EP0179369A2
Expired / Lapsed
EP
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Electrode and/or interconnection
Assignee: Hitachi Ltd
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Filing: 1985-10-11
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Granted: —
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Expires: 2005-10-11
Abstract
Abstract An electrode and/or interconnection formed by a single crystalline metal or alloy film is disclosed. In comparison with conventional electrodes and/or interconnections formed by polycrystalline metal or alloy the short or open fault of the electrode and/or interconnection resulting from electromigration is by far less likely to occur. The electrode and/or interconnection of the present invention is particularly effective for improving the reliability of miniature electrodes and/or interconnections whose line width is up to about 3 µm.
Inventors
- 👤 Yoichi Nishino
- 👤 Kenji Hinode
- 👤 Masao Kawamura
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-02 08:58
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/44; H10W20/4403; H10W20/4405; H10W20/4473
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
18 words
An electrode and/or interconnection substantially consisting of a single crystalline metal or alloy film having a desired shape.
Claim 2
Dependent Claim
18 words
An electrode and/or interconnection substantially consisting of a single crystalline metal or alloy film having a desired shape.
Claim 3
Dependent Claim
22 words
The electrode and/or interconnection as defined in claim 1 wherein said metal and said alloy are aluminum and an aluminum alloy, respectively.
Claim 4
Dependent Claim
26 words
The electrode and/or interconnection as defined in-claim 2 wherein said aluminum alloy is an Ai-Si alloy, an Aℓ-Mg alloy, an Aℓ-Cu alloy or an Aℓ-Ti alloy.
Claim 5
Dependent Claim
22 words
The electrode and/or interconnection as defined in claim 1 wherein said metal and said alloy is copper and a copper alloy, respectively.
Claim 6
Dependent Claim
30 words
The electrode and/or interconnection as defined in claim 4 wherein said copper alloy is a Cu-Mg alloy, a Cu-Ge alloy, a Cu-P alloy, a Cu-Si alloy or a Cu-Be alloy.
Claim 7
Dependent Claim
21 words
The electrode and/or interconnection as defined in claim 1 wherein said electrode and/or interconnection is up to about 3 µm wide.
Claim 8
Dependent Claim
52 words
The electrode and/or interconnection as defined in any of claims 1 to 6 wherein said single crystalline metal or alloy film (3) is formed on an insulator film (2), and is electrically connected to a substrate (1) through a polycrystalline conductor (4) formed inside a contact hole of said insulator film (2).
Claim 9
Dependent Claim
41 words
The electrode and/or interconnection as defined in any of claims 1 to 6 wherein said single crystalline metal or alloy film (3) is electrically connected to a substrate (1) and extends on an insulator film (2) formed on said substrate (1).
References Cited (Backward Citations)
No citation records indexed.
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