EP0183052A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Sputtered films of metal alloy oxides
Assignee: PPG Industries Ohio Inc
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Filing: 1985-10-24
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Granted: —
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Expires: 2005-10-24
Abstract
Abstract A metal alloy oxide film and sputtering method for its producton are disclosed, as well as a high transmittance, low emissivity coated product employing said metal alloy oxide film as an antireflective film in combination with a metallic film such as silver. A method for improving the adhesion between metal and metal oxide films and an improved multiple layer coated article comprising primer layers between metal and metal oxide films are also disclosed.
Inventors
- 👤 Frank Howard Gillery
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-05 15:16
CPC Classifications
G; G02; G02B; G02B1/00; G02B1/10; G02B1/11; G02B1/113; G02B1/115; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C03; C03C; C03C17/00; C03C17/34; C03C17/36; C03C17/3602; C03C17/3613; C03C17/3618; C03C17/3644; C03C17/3652; C03C17/3657; C03C17/366; C03C17/3681; C23C14/06; C23C14/08; C23C14/086; C23C14/14; C23C14/18; C23C14/185; G02B1/116; G02B5/00; G02B5/20; G02B5/208; C03C2217/00; C03C2217/70; C03C2217/78
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
75 words
A high transmittance, low emissivity article comprising: a. a transparent nonmetallic substrate; b. a first transparent film comprising an oxide reaction product of a metal alloy comprising zinc and tin deposited on a surface of said substrate; c. a transparent metallic film deposited on said first metal alloy oxide film; and d. a second transparent film comprising an oxide reaction product of a metal alloy comprising zinc and tin deposited on said metal Lie film.
Claim 2
Dependent Claim
75 words
A high transmittance, low emissivity article comprising: a. a transparent nonmetallic substrate; b. a first transparent film comprising an oxide reaction product of a metal alloy comprising zinc and tin deposited on a surface of said substrate; c. a transparent metallic film deposited on said first metal alloy oxide film; and d. a second transparent film comprising an oxide reaction product of a metal alloy comprising zinc and tin deposited on said metal Lie film.
Claim 3
Dependent Claim
80 words
A high transmittance, low emissivity article comprising: a. a transparent nonmetallic substrate; b. a first transparent film comprising a metal oxide deposited on a surface of said substrate; c. a first transparent primer layer deposited on said first metal oxide film; d. a transparent reflective metallic film deposited on said primer layer; e. a second transparent primer layer deposited on said reflective metallic film; and f. a second transparent film comprising a metal oxide deposited on said second primer layer.
Claim 4
Dependent Claim
80 words
A high transmittance, low emissivity article comprising: a. a transparent nonmetallic substrate; b. a first transparent film comprising a metal oxide deposited on a surface of said substrate; c. a first transparent primer layer deposited on said first metal oxide film; d. a transparent reflective metallic film deposited on said primer layer; e. a second transparent primer layer deposited on said reflective metallic film; and f. a second transparent film comprising a metal oxide deposited on said second primer layer.
Claim 5
Dependent Claim
13 words
An article according to claims 1 or 2, wherein the substrate is glass.
Claim 6
Dependent Claim
12 words
An article according to claim 3, wherein the metallic film is silver.
Claim 7
Dependent Claim
15 words
An article according to claim 1,wherein the metal alloy consists essentially of zinc and tin.
Claim 8
Dependent Claim
18 words
An article according to claim 1,wherein the metal alloy comprises from about 10 to about 90 percent zinc.
Claim 9
Dependent Claim
22 words
An article according to claim 5, wherein the transparent film comprising an oxide reaction product of a metal alloy comprises zinc stannate.
Claim 10
Dependent Claim
34 words
An article according to claim 1, wherein a transparent film of metal alloy is deposited between the transparent metallic film and the second transparent film comprising an oxide reaction product of a metal alloy.
Claim 11
Dependent Claim
16 words
An article according to claim 8,wherein the transparent film of metal alloy comprises zinc and tin.
Claim 12
Dependent Claim
17 words
An article according to claim 6, wherein the metal alloy comprises about 30 to 60 percent zinc.
Claim 13
Dependent Claim
22 words
An article according to claim 2, wherein the metal oxide comprises an oxide reaction product of an alloy comprising zinc and tin.
Claim 14
Dependent Claim
21 words
An article according to claim 11,wherein the transparent film comprising an oxide reaction product of a metal alloy comprises zinc stannate.
Claim 15
Dependent Claim
35 words
An article according to claim 2, wherein the primer films deposited between the reflective metallic film and the transparent metal oxide film are selected from the group consisting of copper, indium and the oxides thereof.
Claim 16
Dependent Claim
11 words
An article according to claim 13,wherein the primer films comprise copper.
Claim 17
Dependent Claim
25 words
An article according to claim 13,wherein each primer layer is of a thickness which decreases the transmittance of the article between 0.5 and 10 percent.
Claim 18
Dependent Claim
22 words
An article according to claim 15,wherein the transmittance of the article is decreased between 1 and 5 percent by each primer layer.
Claim 19
Dependent Claim
13 words
An article according to claim 16, wherein the primer layer comprises copper oxide.
