EP0175460A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Manufacture of diffraction gratings
Assignee: Dr Johannes Heidenhain GmbH
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Filing: 1985-07-25
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Granted: —
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Expires: 2005-07-25
Abstract
Abstract In a method of manufacturing a diffraction grating, the grating-bearing surface (20) of a master grating (10) is coated with a release agent, and a rigid substrate (16) has a layer of ultraviolet sensitive liquid resin (18) applied thereto before bringing the master grating and the substrate together to trap a film (22) of the liquid resin therebetween, whereafter the liquid resin is cured by exposure to ultraviolet light (24) through the master grating and the master grating and resin-profiled substrate are separated prior to completion of the diffraction grating by deposition of a thin metal film (26) on the resin-profiled surface of the substrate.
Inventors
- 👤 Robert Martin Pettigrew
- 👤 Robert James Longman
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-07 18:48
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0005; G03F7/001; G02; G02B; G02B5/00; G02B5/18; G02B5/1847; G02B5/1857
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
126 words
A method of manufacturing a diffraction grating characterised by the following steps in combination:- 1) coating the grating-bearing surface (20) of a light-transmitting master grating (10) with a release agent; 2) applying ultraviolet sensitive liquid resin (18) to a rigid substrate (16) and bringing the master grating and the substrate together to trap a film (22) of liquid resin between the substrate and the grating-bearing surface; 3) curing the resin film 22 by exposure thereof to ultra-violet light 24 transmitted through the master grating; 4) separating the master grating and the resin-profiled substrate at the grating-bearing surface of the master grating coated with release agent; 5) depositing a thin metal film (26) on to the resin-profiled surface (25) of the substrate, as by sputtering or evaporation.
Claim 2
Independent Claim
126 words
A method of manufacturing a diffraction grating characterised by the following steps in combination:- 1) coating the grating-bearing surface (20) of a light-transmitting master grating (10) with a release agent; 2) applying ultraviolet sensitive liquid resin (18) to a rigid substrate (16) and bringing the master grating and the substrate together to trap a film (22) of liquid resin between the substrate and the grating-bearing surface; 3) curing the resin film 22 by exposure thereof to ultra-violet light 24 transmitted through the master grating; 4) separating the master grating and the resin-profiled substrate at the grating-bearing surface of the master grating coated with release agent; 5) depositing a thin metal film (26) on to the resin-profiled surface (25) of the substrate, as by sputtering or evaporation.
Claim 3
Dependent Claim
84 words
A method according to claim 1, characterised by the following further steps:- 6) coating the deposited metal film on the substrate with liquid ultraviolet-sensitive resin (28); 7) covering the resin coating with a light-transmitting strip or plate (30) to smooth the surface of said resin coating and exposing the resin coating to ultra-violet light (32) through the light-transmitting strip or plate in order to cure the resin; 8) separating the light-transmitting strip or plate from the replica diffraction grating constituted by the treated substrate.
Claim 4
Dependent Claim
22 words
A method according to claim 1 or 2, characterised in that the substrate is a metal substrate such as a steel substrate.
Claim 5
Dependent Claim
29 words
A method according claim 3, characterised in that the metal substrate is surface roughened, as by line grinding or blasting, before application of the liquid resin in step 2.
Claim 6
Independent Claim
20 words
A method according to any of claims 1 to 4, characterised in that the deposited metal film is of aluminium.
Claim 7
Independent Claim
22 words
A method according to any of claims 1 to 5, characterised in that all steps are carried out at normal ambient temperatures.
Claim 8
Dependent Claim
14 words
A diffraction grating manufactured by the method of any of claims 1 to 6.
References Cited (Backward Citations)
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