alloy.
Claim 4
Dependent Claim 36 words
An integrated circuit package according to claim 1, or claim 2, wherein the lead pieces (3) are of an iron alloy which contains nickel and cobalt and has a martensite transformation temperature of less than -55°C.
Claim 5
Dependent Claim 38 words
An integrated circuit package according to claim 3, wherein the iron alloy has a composition consisting of 2 9 to 31% by weight of nickel, 12.5 to 15.5% by weight of cobalt, and the remainder being substantially iron.
Claim 6
Dependent Claim 26 words
An integrated circuit package according to claim 4, wherein the iron alloy is annealed at a temperature ranging from 100° to 600°C to remove the stress.
Claim 7
Dependent Claim 35 words
An integrated circuit package according to any one of the preceding claims, wherein the sealing glass (6) is a low-melting glass that permits the sealing operation to be effected at a temperature less than 470°C.
Claim 8
Dependent Claim 23 words
An integrated circuit package according to any one of the preceding claims, wherein the substrate (4) is a sintered product of silicon carbide.
Claim 9
Dependent Claim 46 words
An integrated circuit package according to claim 7, wherein the sintered product has a composition which contains at least either one of beryllium or a beryllium compound in an amount of 0.05 to 5% by weight reckoned as beryllium, and the remainder being substantially silicon carbide.
Claim 10
Dependent Claim 24 words
An integrated circuit package according to any one of claims 1 to 6, wherein the substrate (4) is a sintered product of aluminium nitride.
Claim 11
Dependent Claim 31 words
An integrated circuit package according to any one of the preceding claims, wherein the cap (5) is any one of mullite ceramics, silicon carbide ceramics, zircon ceramics, or silicon nitride ceramics.
Claim 12
Dependent Claim 29 words
An integrated circuit package according to any one of the preceding claims, wherein the glass (6) is any one of S-eucryptite, lead titanate-type glass or lead borate- type glass.

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