EP0163956A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Intergrated radiation sensing array
Assignee: Energy Conversion Devices Inc
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Filing: 1985-05-03
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Granted: —
•
Expires: 2005-05-03
Abstract
Abstract An incident radiation sensing apparatus is provided which comprises an array of radiation sensitive elements, such as photovoltaic cells or photoresistors, formed as an integrated circuit on a substrate. Preferably crossing address lines are used to read the elements, and isolation devices, such as diodes, make the elements individually readable. A conversion means, for converting from a second form of radiant energy to a first form to which the sensing elements of the invention respond, can be placed over those elements, enabling them to sense images in the second form of radiation. The invention can be used as a contact-type document scanner. The invention can also be used to integrate the amount of radiation which falls upon its sensors, greatly increasing its sensitivity.
Inventors
- 👤 Vincent D. Cannella
- 👤 Clive Catchpole
- 👤 John E. Keem
- 👤 Louis D. Swartz
- 👤 Zvi Yaniv
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-04 14:57
CPC Classifications
H; H10; H10F; H10F77/00; H10F77/10; H10F77/16; H10F77/169; H10F77/1692; H04; H04N; H04N1/00; H04N1/024; H04N1/028; H10F39/00; H10F39/10; H10F39/12; H10F39/191; H10F39/198; Y; Y02; Y02E; Y02E10/00; Y02E10/50
Claims Analysis
Total Claims: 84
Claim 1
Independent Claim
156 words
An apparatus (10;12;310;380;390) capable of providing electrical signals representative of an image, said apparatus being of the type having a first plurality of address lines (20,22,24;150;316), a second plurality of address lines (26,28,30;126,314) electrically insulated from and crossing at angle to said first plurality of address lines to form a plurality of crossover points (70-86;152;311), and a photosensor (32-48;120;318;368) arranged to receive said image and comprising a light sensitive element associated with at least some of said crossover points, each said element being adapted to effect a detectable change in electrical characteristic responsive to incident light and being coupled to one address line of one of said plurality of address lines; said apparatus being characterized by an isolation means, comprising diodes (122;320), associated with each said light sensitive element to facilitate selective addressing of said light sensitive elements by the application of read potentials to respective pairs of said first and second pluralities of address lines.
Claim 2
Independent Claim
156 words
An apparatus (10;12;310;380;390) capable of providing electrical signals representative of an image, said apparatus being of the type having a first plurality of address lines (20,22,24;150;316), a second plurality of address lines (26,28,30;126,314) electrically insulated from and crossing at angle to said first plurality of address lines to form a plurality of crossover points (70-86;152;311), and a photosensor (32-48;120;318;368) arranged to receive said image and comprising a light sensitive element associated with at least some of said crossover points, each said element being adapted to effect a detectable change in electrical characteristic responsive to incident light and being coupled to one address line of one of said plurality of address lines; said apparatus being characterized by an isolation means, comprising diodes (122;320), associated with each said light sensitive element to facilitate selective addressing of said light sensitive elements by the application of read potentials to respective pairs of said first and second pluralities of address lines.
Claim 3
Dependent Claim
20 words
An apparatus (10;12) as defined in Claim 1 further characterized by said light sensitive elements (32-48) comprising photovoltaic cells (120).
Claim 4
Dependent Claim
19 words
An apparatus (Figure 22) as defined in Claim 1 further characterized by said light sensitive elements comprising photoresistors (368).
Claim 5
Dependent Claim
23 words
An apparatus (10;12;310;380;390) as defined in Claim 1 further characterized by said light sensitive elements (32-48;120;318;368) being formed from deposited semiconductor material (128,130;132;346,348,350;366).
Claim 6
Dependent Claim
21 words
An apparatus (10;12;310;380;390) as defined in Claim 4 further characterized by said deposited semiconductor material (128,130;132;346,348,350;366) being an amorphous semiconductor alloy.
Claim 7
Dependent Claim
25 words
An apparatus (10;12;310;380;390) as defined in Claim 5 further characterized by said amorphous semiconductor alloy (128,130;132;346,348,350;366) being an alloy of silicon including hydrogen or fluorine.
Claim 8
Dependent Claim
47 words
An apparatus (10;12) as defined in Claim 5 further characterized by said light sensitive elements (32-48) comprising photovoltaic cells (120) including a first doped region (128), a substantially intrinsic region (130), and a second doped region (132) of opposite conductivity with respect to said first doped region.