Claim 20
Independent Claim
72 words
A method for depositing a film comprising an oxide of a metal alloy comprising the steps of: a. forming a cathode target comprising a metal alloy of zinc and tin; b. placing a substrate to be coated in an evacuated chamber with said cathode target; and c. sputtering said metal alloy cathode target in a reactive atmosphere comprising oxygen thereby depositing a metal alloy oxide film on a surface of said substrate.
Claim 21
Independent Claim
72 words
A method for depositing a film comprising an oxide of a metal alloy comprising the steps of: a. forming a cathode target comprising a metal alloy of zinc and tin; b. placing a substrate to be coated in an evacuated chamber with said cathode target; and c. sputtering said metal alloy cathode target in a reactive atmosphere comprising oxygen thereby depositing a metal alloy oxide film on a surface of said substrate.
Claim 22
Dependent Claim
111 words
190 A method for making a'multiple layer high transmittance, low emissivity coated product comprising the steps of: a. placing a transparent, nonmetallic substrate in a sputtering chamber; b. sputtering a cathode target comprising an alloy of zinc and tin in a reactive atmosphere comprising oxygen to deposit a transparent metal alloy oxide film on a surface of said substrate; c. sputtering a silver cathode target, in an inert atmosphere to deposit a transparent silver film on said metal alloy oxide film; and d. sputtering a cathode target comprising an alloy of zinc and tin in a reactive atmosphere comprising oxygen to deposit a metal alloy oxide film on said silver film.
Claim 23
Dependent Claim
111 words
190 A method for making a'multiple layer high transmittance, low emissivity coated product comprising the steps of: a. placing a transparent, nonmetallic substrate in a sputtering chamber; b. sputtering a cathode target comprising an alloy of zinc and tin in a reactive atmosphere comprising oxygen to deposit a transparent metal alloy oxide film on a surface of said substrate; c. sputtering a silver cathode target, in an inert atmosphere to deposit a transparent silver film on said metal alloy oxide film; and d. sputtering a cathode target comprising an alloy of zinc and tin in a reactive atmosphere comprising oxygen to deposit a metal alloy oxide film on said silver film.
Claim 24
Independent Claim
139 words
A method for making a multiple layer high transmittance, low emissivity coated product comprising the steps of: a. placing a transparent, nonmetallic substrate in a sputtering chamber; b. sputtering a cathode target comprising an alloy of zinc and tin in a reactive atmosphere comprising oxygen to deposit a transparent metal alloy oxide film on a surface of said substrate; c. sputtering a copper target to deposit a primer layer on said oxide film; d. sputtering a silver cathode target, in an inert atmosphere to deposit a transparent silver film on said primer layer; e. sputtering a copper target to deposit a second primer layer on said silver film; and f. sputtering a cathode target comprising an alloy of zinc and tin in a reactive atmosphere comprising oxygen to deposit a metal alloy oxide film on said second primer layer.
Claim 25
Independent Claim
139 words
A method for making a multiple layer high transmittance, low emissivity coated product comprising the steps of: a. placing a transparent, nonmetallic substrate in a sputtering chamber; b. sputtering a cathode target comprising an alloy of zinc and tin in a reactive atmosphere comprising oxygen to deposit a transparent metal alloy oxide film on a surface of said substrate; c. sputtering a copper target to deposit a primer layer on said oxide film; d. sputtering a silver cathode target, in an inert atmosphere to deposit a transparent silver film on said primer layer; e. sputtering a copper target to deposit a second primer layer on said silver film; and f. sputtering a cathode target comprising an alloy of zinc and tin in a reactive atmosphere comprising oxygen to deposit a metal alloy oxide film on said second primer layer.
Claim 26
Independent Claim
80 words
A method for depositing a durable film comprising the steps of: a. sputtering a metal cathode target in a reactive atmosphere comprising oxygen thereby depositing a metal oxide film on a surface of a substrate; b. sputtering a primer layer over said metal oxide film; c. sputtering a reflective metallic film over said primer layer; d. sputtering a second primer layer over said reflective metallic film; and e. sputtering a second metal alloy oxide film over said second primer layer.
Claim 27
Independent Claim
80 words
A method for depositing a durable film comprising the steps of: a. sputtering a metal cathode target in a reactive atmosphere comprising oxygen thereby depositing a metal oxide film on a surface of a substrate; b. sputtering a primer layer over said metal oxide film; c. sputtering a reflective metallic film over said primer layer; d. sputtering a second primer layer over said reflective metallic film; and e. sputtering a second metal alloy oxide film over said second primer layer.
Claim 28
Independent Claim
13 words
A method according to claims 18,19,20 or 21, wherein said substrate is glass.
Claim 29
Dependent Claim
15 words
A method according to claim 22,wherein said metal alloy consists essentially of zinc and tin.
Claim 30
Dependent Claim
13 words
A method according to claim 23,wherein said metal alloy oxide comprises zinc stannate.
Claim 31
Dependent Claim
27 words
The method according to claim 11,which further comprises the step of depositing a transparent metal alloy film between said silver film and said metal alloy oxide film.
Claim 32
Dependent Claim
22 words
A method according to claim 21,wherein said primer layer is selected from the group consisting of copper, indium and the oxides thereof.
Claim 33
Independent Claim
12 words
A method according to claims 18-21, wherein said sputtering is magnetically enhanced.
References Cited (Backward Citations)
No citation records indexed.
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