EP0171615A2
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EP
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Hybrid optical integrated circuit and fabrication method thereof
Assignee: NTT Inc
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Filing: 1985-07-12
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Granted: —
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Expires: 2005-07-12
Abstract
Abstract A hybrid optical integrated circuit having a high-silica glass optical waveguide (32) formed on a silicon substrate (31), an optical fiber (34) and an optical device (36, 38) coupled optically to the optical waveguide (32), and an optical fiber guide (33) and an optical device guide (35,37) on the substrate (31) for aligning the optical fiber (34) and the optical device (36, 38) at predetermined positions, respectively, relative to the optical waveguide (32). Islands (42a-42j) carrying electrical conductors (45a, 45b) are disposed on the substrate (31). A first electrical conductor film (43) is formed on the substrate (31). Second electrical conductor films (45a, 45b) are formed on the top surfaces of the optical waveguide (32), the optical fiber guide (33), the optical device guide (35, 37) and the islands (42a-42j) and are electrically isolated from the first electrical conductor film (43). An electrical conductor member (44) is provided to feed electric power from the first and second electric conductor films (43, 45a, 45b) to the optical device (36, 38) which needs the power supply. The optical waveguide (32), the optical fiber guide (33), the optical device guide (35, 37) and the islands (42a-42j) are formed from the same high-silica glass optical waveguide film. Alignment of various portions is facilitated when assembling the circuit. A high coupling efficiency is realized with a low cost.
Inventors
- 👤 Masao Kawachi
- 👤 Yasufumi Yamada
- 👤 Mitsuho Yasu
- 👤 Hiroshi Terui
- 👤 Morio Kobayashi
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-23 13:12
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/12007; G02B6/12004; G02B6/24; G02B6/26; G02B6/28; G02B6/30; G02B6/42; G02B6/4201; G02B6/4204; G02B6/4214; G02B6/4219; G02B6/4228; G02B6/423; G02B6/4246; G02B2006/12083; G02B2006/12109; G02B6/43
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
92 words
A hybrid optical integrated circuit having a high-silica glass optical waveguide formed on a substrate, an optical fiber and an optical device coupled optically to said optical waveguide, and an optical fiber guide and an optical device guide on said substrate for aligning said optical fiber and said optical device at predetermined positions, respectively, relative to said optical waveguide, characterized in that said substrate comprises a silicon substrate; and that said optical waveguide, said optical fiber guide and said optical device guide are formed from the same high-silica glass optical waveguide film.
Claim 2
Dependent Claim
92 words
A hybrid optical integrated circuit having a high-silica glass optical waveguide formed on a substrate, an optical fiber and an optical device coupled optically to said optical waveguide, and an optical fiber guide and an optical device guide on said substrate for aligning said optical fiber and said optical device at predetermined positions, respectively, relative to said optical waveguide, characterized in that said substrate comprises a silicon substrate; and that said optical waveguide, said optical fiber guide and said optical device guide are formed from the same high-silica glass optical waveguide film.
Claim 3
Dependent Claim
171 words
A hybrid optical integrated circuit having a high-silica glass optical waveguide formed on a substrate, an optical fiber and an optical device coupled optically to said optical waveguide, and an optical fiber guide and an optical device guide on said substrate for aligning said optical fiber and said optical device at predetermined positions, respectively, relative to said optical waveguide, characterized in that said substrate comprises a silicon substrate; characterized by comprising islands disposed on said silicon substrate, a first electrical conductor film formed on said silicon substrate, second electrical conductor films formed on the top surfaces of said optical waveguide, said optical fiber guide, said optical device guide and said islands and electrically isolated from each other, and an electrical conductor member for feeding electric power from said first and second electric conductor films to said optical device which needs the power supply; and characterized in that said optical waveguide, said optical fiber guide, said optical device guide and said islands are formed from the same high-silica glass optical waveguide film.
