EP0195223A2
Expired / Lapsed
EP
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Production of metallic structures on a non-conductive substrate
Assignee: Atotech Deutschland GmbH and Co KG
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Filing: 1986-02-07
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Granted: —
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Expires: 2006-02-07
Abstract
Abstract Translated from German Die Erfindung betrifft ein Verfahren zur Herstellung von elektrisch leitenden Strukturen auf Nichtleitern, dadurch gekennzeichnet, daß die Abscheidung eines metallischen Films durch Zersetzung metallorganischer Verbindungen in einer Glimmentladungszone erfolgt. The invention relates to a method for producing electrically conductive structures on non-conductors, characterized in that the deposition of a metallic film is carried out by decomposition of organometallic compounds in a glow discharge zone.
Inventors
- 👤 Harald Prof. Dr. Rer.Nat. Suhr
- 👤 Christian Oehr
- 👤 Ernst Feurer
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-25 20:28
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/06; C23C16/18; H; H05; H05K; H05K3/00; H05K3/10; H05K3/14; H05K3/146; H05K3/22; H05K3/24; H05K2201/00; H05K2201/03; H05K2201/0332; H05K2201/0335; H05K2201/0347
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