EP0202904A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Plasma reactor with removable insert
Assignee: CollabRx Inc
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Filing: 1986-05-19
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Granted: —
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Expires: 2006-05-19
Abstract
Abstract A parallel plate plasma reactor is disclosed in which the lower electrode comprises a metal electrode having a central pedestal and an insert for surrounding the pedestal and holding wafers in contact with the pedestal or in position above the pedestal. The insert can comprise an insulator, such as ceramic, or a metal.
Inventors
- 👤 David John Drage
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 02:12
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0418; H10P72/0421
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
79 words
In a plasma reactor having upper and lower electrodes, of which the lower electrode has placed thereon an article to be treated, the improvement comprising: the lower electrode having a pedestal formed in a first major surface thereof; and a ring surrounding said pedestal, and having an upper surface which is not co-planar with said first major surface; said ring comprising at least one raised member formed in the upper surface thereof for locating said article to be treated.
Claim 2
Dependent Claim
79 words
In a plasma reactor having upper and lower electrodes, of which the lower electrode has placed thereon an article to be treated, the improvement comprising: the lower electrode having a pedestal formed in a first major surface thereof; and a ring surrounding said pedestal, and having an upper surface which is not co-planar with said first major surface; said ring comprising at least one raised member formed in the upper surface thereof for locating said article to be treated.
Claim 3
Dependent Claim
17 words
The plasma reactor as set forth in claim 1 wherein said raised member comprises an annular ridge.
Claim 4
Dependent Claim
26 words
The plasma reactor as set forth in claim 2 wherein said ridge comprises a flattened top portion and a sloped portion on the interior side thereof.
Claim 5
Dependent Claim
15 words
The plasma reactor as set forth in claim 3 wherein said ring comprises conductive material.
Claim 6
Dependent Claim
15 words
The plasma reactor as set forth in claim 3 whrein said ring comprises non-conductive material.
Claim 7
Dependent Claim
23 words
The plasma reactor as set forth in claim 4 or 5 wherein said upper surface is lower than the top of said pedestal.
Claim 8
Dependent Claim
23 words
The plasma reactor as set forth in claim 4 or 5 wherein said upper surface is higher than the top of said pedestal.
Claim 9
Dependent Claim
15 words
The plasma reactor as set forth in claim 5 wherein said sloped portion is smooth.
Claim 10
Dependent Claim
24 words
The plasma reactor as set forth in claim 1 wherein said ring comprises an edge portion which slopes inwardly away from said uppe-r surface.
References Cited (Backward Citations)
No citation records indexed.
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