Claim 4
Dependent Claim
171 words
A hybrid optical integrated circuit having a high-silica glass optical waveguide formed on a substrate, an optical fiber and an optical device coupled optically to said optical waveguide, and an optical fiber guide and an optical device guide on said substrate for aligning said optical fiber and said optical device at predetermined positions, respectively, relative to said optical waveguide, characterized in that said substrate comprises a silicon substrate; characterized by comprising islands disposed on said silicon substrate, a first electrical conductor film formed on said silicon substrate, second electrical conductor films formed on the top surfaces of said optical waveguide, said optical fiber guide, said optical device guide and said islands and electrically isolated from each other, and an electrical conductor member for feeding electric power from said first and second electric conductor films to said optical device which needs the power supply; and characterized in that said optical waveguide, said optical fiber guide, said optical device guide and said islands are formed from the same high-silica glass optical waveguide film.
Claim 5
Dependent Claim
36 words
A hybrid optical integrated circuit as claimed in claim 1 or 2, characterized in that the thickness of the core layer of said optical waveguide is substantially equal to the core diameter of said optical fiber.
Claim 6
Dependent Claim
40 words
A hybrid optical integrated circuit as claimed in claim 1 or 2, characterized in that the width and thickness of the core of said optical waveguide are 50+5pm and that input and output fibers are coupled to said optical waveguide.
Claim 7
Dependent Claim
49 words
A hybrid optical integrated circuit as claimed in claim 1 or 2, characterized in that said optical waveguide is of a step index type; the width and thickness of the core layer of said optical waveguide are 40+3pm; and input and output fibers are coupled to said optical waveguide.
Claim 8
Dependent Claim
60 words
A hybrid optical integrated circuit as claimed in claim 1 or 2, characterized in that said optical waveguide is of a graded index type in the direction of thickness thereof; the thickness and width of the core layer of said optical waveguide are 50+5pm and 40+3 P m, respectively; and input and output fibers are coupled to said optical waveguide.
Claim 9
Dependent Claim
67 words
A hybrid optical integrated circuit as claimed in any one of claims 1-6, characterized in that a micro-reflecting mirror with a reflecting surface inclined at about 45° relative to the surface of said substrate is disposed at a position adjacent to the end surface of said optical waveguide so that said optical waveguide and said optical device are optically coupled to each other through said micro-reflecting mirror.
Claim 10
Dependent Claim
48 words
A hybrid optical integrated circuit as claimed in claim 7, characterized in that a marker for determining the position of said optical device and for holding said optical device is disposed on said substrate around said micro-reflecting mirror, so that said optical device is mounted on said marker.
Claim 11
Dependent Claim
138 words
A hybrid optical integrated circuit having a high-silica glass optical waveguide formed on a substrate, an optical fiber and an optical device coupled optically to said optical waveguide, and an optical fiber guide and an optical device guide on said substrate for aligning said optical fiber and said optical device at predetermined positions, respectively, relative to said optical waveguide, characterized in that said substrate comprises a silicon substrate; characterized by comprising a lens disposed at one end surface of said optical waveguide for optically coupling said optical device thereto and a lens guide disposed on said silicon substrate for aligning said lens at a predetermined position relative to said optical waveguide; and characterized in that said optical waveguide, said optical fiber guide, said optical device guide and said lens guide are formed from the same high-silica glass film.
Claim 12
Dependent Claim
138 words
A hybrid optical integrated circuit having a high-silica glass optical waveguide formed on a substrate, an optical fiber and an optical device coupled optically to said optical waveguide, and an optical fiber guide and an optical device guide on said substrate for aligning said optical fiber and said optical device at predetermined positions, respectively, relative to said optical waveguide, characterized in that said substrate comprises a silicon substrate; characterized by comprising a lens disposed at one end surface of said optical waveguide for optically coupling said optical device thereto and a lens guide disposed on said silicon substrate for aligning said lens at a predetermined position relative to said optical waveguide; and characterized in that said optical waveguide, said optical fiber guide, said optical device guide and said lens guide are formed from the same high-silica glass film.
Claim 13
Dependent Claim
121 words
A hybrid optical integrated circuit having a high-silica glass optical waveguide formed on a substrate, an optical fiber and an optical device coupled optically to said optical waveguide, and an optical fiber guide and an optical device guide on said substrate for aligning said optical fiber and said optical device at predetermined positions, respectively, relative to said optical waveguide, characterized in that said substrate comprises a silicon substrate; and that at least a portion of said silicon substrate in the vicinity of said optical fiber guide is etched to a predetermined depth, so that when said optical fiber is inserted into said optical fiber guide, the core of said optical fiber is optically aligned with the core of said optical waveguide.