Claim 9
Dependent Claim
21 words
An apparatus (10;12;310;380;390) as defined in Claim 1 further characterized by said diodes (122;320) being formed from deposited semiconductor material (136,138,140;346,348,350;366).
Claim 10
Dependent Claim
21 words
An apparatus (10;12;310;380;390) as defined in Claim 8 further characterized by said deposited semiconductor material (136,138,140;346,348,350;366) is an amorphous semiconductor alloy.
Claim 11
Dependent Claim
25 words
An apparatus (10;12;310;380;390) as defined in Claim 9 further characterized by said amorphous semiconductor alloy (136,138,140;346,348,350;366) being an alloy of silicon including hydrogen and fluorine.
Claim 12
Dependent Claim
41 words
An apparatus (10;12;310;380;390) as defined in Claim 9 further characterized by said diodes (122;320) including a first doped region (136;346), a substantially intrinsic region (138;348), and a second doped regions (140;350) of opposite conductivity with respect to said first doped region.
Claim 13
Independent Claim
201 words
An apparatus (10;12;310;380) capable of providing electrical signals representative of an image having light (108;388) and dark (106;386) portions carried by an opaque image-bearing member (14;384), said apparatus characterized by: a transparent substrate (18;341); a first set of address lines (20,22,24;150;316); a second set of address lines (26,28,30;126,314) spaced from and crossing at an angle to said first set of address lines to form a plurality of crossover points (70-86;152;311); a plurality of light sensitive elements (32-48;120;190;318;368;) formed and distributed on said substrate and in spaced apart relation, each light sensitive element being associated with a given one of said crossover points and arranged to effect a detectable change in electrical characteristic in response to receipt of incident light; an isolation device (50-66;122;192;320) associated with each said light sensitive element to facilitate the selective addressing and detection of the electrical conductivity of each said light sensitive element by the application of read potentials to respective pairs of said first and second sets of address lines; and transparent cover means (68;382) overlying said light sensitive elements and including a substantially planar surface opposite said light sensitive elements for receiving said image-bearing member thereon in close juxtaposed relation to said light sensitive elements.
Claim 14
Independent Claim
201 words
An apparatus (10;12;310;380) capable of providing electrical signals representative of an image having light (108;388) and dark (106;386) portions carried by an opaque image-bearing member (14;384), said apparatus characterized by: a transparent substrate (18;341); a first set of address lines (20,22,24;150;316); a second set of address lines (26,28,30;126,314) spaced from and crossing at an angle to said first set of address lines to form a plurality of crossover points (70-86;152;311); a plurality of light sensitive elements (32-48;120;190;318;368;) formed and distributed on said substrate and in spaced apart relation, each light sensitive element being associated with a given one of said crossover points and arranged to effect a detectable change in electrical characteristic in response to receipt of incident light; an isolation device (50-66;122;192;320) associated with each said light sensitive element to facilitate the selective addressing and detection of the electrical conductivity of each said light sensitive element by the application of read potentials to respective pairs of said first and second sets of address lines; and transparent cover means (68;382) overlying said light sensitive elements and including a substantially planar surface opposite said light sensitive elements for receiving said image-bearing member thereon in close juxtaposed relation to said light sensitive elements.
Claim 15
Dependent Claim
20 words
An apparatus (10;12) as defined in Claim 12 further characterized by said light sensitive elements (32-48) comprising photovoltaic cells (120).
Claim 16
Dependent Claim
21 words
An apparatus (10;12; Figure 22) as defined in Claim 12 further characterized by said light sensitive elements (32-48;368) comprising photoresistors (190;368).
Claim 17
Dependent Claim
23 words
An apparatus (10;12;310;380) as defined in Claim 12 further characterized by said light sensitive elements (32-48;120;190;318;368) being formed from deposited semiconductor material (128,130,132;200;346,348,350;366).
Claim 18
Dependent Claim
21 words
An apparatus (10;12;310;380) as defined in Claim 15 further characterized by said deposited semiconductor material (128,130,132;200;346,348,350;366) being an amorphous semiconductor alloy.
Claim 19
Dependent Claim
18 words
An apparatus (10;12;310;380) as defined in Claim 12 further characterized by said isolation devices (50-66;122;320) comprising diodes (122;320).
Claim 20
Dependent Claim
20 words
An apparatus (10;12) as defined in Claim 12 further characterized by said isolation devices (50-66) comprising field effect transistors 192.
Claim 21
Dependent Claim
22 words
An apparatus (10;12;310;380) as defined in Claim 12 further characterized by said isolation devices (50-66;122;192;320) being formed from deposited semiconductor material (136,138,140;200;346,348,350;366).
