EP0183561A2
Expired / Lapsed
EP
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Microwave plasma processing process and apparatus
Assignee: Fujitsu Ltd
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Filing: 1985-11-29
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Granted: —
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Expires: 2005-11-29
Abstract
Abstract A microwave plasma processing process and apparatus useful in the fabrication of integrated circuits (IC) or similar semiconductor devices, wherein an object or material (33) to be processed, such as a semiconductor wafer, is processed with plasma generated using microwaves transmitted through a microwave transmission window (31) disposed perpendicular to an electric field (40) of progressive microwaves in a waveguide (30).
Inventors
- 👤 Shuzo Fujimura
- 👤 Toshimasa Kisa
- 👤 Yasunari Motoki
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-29 07:36
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32192; H01J37/32211; H01J37/32229; H01J37/32238; H05; H05H; H05H1/00; H05H1/24; H05H1/46
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
37 words
A microwave plasma processing process in which material is processed with plasma generated using microwaves transmitted through a microwave transmission window which is disposed substantially perpendicularly to an electric field of progressuve microwaves in a waveguide. claimed
Claim 2
Dependent Claim
25 words
A process as/in claim 1, in which said material is disposed substantially parallel to said microwave transmission window, which defines a part of said waveguide.
Claim 3
Dependent Claim
59 words
A microwave plasma processing apparatus which includes: a microwave generator; awaveguide, for progressive microwaves, connected with the microwave generator; a microwave transmission window defining a part of the waveguide, disposed substantially-perpendicular to an electric field of the progressive microwaves in the waveguide; and a vacuum reactor for processing material, the reactor being partially defined by said microwave transmission window.
Claim 4
Dependent Claim
59 words
A microwave plasma processing apparatus which includes: a microwave generator; awaveguide, for progressive microwaves, connected with the microwave generator; a microwave transmission window defining a part of the waveguide, disposed substantially-perpendicular to an electric field of the progressive microwaves in the waveguide; and a vacuum reactor for processing material, the reactor being partially defined by said microwave transmission window.
Claim 5
Dependent Claim
18 words
An apparatus as claimed in claim 3, in which the microwave transmission window is of an insulating material.
Claim 6
Dependent Claim
14 words
An apparatus as claimed in claim 4, in which the insulating material is silica.
Claim 7
Dependent Claim
14 words
An apparatus as claimed in claim 4, in which the insulating material is ceramic.
Claim 8
Dependent Claim
19 words
An apparatus as claimed in claim 3,4,5, or 6, in which the microwave transmission window comprises a disc-shaped element.
Claim 9
Dependent Claim
50 words
An apparatus as claimed in claim 3, 4,5, or 6, in which the microwave transmission window comprises two or more rectangular elements which are substantially parallel to each other, the distance between the two adjacent elements being substantially λ/4, wherein λg is a wavelength of the microwaves in the waveguide.
Claim 10
Independent Claim
10 words
An apparatus as claimed in any of claims 3 to
Claim 11
Dependent Claim
29 words
8, in which the vacuum reactor is provided with a reactive gas inlet and an evacuation outlet and a stage on which the material to be processed is laid.
Claim 12
Dependent Claim
29 words
8, in which the vacuum reactor is provided with a reactive gas inlet and an evacuation outlet and a stage on which the material to be processed is laid.
Claim 13
Dependent Claim
27 words
An apparatus as claimed in claim 9, in which the stage is reciprocatable in the direction of the electric field of the progressive microwaves in the waveguide.
Claim 14
Independent Claim
37 words
An apparatus as claimed in any of claims 3 to 10, in which material to be processed is provided, and the dimensions of the material to be processed are smaller than those of the microwave transmission window.
Claim 15
Independent Claim
32 words
An apparatus as claimed in any of claims 3 to 11, in which a total of the height of the waveguide in the direction of the electric field of the microwaves in
Claim 16
Dependent Claim
43 words
a region adjacent to the window, the thickness of the window, and the distance from the window to a stage on which the material to be processed is to be laid is less than λ/2, wherein a is a wavelength of the microwaves.
Claim 17
Dependent Claim
43 words
a region adjacent to the window, the thickness of the window, and the distance from the window to a stage on which the material to be processed is to be laid is less than λ/2, wherein a is a wavelength of the microwaves.
Claim 18
Independent Claim
40 words
An apparatus as claimed in any of claims 3 to 12, in which the height of the waveguide in the direction of the electric field of the microwave is gradually decreased in the direction of the progression of the microwaves.
Claim 19
Independent Claim
31 words
An apparatus as claimed in any of claims 3 to 13, in which the microwave transmission window is supported with a holder, which is fitted to the waveguide, and is replaceable.
References Cited (Backward Citations)
No citation records indexed.
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