EP0165618A2
Expired / Lapsed
EP
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Glow-discharge decomposition apparatus
Assignee: Kanegafuchi Chemical Industry Co Ltd
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Filing: 1985-06-21
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Granted: —
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Expires: 2005-06-21
Abstract
Abstract A glow-discharge decomposition apparatus comprising ground electrodes, substrates, RF-electrodes, a RF-power supply, a matching circuit and a controlling circuit having at least one electric element; each of the substrates being provided on the ground electrodes which are placed over each of the RF-electrories in parallel to each other; each of the RF-electrodes standing in parallel and being electrically insulated to each other; the matching circuit being connected to accept a RF-power from the RF-power supply; the controlling circuit being connected to accept a RF-power from the matching circuit; and the outputs of the controlling circuit being connected to supply RF-powers to- the RF-electrodes. The films are fabricated on the substrates by supplying RF-powers being independently controlled via the controlling circuit, thereby plasmas are controlled over each of the RF-electrodes. Thus, deposition rates are individually controlled and uniform films are fabricated on each of the substrates.
Inventors
- 👤 Yoshihisa Tawada
- 👤 Takehisa Nakayama
- 👤 Masahiko Tai
- 👤 Nozomu Ikuchi
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-04 02:43
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32018; H01J37/32045; H01J37/32082; H01J37/32174; B; B09; B09C; B09C1/00; B09C1/02; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/505; C23C16/509; H01J37/32183; H01J37/32431; H01J37/32532; H01J37/32559; Y; Y10; Y10S; Y10S422/00; Y10S422/907
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
112 words
In an apparatus for depositing a film on a substrate by glow-discharge decomposition, the improvement comprising ground electrodes, substrates, RF-electrodes, a RF-power supply, a matching circuit and a controlling circuit having at least one electric element; each of said substrates being provided on said ground electrodes which are placed over each of the RF-electrodes in parallel to each other; said RF-electrodes standing in parallel and being electrically insulated to each other; said matching circuit being connected to accept a RF-power from the RF-power supply; said controlling circuit being connected to accept a RF-power from the matching circuit; and the outputs of the controlling circuit being connected to supply RF-powers to the RF-electrodes.
Claim 2
Dependent Claim
112 words
In an apparatus for depositing a film on a substrate by glow-discharge decomposition, the improvement comprising ground electrodes, substrates, RF-electrodes, a RF-power supply, a matching circuit and a controlling circuit having at least one electric element; each of said substrates being provided on said ground electrodes which are placed over each of the RF-electrodes in parallel to each other; said RF-electrodes standing in parallel and being electrically insulated to each other; said matching circuit being connected to accept a RF-power from the RF-power supply; said controlling circuit being connected to accept a RF-power from the matching circuit; and the outputs of the controlling circuit being connected to supply RF-powers to the RF-electrodes.
Claim 3
Dependent Claim
15 words
The apparatus of Claim 1, wherein the controlling circuit has fixed capacitor and variable capacitor.
Claim 4
Dependent Claim
15 words
The apparatus of Claim 1, wherein the controlling circuit has fixed inductor and variable inductor.
Claim 5
Dependent Claim
24 words
The apparatus of Claim 1, wherein 1 to 100 sets, each of said sets having a R F-electrode and a ground electrode, are provided.
Claim 6
Dependent Claim
24 words
The apparatus of Claim 1, wherein the substrates are carried by a substrate carrying means which transfers substrates keeping a distance to the RF-electrodes.
Claim 7
Dependent Claim
15 words
The apparatus of Claim 1, wherein a frequency of RF-power is 1 to 100 MHz.
Claim 8
Dependent Claim
14 words
The apparatus of Claim 1, wherein a heater for heating the substrate is provided.
Claim 9
Dependent Claim
15 words
The apparatus of Claim 2, wherein the capacitors are connected in series to the RF-electrodes.
Claim 10
Dependent Claim
16 words
9, The apparatus of Claim 2, wherein the capacitors are connected in parallel to the ground.
Claim 11
Dependent Claim
15 words
The apparatus of Claim 3, wherein the inductors are connected in series to the RF-electrodes.
Claim 12
Dependent Claim
15 words
The apparatus of Claim 3, wherein the inductors are connected in parallel to the ground.
Claim 13
Dependent Claim
18 words
The apparatus of Claim 5, wherein the substrates move right and left keeping a distance to the RF-electrode.
Claim 14
Dependent Claim
18 words
The apparatus of Claim 5, wherein the substrates move in one direction keeping a distance to the RF-electrodes.
Claim 15
Dependent Claim
61 words
In a process for depositing a film on a substrate by glow-discharge decomposition, in an apparatus comprising ground electrodes, substrates, RF-electrodes, a RF-power supply, a matching circuit and a controlling circuit, the improvement which comprises fabricating films on the substrates by supplying RF - powers being independently controlled via the controlling circuit, thereby plasmas are controlled over each of the RF-electrodes.
Claim 16
Dependent Claim
61 words
In a process for depositing a film on a substrate by glow-discharge decomposition, in an apparatus comprising ground electrodes, substrates, RF-electrodes, a RF-power supply, a matching circuit and a controlling circuit, the improvement which comprises fabricating films on the substrates by supplying RF - powers being independently controlled via the controlling circuit, thereby plasmas are controlled over each of the RF-electrodes.
Claim 17
Dependent Claim
24 words
The process of Claim 14, wherein the control of RF-powers is carried out so as to fabricate uniform films on each of the substrates.
References Cited (Backward Citations)
No citation records indexed.
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