EP0199288A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Method and apparatus for removing small particles from a surface
Assignee: Individual
•
Filing: 1986-04-16
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Granted: —
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Expires: 2006-04-16
Abstract
Abstract A method for the removal of particles from a surface is described, comprising the steps of washing the surface in a solution of high-molecular-weight fluorinated surfactant in a non-polar fluorinated carrier liquid to remove the particles from the surface and disperse them in the solution; subsequently rinsing the surface in a rinsing liquid to remove the surfactant residue therefrom; and removing the rinsing liquid from the surface. The apparatus for the removal of small particles form a surface of a contaminated article comprises means for washing the article in a solution of high-molecular-weight fluorinated surfactant in a non-polar fluorinated carrier liquid; and means for rinsing the article in a rinsing liquid with which the surfactant is miscible.
Inventors
- 👤 Robert Kaiser
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-02 12:19
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/10; H10P70/15; B; B08; B08B; B08B3/00; B08B3/04; C; C23; C23G; C23G5/00; C23G5/02; C23G5/028; C23G5/02803; C23G5/032; Y; Y10; Y10S; Y10S148/00; Y10S148/017
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
69 words
The method of the removal of particles from a surface, which comprises the steps of: A. washing the surface in a solution of high-molecular-weight fluorinated surfactant in a non-polar fluorinated carrier liquid to remove the particles from the surface and disperse them in the solution; B. subsequently rinsing the surface in a rinsing liquid to remove the surfactant residue therefrom; and C. removing the rinsing liquid from the surface.
Claim 2
Independent Claim
69 words
The method of the removal of particles from a surface, which comprises the steps of: A. washing the surface in a solution of high-molecular-weight fluorinated surfactant in a non-polar fluorinated carrier liquid to remove the particles from the surface and disperse them in the solution; B. subsequently rinsing the surface in a rinsing liquid to remove the surfactant residue therefrom; and C. removing the rinsing liquid from the surface.
Claim 3
Dependent Claim
25 words
The method, as claimed in claim 1, in which said solution has a concentration of said surfactant in the range of 0.2 to 2.0 weight-percent.
Claim 4
Dependent Claim
16 words
The method, as claimed in claim 1, in which the rinsing liquid is the carrier liquid.
Claim 5
Dependent Claim
16 words
The method, as claimed in claim 1, in which the carrier liquid is a perfluorinated liquid.
Claim 6
Dependent Claim
17 words
The method, as claimed in claim 1, in which the carrier liquid is a highly-fluorinated hydrocarbon liquid.
Claim 7
Dependent Claim
27 words
The method, as claimed in claim 1, in which the carrier liquid has a boiling point at ambient pressure in the range of from 35°C to 150°C.
Claim 8
Dependent Claim
31 words
The method, as claimed in claim 1, in which the surfactant is a perfluorinated liquid containing 20 to 100 carbon atoms and one or more polar groups with active hydrogen atoms.
Claim 9
Dependent Claim
18 words
The method, as claimed in claim 1, in which the rinsing process is performed at an elevated temperature.
Claim 10
Dependent Claim
20 words
The method, as claimed in claim 1, in which the carrier liquid has a lower boiling point than the surfactant.
Claim 11
Dependent Claim
36 words
The method, as claimed in claim 1, in which: A. the surface is effectively withdrawn from the liquid after each step; and B. the rate of withdrawal is no greater than approximately one inch per minute.
Claim 12
Dependent Claim
22 words
The method, as claimed in claim 1, including successive rinsing steps begining with a first step and ending with a last step.
Claim 13
Dependent Claim
24 words
The method, as claimed in claim 11, in which each rinsing step rinses with liquid containing a lower surfactant concentration than previous rinsing step.
Claim 14
Dependent Claim
36 words
The method, as claimed in claim 11, in which the liquid in each rinsing step except the last step is liquid used in the subsequent rinsing step in rinsing the articles previously cleaned by said method.
Claim 15
Dependent Claim
27 words
The method, as claimed in claim 13, in which the liquid in the last step is distilled from the liquid previously used in the first rinsing step.
Claim 16
Dependent Claim
17 words
The method, as claimed in claim 1, including the application of ultrasonic agitation to the washing bath.
Claim 17
Dependent Claim
51 words
Apparatus for the removal of small particles from a surface of a contaminated article, comprising: A. means for washing the article in a solution of high-molecular-weight fluorinated surfactant in a non-polar fluorinated carrier liquid; and B. means for rinsing the article in a rinsing liquid with which the surfactant is miscible.
Claim 18
Dependent Claim
51 words
Apparatus for the removal of small particles from a surface of a contaminated article, comprising: A. means for washing the article in a solution of high-molecular-weight fluorinated surfactant in a non-polar fluorinated carrier liquid; and B. means for rinsing the article in a rinsing liquid with which the surfactant is miscible.
Claim 19
Dependent Claim
46 words
The apparatus of claim 16, wherein said washing means includes: A. a tank; B. means for introducing the washing bath into the tank; C. means for supporting the article in the washing bath; and D. means for slow withdrawal the article surface from the washing bath.
Claim 20
Dependent Claim
59 words
The apparatus of claim 16, wherein said rinsing means includes: A. a tank; B. means for introducing a succession of rinsing baths into the tank begining with the first bath and ending with the last bath; C. means for supporting the article in said rinsing baths; and D. means for slow withdrawal the article surface from said rinsing baths.
Claim 21
Dependent Claim
18 words
The apparatus of claim 18, including means for distillation of the liquid used in said first rinsing bath.
References Cited (Backward Citations)
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