EP0202630A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Semiconductor wafer precision cutting device with integrated compensators to reduce errors caused by temperature changes
Assignee: Disco Corp
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Filing: 1986-05-16
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Granted: —
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Expires: 2006-05-16
Abstract
Abstract A precision device comprising a holding means (86) for holding an object and a supporting means (4, 6, 8, 10) for supporting an operating element (48), one of which is movable in a predetermined direction. The precision device includes a detecting means (52, 54) for detecting the amount of movement of one of the holding member (86) and the supporting member (10) in said predetermined direction, and the detecting means (52, 54) includes a scale (58, 68) formed of a material having a coefficient of linear expansion, in a temperature range of -20 to 100°C, of not more than 10 x 10 7/1Cas an absolute value. The precision device further comprises a detecting means (76, 80, 84) for detecting the amount of thermal expansion of at least a part (10) of the supporting means in said predetermined direction.
Inventors
- 👤 Shinji Sekiya
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-05 02:33
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0428; G; G05; G05B; G05B19/00; G05B19/02; G05B19/18; G05B19/404; B; B23; B23D; B23D59/00; B23D59/001; B23D59/002; B23Q; B23Q11/00; B23Q11/0003; B23Q11/0007; G01; G01B; G01B5/00; G01B5/0011; G01B5/0014; H10P72/06; H10P72/0602; H10P72/70; H10P72/78; G05B2219/00; G05B2219/30; G05B2219/37; G05B2219/37096; G05B2219/45; G05B2219/45044; G05B2219/49; G05B2219/49207
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
201 words
A precision device comprising holding means (86) adapted to hold an object, supporting means (2, 4,6, 8, 10) for supporting an operating element (48), driving means (18, 30, 94) for moving at least one of the supporting means and the holding means in a predetermined direction so as to position the object and the operating element (48) in a required relationship, and control means (100) for controlling the operation of the driving means; said device further comprising detecting means (76) including a measuring standard member (80) formed of a material having a low coefficient of linear expansion and a detector (84) for detecting the amount of thermal expansion of at least a part (10) of the supporting member (10) in said predetermined direction on the basis of the measuring standard member (80), said control means (100) being adapted to compensate the control of the operation of the driving means (18, 30, 94) on the basis of the amount of thermal expansion of at least a part (10) of the supporting means in said predetermined direction which is detected by the detector (76), thereby reducing errors of said positioning attributed to the thermal expansion of the supporting member caused by temperature change.
Claim 2
Dependent Claim
201 words
A precision device comprising holding means (86) adapted to hold an object, supporting means (2, 4,6, 8, 10) for supporting an operating element (48), driving means (18, 30, 94) for moving at least one of the supporting means and the holding means in a predetermined direction so as to position the object and the operating element (48) in a required relationship, and control means (100) for controlling the operation of the driving means; said device further comprising detecting means (76) including a measuring standard member (80) formed of a material having a low coefficient of linear expansion and a detector (84) for detecting the amount of thermal expansion of at least a part (10) of the supporting member (10) in said predetermined direction on the basis of the measuring standard member (80), said control means (100) being adapted to compensate the control of the operation of the driving means (18, 30, 94) on the basis of the amount of thermal expansion of at least a part (10) of the supporting means in said predetermined direction which is detected by the detector (76), thereby reducing errors of said positioning attributed to the thermal expansion of the supporting member caused by temperature change.
Claim 3
Dependent Claim
45 words
The precision device of claim 1 wherein the measuring standard member (80) is formed of a material having an absolute value of a coefficient of linear expansion, in a temperature range of -20 to 100 °C, of not more than 10 x 10 -7 /°C.
Claim 4
Dependent Claim
18 words
The precision device of claim 2 wherein the measuring standard member (80) is formed of a special glass.
Claim 5
Dependent Claim
82 words
The precision device of claim 1 wherein the supporting means comprises a supporting base stand (2, 6, 8) and a supporting member (4, 10) extending in said predetermined direction from its base end portion fixed to the supporting base stand; the operating element (48) is mounted on the free end portion of the supporting member (10); and the detecting means (76) detects the amount of thermal expansion of at least a greater portion of the supporting member (10) in said predetermined direction.
Claim 6
Dependent Claim
52 words
The precision device of claim 4 wherein the supporting means includes a rotating shaft (42) rotatably mounted on the free end portion of the supporting member (10) in such a manner as to be incapable of moving in said predetermined direction, and the operating element (48) is fixed to the rotating shaft.
Claim 7
Dependent Claim
33 words
The precision device of claim 4 wherein the measuring standard member (80) extends along the supporting member (10) from its one end portion fixed to the free end portion of the supporting member.
Claim 8
Dependent Claim
38 words
The precision device of claim 4 wherein the measuring standard member (80) extends along the supporting member (10) from its one end portion fixed to the supporting base stand or the base end portion of the supporting member.
Claim 9
Dependent Claim
23 words
The precision device of claim 1 wherein the measuring standard member (80) is composed of a scale having many lines to be detected.
Claim 10
Dependent Claim
157 words
The precision device of claim 1 which further comprises second detecting means (52, 54) for detecting the amount of movement of said one of the supporting means (2, 4, 6, 8) and the holding means (86) in said predetermined direction, said second detecting means comprising a scale (58, 68) having many lines to be detected and a detector (64, 74) for detecting said lines of the scale, said scale being formed of a material having a coefficient of linear expansion, in a temperature range of -20 to 100 °C, of not more than 1 0 x 10 -7 /°C as an absolute value, and in which the control means (100) controls the operation of the driving means (18, 30, 94) on the basis of the amount of movement of said one of the supporting means (2, 4, 6, 8) and the holding means (86) which is detected by the detector (64, 74) of the second detecting means.
Claim 11
Dependent Claim
22 words
The precision device of claim 9 wherein the scale of the second detecting means (52, 54) is formed of a special glass.
Claim 12
Dependent Claim
145 words
A precision device comprising a holding means (86) adapted to hold an object, a supporting means (2, 4, 6, 8, 10) for supporting an operating element (48), and a detecting means (52, 54, 76) at least one of ' the supporting means and the holding means being movable in a predetermined direction, and the detecting means including a scale (58, 68, 80) having many lines to be detected and a detector (64, 74, 84) for detecting said lines of the scale and being adapted to detect the amount of movement of at least one of the supporting means and the holding means in said predetermined direction; the scale of the detecting means being made of a material having a coefficient of linear expansion, in a temperature range of -20 to 100 °C, of not more than 10 x 10 -7 /°C as an absolute value.
Claim 13
Dependent Claim
145 words
A precision device comprising a holding means (86) adapted to hold an object, a supporting means (2, 4, 6, 8, 10) for supporting an operating element (48), and a detecting means (52, 54, 76) at least one of ' the supporting means and the holding means being movable in a predetermined direction, and the detecting means including a scale (58, 68, 80) having many lines to be detected and a detector (64, 74, 84) for detecting said lines of the scale and being adapted to detect the amount of movement of at least one of the supporting means and the holding means in said predetermined direction; the scale of the detecting means being made of a material having a coefficient of linear expansion, in a temperature range of -20 to 100 °C, of not more than 10 x 10 -7 /°C as an absolute value.
Claim 14
Dependent Claim
19 words
The precision device of claim 11 wherein the scale of the detecting means is made of a special glass.
References Cited (Backward Citations)
No citation records indexed.
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