EP0192349A2
Expired / Lapsed
EP
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Polyimide embedded conductor process
Assignee: Tektronix Inc
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Filing: 1986-01-24
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Granted: —
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Expires: 2006-01-24
Abstract
Abstract A polyimide embedded conductor process assures adherence of a metal conductor to a polyimide layer and allows closer spacing between conductors. The conductor is laid on a sacrificial substrate, and then the polyimide layer is laid over the conductor and substrate. The substrate is etched away to expose the conductor, and the polyimide layer may be etched away from the conductor to form attachment tabs.
Inventors
- 👤 Carl W. Laakso
- 👤 John J. Reagan
- 👤 Robert L. Beckman
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-05 06:24
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/40; H05K3/4092; H05K3/10; H05K3/20; H05K3/205; H05K2201/00; H05K2201/01; H05K2201/0137; H05K2201/0154; H05K2203/00; H05K2203/01; H05K2203/0147; H05K2203/0152; H05K2203/03; H05K2203/0376; H05K2203/07; H05K2203/0703; H05K2203/0726; H05K3/0011; H05K3/0017; H05K3/002; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49155
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
42 words
A polyimide embedded conductor process comprising the steps of: depositing a conductor on a sacrificial substrate in a particular configuration; laying on a polyimide layer over said conductor and said sacrificial substrate; and etching away said sacrificial substrate to expose said conductor.
Claim 2
Dependent Claim
42 words
A polyimide embedded conductor process comprising the steps of: depositing a conductor on a sacrificial substrate in a particular configuration; laying on a polyimide layer over said conductor and said sacrificial substrate; and etching away said sacrificial substrate to expose said conductor.
Claim 3
Dependent Claim
27 words
A process as recited in claim 1 further comprising the step of selectively etching away said polyimide to expose portions of said conductor to form attachment tabs.
Claim 4
Dependent Claim
27 words
5 3. A process as recited in claim 1 further comprising the step of etching said particular configuration into said sacrificial substrate prior to said depositing step.
Claim 5
Dependent Claim
46 words
An electrical circuit comprising: a polyimide layer; and a conductor embedded in said polyimide layer by depositing said conductor on a sacrificial substrate, laying over said conductor and said sacrificial substrate by said polyimide layer, and then etching away said sacrificial substrate to expose said conductor.
Claim 6
Dependent Claim
46 words
An electrical circuit comprising: a polyimide layer; and a conductor embedded in said polyimide layer by depositing said conductor on a sacrificial substrate, laying over said conductor and said sacrificial substrate by said polyimide layer, and then etching away said sacrificial substrate to expose said conductor.
Claim 7
Dependent Claim
36 words
An electrical circuit as recited in claim 4 wherein said conductor comprises: a body embedded in said polyimide layer; and an attachment tab formed by etching away said polyimide layer from a portion of said conductor.
Claim 8
Dependent Claim
50 words
An electrical circuit comprising: a polyimide layer; and a conductor embedded in said polyimide layer by depositing said conductor in a pattern etched into a sacrificial substrate, laying over said conductor and said sacrificial substrate by said polyimide layer, and then etching away said sacrificial substrate to expose said conductor.
Claim 9
Dependent Claim
50 words
An electrical circuit comprising: a polyimide layer; and a conductor embedded in said polyimide layer by depositing said conductor in a pattern etched into a sacrificial substrate, laying over said conductor and said sacrificial substrate by said polyimide layer, and then etching away said sacrificial substrate to expose said conductor.
References Cited (Backward Citations)
No citation records indexed.
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