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EP0201240A1 Expired / Lapsed EP ⏱️ 0.0 years remaining

Apparatus for supporting and/or conveying a plate with fluid without physical contact

Assignee: Seibu Giken Co Ltd
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Filing: 1986-04-23
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Granted: —
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Expires: 2006-04-23
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Abstract

Abstract The method comprises providing a flat surface (11) extending at opening (5) of a delivery pipe (3) to the substantially perpendicular direction to the flow direction of fluid (7) in pipe (3) and providing a ring-shaped or annular inhaling opening (4) of a suction pipe (1) around flat surface (11), the lower periphery of the outer wall of the outer pipe extending lower than flat surface (11) to form a stopper (12), moving the openings (4) and (5) near the plate (8), delivering fluid (7) from delivery pipe (3), inhaling fluid in inhaling opening (4), to support the plate (8), such as a semicondcutor wafer or a magnetic disc, near and at a constant distance from flat surface (11) without physical contact therewith, and to prevent disturbance of the surrounding atmosphere by the fluid and attachment of dust on the plate (8), or providing a flat surface (11) extending at opening (4) of an inhaling pipe (1) to the substantially perpendicular direction to the flow direction of fluid (6) in pipe (1) and providing a ring-shaped or annular opening (5) of a delivery pipe (3) around flat surface (11), or delivering said fluid (7) from said delivery opening (5).

Inventors

  • 👤 Tosimi Kuma

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-07 19:35
CPC Classifications
B; B65; B65G; B65G47/00; B65G47/74; B65G47/90; B65G47/91; B65G47/911; H; H10; H10P; H10P72/00; H10P72/30; H10P72/36; H10P72/70; H10P72/78

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 134 words
Method of supporting and/or conveying a plate (8) with fluid without physical contact, comprising providing a flat surface (11) extending at opening (5) of a 5 delivery pipe (3) to the substantially perpendicular direction to the flow direction of fluid (7) in said pipe (3), providing a ring-shaped or annular inhaling opening (4) of a suction pipe (1) around said flat surface (11), the lower periphery of the outer wall of the outer pipe 10 extending lower than said flat surface to form a stopper (12), moving the openings (4) and (5) near the plate 8, delivering said fluid (7) from said delivery pipe (3), inhaling said fluid in said inhaling opening (4), to support the plate (8) near and at a constant distance 15 from said flat surface (11) without physical contact therewith.
Claim 2
Dependent Claim 134 words
Method of supporting and/or conveying a plate (8) with fluid without physical contact, comprising providing a flat surface (11) extending at opening (5) of a 5 delivery pipe (3) to the substantially perpendicular direction to the flow direction of fluid (7) in said pipe (3), providing a ring-shaped or annular inhaling opening (4) of a suction pipe (1) around said flat surface (11), the lower periphery of the outer wall of the outer pipe 10 extending lower than said flat surface to form a stopper (12), moving the openings (4) and (5) near the plate 8, delivering said fluid (7) from said delivery pipe (3), inhaling said fluid in said inhaling opening (4), to support the plate (8) near and at a constant distance 15 from said flat surface (11) without physical contact therewith.
Claim 3
Dependent Claim 132 words
Method of supporting and/or conveying a plate (8) with fluid without physical contact, comprising providing a flat surface (11) extending at opening (4) of an inhaling pipe (1) to the substantially perpendicular direction 20 to the flow direction of fluid (6) in said pipe (1), providing a ring-shaped or annular opening (5) of a delivery pipe (3) around said flat surface (11), the lower periphery of the outer wall of the outer pipe extending lower than said flat surface to form a stopper (12), 25 moving the openings (4) and (5) near the plate (8), delivering said fluid (7) from said delivery opening (5), inhaling said fluid in said inhaling opening (4), to support the plate (8) near and at a constant distance from said flat surface (11) without physical contact therewith.
Claim 4
Dependent Claim 132 words
Method of supporting and/or conveying a plate (8) with fluid without physical contact, comprising providing a flat surface (11) extending at opening (4) of an inhaling pipe (1) to the substantially perpendicular direction 20 to the flow direction of fluid (6) in said pipe (1), providing a ring-shaped or annular opening (5) of a delivery pipe (3) around said flat surface (11), the lower periphery of the outer wall of the outer pipe extending lower than said flat surface to form a stopper (12), 25 moving the openings (4) and (5) near the plate (8), delivering said fluid (7) from said delivery opening (5), inhaling said fluid in said inhaling opening (4), to support the plate (8) near and at a constant distance from said flat surface (11) without physical contact therewith.
Claim 5
Dependent Claim 21 words
30 3. Method according to claim 1 or 2, in which channels (13) are provided radially on the flat surface (11).
Claim 6
Dependent Claim 23 words
Method according to claim 3, in which the channels (13) are curved and/or inclined from the radial direction of the flat surface (11).
Claim 7
Dependent Claim 62 words
Method according to any of claims 1 to 4, in which both the opening (4) of the suction pipe (1) and the opening (5) of delivery 5 pipe (3) are of ring shape or annular, the inner edge of the inner pipe and the outer edge of the outer pipe extending lower than the flat surface (11) to form stoppers (12a, 12b).
Claim 8
Dependent Claim 29 words
Method according to any of claims 1 to 5, in which the suction pipe (1) and the exhaust pipe (3) are put together to form 10 a handle (15).

References Cited (Backward Citations)

US3466079A Cited
DE1531192A1 Cited
US3523706A Cited
GB2091698A Cited

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