Claim 14
Dependent Claim
121 words
A hybrid optical integrated circuit having a high-silica glass optical waveguide formed on a substrate, an optical fiber and an optical device coupled optically to said optical waveguide, and an optical fiber guide and an optical device guide on said substrate for aligning said optical fiber and said optical device at predetermined positions, respectively, relative to said optical waveguide, characterized in that said substrate comprises a silicon substrate; and that at least a portion of said silicon substrate in the vicinity of said optical fiber guide is etched to a predetermined depth, so that when said optical fiber is inserted into said optical fiber guide, the core of said optical fiber is optically aligned with the core of said optical waveguide.
Claim 15
Dependent Claim
25 words
A hybrid optical integrated circuit as claimed in any one of claims 1-10, characterized in that the side surfaces of said optical waveguide have cladding.
Claim 16
Dependent Claim
43 words
A hybrid optical integrated circuit as claimed in any one of claims 1-11, characterized in that the junction between said optical waveguide and said optical fiber and the junction between said optical waveguide and said optical device are covered with a refractive-index-matching agent.
Claim 17
Independent Claim
131 words
A method for fabricating a hybrid optical integrated circuit having a high-silica glass optical waveguide formed on a substrate, an optical fiber and an optical device coupled optically to said optical waveguide, and an optical fiber guide and an optical device guide on said substrate for aligning said optical fiber and said optical device at predetermined positions, respectively, relative to said optical waveguide, characterized by using a silicon substrate as said substrate, and comprising the steps of forming a high-silica glass optical waveguide on said silicon substrate, simultaneously forming said optical waveguide, said optical fiber guide and said optical device guide on said silicon substrate by etching said optical waveguide film, and fitting said optical fiber and said optical device into said optical fiber guide and said optical device guide, respectively.
Claim 18
Independent Claim
131 words
A method for fabricating a hybrid optical integrated circuit having a high-silica glass optical waveguide formed on a substrate, an optical fiber and an optical device coupled optically to said optical waveguide, and an optical fiber guide and an optical device guide on said substrate for aligning said optical fiber and said optical device at predetermined positions, respectively, relative to said optical waveguide, characterized by using a silicon substrate as said substrate, and comprising the steps of forming a high-silica glass optical waveguide on said silicon substrate, simultaneously forming said optical waveguide, said optical fiber guide and said optical device guide on said silicon substrate by etching said optical waveguide film, and fitting said optical fiber and said optical device into said optical fiber guide and said optical device guide, respectively.
Claim 19
Independent Claim
168 words
A method for fabricating a hybrid optical integrated circuit having a high-silica glass optical waveguide formed on a substrate, an optical fiber and an optical device coupled optically to said optical waveguide, and an optical fiber guide and an optical device guide on said substrate for aligning said optical fiber and said optical device at predetermined positions, respectively, relative to said optical waveguide, characterized by using a silicon substrate as said substrate, and comprising the steps of forming a high-silica glass optical waveguide on said silicon substrate, simultaneously forming said optical waveguide, said optical fiber guide, said optical device guide and islands, forming electrical conductor films on the top surfaces of said silicon substrate, said optical waveguide, said optical fiber guide, said optical device guide and said islands, fitting said optical fiber and said optical device into said optical fiber guide and said optical device guide, respectively, and forming a path for supplying electrical power to said optical device which requires power supply, through said electrical conductor films.
Claim 20
Independent Claim
168 words
A method for fabricating a hybrid optical integrated circuit having a high-silica glass optical waveguide formed on a substrate, an optical fiber and an optical device coupled optically to said optical waveguide, and an optical fiber guide and an optical device guide on said substrate for aligning said optical fiber and said optical device at predetermined positions, respectively, relative to said optical waveguide, characterized by using a silicon substrate as said substrate, and comprising the steps of forming a high-silica glass optical waveguide on said silicon substrate, simultaneously forming said optical waveguide, said optical fiber guide, said optical device guide and islands, forming electrical conductor films on the top surfaces of said silicon substrate, said optical waveguide, said optical fiber guide, said optical device guide and said islands, fitting said optical fiber and said optical device into said optical fiber guide and said optical device guide, respectively, and forming a path for supplying electrical power to said optical device which requires power supply, through said electrical conductor films.
