EP0209860A2
Expired / Lapsed
EP
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Apparatus for contactless reflection measurement
Assignee: Carl Zeiss SMT GmbH
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Filing: 1986-07-18
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Granted: —
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Expires: 2006-07-18
Abstract
Abstract A reflectance measuring apparatus for contactless measurement is described, in which the result of measurement is not dependent on the distance from the test object within a predetermined range. This is attained by disposing the light source in the focus of a condenser, and by providing that the measuring area is smaller than the core region inside the irradiated area on the surface of the test object.
Inventors
- 👤 Hermann Dr. Gerlinger
- 👤 Gerhard Dr. Hohberg
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-26 19:31
CPC Classifications
G; G01; G01J; G01J3/00; G01J3/02; G01J3/0205; G01J3/0208; G01N; G01N21/00; G01N21/17; G01N21/47; G01N21/4738; G01N21/474; G01J3/28; G01J3/2803; G01J3/46; G01N21/84; G01N21/86
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