EP0182193A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
A method of depositing a copper pattern on a substrate
Assignee: International Business Machines Corp
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Filing: 1985-11-05
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Granted: —
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Expires: 2005-11-05
Abstract
Abstract In a method of electrolessly depositing copper on a substrate, a palladium seed pattern is formed by directing light (eg from a laser) at the substrate in the presence of the vapour of a palladium compound, such as palladium (II) bis-(hexafluoroacetylacetonate). The substrate may be first coated with a polymer which is removed by excimer laser irradiation.
Inventors
- 👤 Thomas Hall Baum
- 👤 Frances Anne Houle
- 👤 Carol Ruth Jones
- 👤 Caroline Ann Kovac
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-25 04:00
CPC Classifications
C; C23; C23C; C23C18/00; C23C18/16; C23C18/18; C23C18/1851; C23C18/1872; C23C18/1875; C23C18/1879; C23C18/1601; C23C18/1603; C23C18/1607; C23C18/1608; C23C18/1612; C23C18/1803; C23C18/1813; C23C18/182; C23C18/1824; C23C18/1827; C23C18/1831; C23C18/1862; C23C18/1868; C23C18/20; C23C18/2006; C23C18/2026; C23C18/204; C23C18/28; C23C18/30; C23C18/31; C23C18/38; H; H05; H05K; H05K3/00; H05K3/10; H05K3/18; H05K3/181; H05K3/182; H05K3/184; H05K2203/00; H05K2203/10; H05K2203/107
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
66 words
A method of depositing a copper pattern on a substrate, the method comprising forming a palladium seed pattern on the substrate and electrolessly depositing copper on the parts of the substrate which have been seeded with palladium and being characterised by the palladium seed pattern being formed by directing a pattern of light at the substrate in the presence of the vapour of a palladium compound.
Claim 2
Independent Claim
66 words
A method of depositing a copper pattern on a substrate, the method comprising forming a palladium seed pattern on the substrate and electrolessly depositing copper on the parts of the substrate which have been seeded with palladium and being characterised by the palladium seed pattern being formed by directing a pattern of light at the substrate in the presence of the vapour of a palladium compound.
Claim 3
Dependent Claim
16 words
A method as claimed in claim 1, in which the radiation is produced by a laser.
Claim 4
Dependent Claim
56 words
A method as claimed in claim 2, including first coating the substrate with a polymer which is removed by irradiation with an excimer laser and then forming the palladium seed pattern on the substrate by directing a pattern of excimer laser radiation at the coated substrate in the presence of the vapour of the palladium compound.
Claim 5
Independent Claim
19 words
A method as claimed in any preceding claim, in which the palladium compound contains oxygen bonded to the palladium.
Claim 6
Dependent Claim
16 words
A method as claimed in claim 4, in which the palladium compound is palladium (II) bis-(hexafluoroacetylacetonate).
Claim 7
Independent Claim
16 words
A method as claimed in any preceding claim, in which the substrate is a semiconductor substrate.
Claim 8
Independent Claim
19 words
A method as claimed in any of claims 1 to 5, in which the substrate is a ceramic substrate.
Claim 9
Independent Claim
19 words
A method as claimed in any of claims 1 to 5, in which the substrate is a quartz substrate.
Claim 10
Independent Claim
19 words
A method as claimed in any of claims 1 to 5, in which the substrate is a polymer substrate.
Claim 11
Independent Claim
19 words
A method as claimed in any of claims 1 to 5, in which the substrate is an aluminium substrate.
References Cited (Backward Citations)
No citation records indexed.
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