Claim 21
Independent Claim
117 words
A method for fabricating a hybrid optical integrated circuit in which an optical waveguide is formed on a substrate and an active optical device is coupled to said optical waveguide, characterized by using a silicon substrate as said substrate and comprising the steps of forming an optical waveguide film on said silicon substrate, etching said optical waveguide film to simultaneously form said optical waveguide, alignment guides for positioning an optical fiber and an active optical device relative to said optical waveguide and islands for supplying or receiving power to or from said active optical device, coating electrical conductor films on said islands, and fitting said optical fiber and said active optical device into said alignment guides, respectively.
Claim 22
Independent Claim
117 words
A method for fabricating a hybrid optical integrated circuit in which an optical waveguide is formed on a substrate and an active optical device is coupled to said optical waveguide, characterized by using a silicon substrate as said substrate and comprising the steps of forming an optical waveguide film on said silicon substrate, etching said optical waveguide film to simultaneously form said optical waveguide, alignment guides for positioning an optical fiber and an active optical device relative to said optical waveguide and islands for supplying or receiving power to or from said active optical device, coating electrical conductor films on said islands, and fitting said optical fiber and said active optical device into said alignment guides, respectively.
Claim 23
Dependent Claim
28 words
A method for fabricating a hybrid optical integrated circuit as claimed in claim 13, 14 or 15, characterized in that said optical waveguide is formed by soot process.
Claim 24
Dependent Claim
30 words
A method for fabricating a hybrid optical integrated circuit as claimed in claim 13, 14 or 15, characterized in that said etching step is performed by reactive ion etching process.
Claim 25
Independent Claim
165 words
A method for fabricating a hybrid optical integrated circuit having a high-silica glass optical waveguide formed on a substrate, an optical fiber and an optical device coupled optically to said optical waveguide, and an optical fiber guide and an optical .,device guide on said substrate for aligning said optical fiber and said optical device at predetermined positions, respectively, relative to said optical waveguide, characterized by using a silicon substrate as said substrate, and comprising the steps of forming a high-silica glass optical waveguide on said silicon substrate, etching said high-silica glass optical waveguide by photolithography process until the surface of said silicon substrate is exposed to simultaneously form said optical waveguide and said optical fiber guide, and etching at least a portion of said silicon substrate adjacent to said optical fiber guide to a predetermined depth, so that when said optical fiber is inserted into said optical fiber guide, the core of said optical fiber is optically aligned with the core of said optical waveguide.
Claim 26
Independent Claim
165 words
A method for fabricating a hybrid optical integrated circuit having a high-silica glass optical waveguide formed on a substrate, an optical fiber and an optical device coupled optically to said optical waveguide, and an optical fiber guide and an optical .,device guide on said substrate for aligning said optical fiber and said optical device at predetermined positions, respectively, relative to said optical waveguide, characterized by using a silicon substrate as said substrate, and comprising the steps of forming a high-silica glass optical waveguide on said silicon substrate, etching said high-silica glass optical waveguide by photolithography process until the surface of said silicon substrate is exposed to simultaneously form said optical waveguide and said optical fiber guide, and etching at least a portion of said silicon substrate adjacent to said optical fiber guide to a predetermined depth, so that when said optical fiber is inserted into said optical fiber guide, the core of said optical fiber is optically aligned with the core of said optical waveguide.
Claim 27
Independent Claim
180 words
A method for fabricating a hybrid optical integrated circuit having a high-silica glass optical waveguide formed on a substrate, an optical fiber and first and second optical devices coupled optically to said optical waveguide, and an optical fiber guide and optical device guides on said substrate for aligning said optical fiber and said optical devices at predetermined positions, respectively, relative to said optical waveguide, characterized by using a silicon substrate as said substrate, and comprising the steps of forming a high-silica glass optical waveguide on said silicon substrate, simultaneously forming said optical waveguide, said optical fiber guide, said optical device guides and a marker for determining a position of said first optical device to be disposed on said silicon substrate and for holding said first optical device, fitting said optical fiber and said first optical device into said optical fiber guide and said optical device guide, respectively, mounting said second optical device on said marker, and disposing a reflecting mirror for optically coupling said second optical device to said optical waveguide on said silicon substrate along said optical device guide.
