EP0198361A2
Expired / Lapsed
EP
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Method and apparatus for thin film formation using photo-induced chemical reaction
Assignee: Hitachi Ltd
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Filing: 1986-04-04
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Granted: —
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Expires: 2006-04-04
Abstract
Abstract An apparatus for thin film formation using a photo-induced chemical reaction comprises a reaction chamber (2) in which a substrate (1) can be set, means (4) to introduce a reactive gas into the reaction chamber (2) for the purpose of causing a surface of the substrate (1) to adsorb the reactive gas, means (8) to evacuate the reaction chamber (2), means (10) to irradiate the substrate surface having adsorbed the reactive gas with photon energy for the purpose of forming a nucieds required for growing a film on the substrate surface, means (6) to generate metastable excited molecules which can react with the reactive gas to decompose it, and means (3, 5) to introduce the reactive gas and the metastable excited molecules into the reaction chamber (2) for the purpose of growing the film on the substrate (1) formed with the nucleus on the basis of the nucleus.
Inventors
- 👤 Kanji Tsujii
- 👤 Yusuke Yajima
- 👤 Seiichi Murayama
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-27 13:11
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/482; C23C16/483
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
147 words
An apparatus for thin film formation using a photo-induced chemical reaction comprising a reaction chamber (2) in which a substrate (1) can be set, means (4) to introduce a reactive gas into said reaction chamber (2) for the purpose of causing a surface of the substrate (1) to adsorb the reactive gas, means (8) to evacuate said reaction chamber (2), means (10) to irradiate the substrate surface having adsorbed the reactive gas with photon energy for the purpose of forming a nucleus required for growing a film on the substrate surface, means (6) to generate metastable excited molecules which can react with the reactive gas to decompose it, and means to introduce the reactive gas and the metastable excited molecules into said reaction chamber (2) for the purpose of growing the film on the substrate (1) formed with the nucleus and on the basis of the nucleus.
Claim 2
Independent Claim
147 words
An apparatus for thin film formation using a photo-induced chemical reaction comprising a reaction chamber (2) in which a substrate (1) can be set, means (4) to introduce a reactive gas into said reaction chamber (2) for the purpose of causing a surface of the substrate (1) to adsorb the reactive gas, means (8) to evacuate said reaction chamber (2), means (10) to irradiate the substrate surface having adsorbed the reactive gas with photon energy for the purpose of forming a nucleus required for growing a film on the substrate surface, means (6) to generate metastable excited molecules which can react with the reactive gas to decompose it, and means to introduce the reactive gas and the metastable excited molecules into said reaction chamber (2) for the purpose of growing the film on the substrate (1) formed with the nucleus and on the basis of the nucleus.
Claim 3
Dependent Claim
28 words
The apparatus of claim 1, wherein said reaction chamber (2) includes means (15) to project the photon energy while the metastable excited molecules are being introduced. (Fig. 2)
Claim 4
Dependent Claim
47 words
The apparatus of claim 1 or 2, wherein said reaction chamber is constructed of a plurality of reaction chambers (19, 20) and includes means (23, 24, 27, 28) capable of switchingly perform the introduction and discharge of the reactive gas or the metastable excited molecules. (Fig. 3)
Claim 5
Independent Claim
49 words
The apparatus of any of claims 1 to 3, wherein said means to introduce the reactive gas and said means to introduce the metastable excited molecules are circular tube structures (27, 34) each of which has a plurality of openings (28...31, 35...38) directed toward a center thereof. (Fig. 4)
Claim 6
Independent Claim
52 words
The apparatus of any of claims 1 to 4, wherein said reaction chamber is separated into a first reaction chamber (53) in which the substrate (55) adsorbs the reactive gas and the photon energy is projected, and a second reaction chamber (54) in which the metastable excited molecules are exerted. (Fig. 6)
Claim 7
Independent Claim
71 words
The apparatus of any of claims 1 to 4, wherein said reaction chamber is separated into a first reaction chamber (68) in which the substrate (71) adsorbs the reactive gas, a second reaction chamber (73) in which the substrate (75) is irradiated with the photon energy, and a third reaction chamber (77) in which the metastable excited molecules are exerted on the substrate (79) irradiated with the photon energy. (Fig. 7)
Claim 8
Dependent Claim
36 words
The apparatus of claim 6, wherein rooms (84, 90) which are evacuated are respectively disposed between said first and second reaction chambers (68, 73) and between said second and third reaction chambers (73, 77). (Fig. 8)
Claim 9
Independent Claim
28 words
The apparatus of any of claims 1 to 7, wherein the photon energy contains pattern information obtained by passing light through a mask or employing a laser beam.
References Cited (Backward Citations)
No citation records indexed.
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