EP0164089A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Integral fluid filter and capillary
Assignee: Leland Stanford Junior University
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Filing: 1985-06-03
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Granted: —
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Expires: 2005-06-03
Abstract
Abstract A comb filter (16) including a first plurality of generally parallel grooves (24) and a capillary (18) including a second groove (30) connected to the first plurality of grooves are integrally formed in a substrate (10) such as by selective etching a surface of a semiconductor substrate. A cover (14) is affixed to the surface (12) and covers the etched grooves (24, 28, 30). An input line (33) is connected to the filter (16) and an output line (35) is connected to the capillary (18). A second comb filter (20) can be included in the output line.
Inventors
- 👤 Phillip W. Barth
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-27 14:47
CPC Classifications
B; B01; B01D; B01D29/00; B01D29/44; A; A61; A61M; A61M5/00; A61M5/14; A61M5/165; F; F16; F16L; F16L55/00; F16L55/02; F16L55/027; F16L55/0279; A61M2205/00; A61M2205/02; A61M2205/0244
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
131 words
A capillary unit comprising a substrate (10) having a major surface 12, a capillary groove (30) on said surface, and a cover 14 affixed to said surface (12) and covering said capillary groove (30) characterized by the provision of a recessed region (22) on said surface (12) and in said substrate (10) and including a plurality of generally parallel filter grooves (24), said capillary groove (30) being connected with said recessed region (22) adjacent to one end of said plurality of filter grooves (24) and having a cross sectional area greater than the cross sectional area of each of said filter grooves (24), a fluid input (32) to said recessed region (22) adjacent the other end of said filter grooves (24), and a fluid output (34) from said capillary groove (30).
Claim 2
Dependent Claim
131 words
A capillary unit comprising a substrate (10) having a major surface 12, a capillary groove (30) on said surface, and a cover 14 affixed to said surface (12) and covering said capillary groove (30) characterized by the provision of a recessed region (22) on said surface (12) and in said substrate (10) and including a plurality of generally parallel filter grooves (24), said capillary groove (30) being connected with said recessed region (22) adjacent to one end of said plurality of filter grooves (24) and having a cross sectional area greater than the cross sectional area of each of said filter grooves (24), a fluid input (32) to said recessed region (22) adjacent the other end of said filter grooves (24), and a fluid output (34) from said capillary groove (30).
Claim 3
Dependent Claim
22 words
The capillary unit of claim 1, wherein said substrate comprises a semiconductor body (10) and said cover comprises a glass plate (14).
Claim 4
Dependent Claim
26 words
The capillary unit of claim 2, wherein said fluid input comprises a hole (32) through said glass plate (14) in communication with said recessed region (22).
Claim 5
Dependent Claim
80 words
The capillary unit of claim 3, wherein said fluid output includes a second recessed region (26) on said surface (12) and in said substrate (10) including a second plurality of generally parallel filter grooves (28), said capillary groove (30) being connected to said second recessed region (26) adjacent to one end of said second filter grooves (28), said capillary groove (30) having a cross sectional area which is greater than the cross sectional area of said second filter grooves (28).
Claim 6
Dependent Claim
28 words
The capillary unit of claim 4, wherein said fluid output includes a second hole (34) through said glass plate (14) in communication with said second recessed region (26).
Claim 7
Dependent Claim
80 words
The capillary unit of claim 1, wherein said fluid output includes a second recessed region (26) on said surface (12) and in said substrate (10) including a second plurality of generally parallel filter grooves (28), said capillary groove (30) being connected to said second recessed region (26) adjacent to one end of said second filter grooves (28), said capillary groove (30) having a cross sectional area which is greater than the cross sectional area of said second filter grooves (28).
References Cited (Backward Citations)
No citation records indexed.
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