Claim 28
Independent Claim
180 words
A method for fabricating a hybrid optical integrated circuit having a high-silica glass optical waveguide formed on a substrate, an optical fiber and first and second optical devices coupled optically to said optical waveguide, and an optical fiber guide and optical device guides on said substrate for aligning said optical fiber and said optical devices at predetermined positions, respectively, relative to said optical waveguide, characterized by using a silicon substrate as said substrate, and comprising the steps of forming a high-silica glass optical waveguide on said silicon substrate, simultaneously forming said optical waveguide, said optical fiber guide, said optical device guides and a marker for determining a position of said first optical device to be disposed on said silicon substrate and for holding said first optical device, fitting said optical fiber and said first optical device into said optical fiber guide and said optical device guide, respectively, mounting said second optical device on said marker, and disposing a reflecting mirror for optically coupling said second optical device to said optical waveguide on said silicon substrate along said optical device guide.
Claim 29
Independent Claim
92 words
A method for fabricating a hybrid optical integrated circuit as claimed in any one of claims 13-19, characterized by comprising the steps of depositing a quartz glass film on said optical waveguide, said optical fiber guide and said optical device guide formed by said etching step, and over the exposed surface of said silicon substrate, and effecting reactive ion etching process to selectively remove the portions of said quartz glass film deposited on the top surfaces of said optical waveguide, said optical fiber guide, said optical device guide and said silicon substrate.
Claim 30
Independent Claim
97 words
A method for fabricating a hybrid integrated circuit as claimed in any one of claims 14-19, characterized by comprising the steps of depositing a quartz glass film on said optical waveguide, said optical fiber guide, an optical device guide and electrical conductor carrying islands, formed by said etching step, and over the exposed surface of said silicon substrate, and effecting reactive ion etching process to selectively remove the portions of said quartz glass film deposited on the top surfaces of said optical waveguide, said optical fiber guide, said optical device guide, said islands and said silicon substrate.
Claim 31
Independent Claim
151 words
A method for fabricating a hybrid optical integrated circuit having a high-silica glass optical waveguide formed on a substrate, an optical fiber and an optical device coupled optically to said optical waveguide, and an optical fiber guide and an optical device guide on said substrate for aligning said optical fiber and said optical device at predetermined positions, respectively, relative to said optical waveguide, characterized by using a silicon substrate as said substrate, and comprising the steps of forming a high-silica glass optical waveguide on said silicon substrate, simultaneously forming said optical waveguide, said optical fiber guide, said optical device guide and a lens guide for positioning at a predetermined position on said silicon substrate a lens which optically couples said optical device to said optical waveguide, and fitting said optical fiber, said optical device and said lens along said optical fiber guide, said optical device guide and said lens guide, respectively.
Claim 32
Independent Claim
151 words
A method for fabricating a hybrid optical integrated circuit having a high-silica glass optical waveguide formed on a substrate, an optical fiber and an optical device coupled optically to said optical waveguide, and an optical fiber guide and an optical device guide on said substrate for aligning said optical fiber and said optical device at predetermined positions, respectively, relative to said optical waveguide, characterized by using a silicon substrate as said substrate, and comprising the steps of forming a high-silica glass optical waveguide on said silicon substrate, simultaneously forming said optical waveguide, said optical fiber guide, said optical device guide and a lens guide for positioning at a predetermined position on said silicon substrate a lens which optically couples said optical device to said optical waveguide, and fitting said optical fiber, said optical device and said lens along said optical fiber guide, said optical device guide and said lens guide, respectively.
Claim 33
Independent Claim
58 words
A method for fabricating a hybrid optical integrated circuits as claimed in any one of claims 13-22, characterized by, after disposing said optical fiber and said optical device on said silicon substrate, covering the junction between said optical waveguide and said optical fiber and the junction between said optical waveguide and said optical device with a refractive-index-matching agent.
References Cited (Backward Citations)
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