EP0182471A2
Expired / Lapsed
EP
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Inspection apparatus with a scanning beam of radiation
Assignee: Sira Ltd
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Filing: 1985-09-18
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Granted: —
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Expires: 2005-09-18
Abstract
Abstract A beam of radiation is scanned across a sheet 13 and is either reflected therefrom or transmitted therethrough. Faults in the sheet 13 deflect, scatter or alternate the beam which is then passed to a retroreflector screen 24 where it forms an image 15. Analysis of the image 15 is carried out via the scanning means 22 to determine the faults in the sheet 13.
Inventors
- 👤 Robert Noel West
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-03 16:47
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/89; G01N21/8901
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
122 words
Inspection apparatus for inspecting an object, comprising means for scanning (22) a beam (12) of radiation across an object (13) under test, means (24) for receiving the beam of radiation to provide an image (15) as herein defined thereon after the beam (12) has been influenced by said object (13), means for examining the image (15) formed by the beam (12) on the receiving means (24) comprising focusing means (32) for forming a focused image (25) of said image (1') on the receiving means (24) onto a detector means (27) via the scanning means (22), the detector means (27) being sensitive to changes in the position and/or intensity of the image (25) formed thereon caused by the influence of the object (13).
Claim 2
Dependent Claim
122 words
Inspection apparatus for inspecting an object, comprising means for scanning (22) a beam (12) of radiation across an object (13) under test, means (24) for receiving the beam of radiation to provide an image (15) as herein defined thereon after the beam (12) has been influenced by said object (13), means for examining the image (15) formed by the beam (12) on the receiving means (24) comprising focusing means (32) for forming a focused image (25) of said image (1') on the receiving means (24) onto a detector means (27) via the scanning means (22), the detector means (27) being sensitive to changes in the position and/or intensity of the image (25) formed thereon caused by the influence of the object (13).
Claim 3
Dependent Claim
16 words
Apparatus as claimed in claim 1 in which the scanner comprises a rotatable mirror drum (22).
Claim 4
Dependent Claim
23 words
Apparatus as claimed in claim 1 or claim 2 in which the means for receiving the beam of radiation comprises a scattering screen.
Claim 5
Dependent Claim
24 words
Apparatus as claimed in claim 1 or claim 2 in which the means for receiving the beam of radiation comprises a retro-reflective screen (24).
Claim 6
Dependent Claim
29 words
Apparatus as claimed in any of claims 1 to 4 in which the detector means (27, 33) includes an analyser means (36, 37) for analysing the focused image (25).
Claim 7
Dependent Claim
82 words
Apparatus as claimed in any of claims 1 to 5 in which said detector means (27, 33) includes two areas (36, 37), one of which influences the focused image (25) in a different way to the other, the focused image (25) being passed to one (36) of the areas when the object (13) under test is normal and being deflected to or toward the other area (37) when the focused image (25) is influenced by faults in the object (13) under test.
Claim 8
Dependent Claim
64 words
Apparatus as claimed in claim 5 in which one (36) of the two areas has at least one dimension whcih generally corresponds to the outer dimension of the focused image (2") where it strikes the area (36) so that any deflection of the focused image (25) away from that first area (36) causes the focused image (25) to pass into the second area (37).
Claim 9
Dependent Claim
40 words
Apparatus as claimed in claim 6 or 7 in which one (36) of the areas is the same shape as the cross section of the focused image (25) and the other (37) of the areas surrounds the first area (36).
Claim 10
Dependent Claim
69 words
Apparatus as claimed in any of claims 6 to 8 in which one area (36) has a different opacity with respect to the other area (37` so that, if the detector means is arranged behind the two areas, the radiation received by the detector means varies as the focused image (25) is moved from one area to the other by a fault or flaw in the object under test.
Claim 11
Dependent Claim
46 words
Apparatus as claimed in claim 9 in which one area (36) has a transmission characteristic whereby it transmits or reflects half the intensity of the focused image (25) striking it, the other area (37) transmitting or reflecting substantially all of the focused image (25) striking it.
Claim 12
Dependent Claim
19 words
Apparatus as claimed in any of claims 6 to 10 in which said areas are defined by optical fibres.
References Cited (Backward Citations)
No citation records indexed.
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