Claim 22
Dependent Claim
21 words
An apparatus (10;12;310;380) as defined in Claim 19 further characterized by said deposited semiconductor material (136,138,140;200;346,348,350;366) being an amorphous semiconductor alloy.
Claim 23
Dependent Claim
28 words
An apparatus (10;12;310;380) as defined in Claim 12 further characterized by said cover means (68;382) being arranged for proximity focusing said image onto said light sensitive elements (32-48;120;190;318;368).
Claim 24
Dependent Claim
35 words
An apparatus (10;12;310;380) as defined in Claim 12 further characterized by including a light source (16) arranged for projecting light onto said image-bearing member (14;384) on the side thereof immediately adjacent said cover member (68;382).
Claim 25
Dependent Claim
28 words
An apparatus (10;12;310;380) as defined in Claim 22 further characterized by said light source (16) being arranged for projecting light of different colors onto said image-bearing member (14;384).
Claim 26
Dependent Claim
22 words
An apparatus (10;12;310;380) as defined in Claim 23 further characterized by said light source (16) including red, blue, and green light sources.
Claim 27
Dependent Claim
53 words
An apparatus (10;12;310;380) as defined in Claim 12 further characterized by said light sensitive element (32-48;120;190;318;368) having light shields (124;198;344) formed between them and the transparent substrate (18;341) so that light shining through the substrate to illuminate said image tends not to hit said light sensitive elements until it reflects off said image.
Claim 28
Independent Claim
178 words
A method of generating electrical signals representative of an image formed by high (106;386) and low (108;388) optical density portions on one said of an image-bearing member (14;384), said method being characterized by including the steps of: providing an array of light sensitive elements (32-48;120;190:318;368) capable of effecting a detectable change in an electrical characteristic in response to the receipt of light thereon in spaced apart substantially coplanar relation; placing said image-bearing member over said array of elements with said one side of said member adjacent said array of elements; projecting light onto said one side of said member so that the image portions of low optical density reflect light onto said elements adjacent thereto and the image portions of high optical density reflect substantially less light onto said elements adjacent thereto than reflected by said portions of low optical density; and selectively applying read potentials to said light sensitive elements for detecting the electrical characteristic of said elements and deriving an electrical signal for each element representative of the optical density of the image portion adjacent thereto.
Claim 29
Independent Claim
178 words
A method of generating electrical signals representative of an image formed by high (106;386) and low (108;388) optical density portions on one said of an image-bearing member (14;384), said method being characterized by including the steps of: providing an array of light sensitive elements (32-48;120;190:318;368) capable of effecting a detectable change in an electrical characteristic in response to the receipt of light thereon in spaced apart substantially coplanar relation; placing said image-bearing member over said array of elements with said one side of said member adjacent said array of elements; projecting light onto said one side of said member so that the image portions of low optical density reflect light onto said elements adjacent thereto and the image portions of high optical density reflect substantially less light onto said elements adjacent thereto than reflected by said portions of low optical density; and selectively applying read potentials to said light sensitive elements for detecting the electrical characteristic of said elements and deriving an electrical signal for each element representative of the optical density of the image portion adjacent thereto.
Claim 30
Dependent Claim
58 words
A method as defined in Claim 26 further characterized by said one side of said image-bearing member (14;384) being placed in closely spaced juxtaposed relation to said array of light sensitive elements (32-48;120;190;318;368) and wherein said step of projecting light onto said one side of said image-bearing member includes projecting light through spaces between said light sensitive elements.
Claim 31
Dependent Claim
24 words
A method as defined in Claim 26 further characterized by the additional step of sequentially projecting different colored light onto said image-bearing member (14;384).
Claim 32
Independent Claim
133 words
An apparatus (10;12;310;380) for providing electrical signals representative of an image projected thereon, said apparatus being of the type having an array of spaced apart light sensitive elements (32-48;120;190;318;368) formed from deposited semiconductor material (128,130,132;200;346,348,350;366) and arranged for receiving said image, said elements being capable of effecting a detectable electrical characteristic responsive to the intensity of light received ° thereon from said image; and isolation means (50-66;122;192;320) for enabling the selective detection of said electrical characteristic of each said element, said apparatus characterized by each of said light sensitive elements being formed from at least one layer of said semiconductor material (128,130;132;200;346,348,350;366) deposited over a first conductive layer (124;198;344) and covered by a second conductive layer (134;208;352) deposited over it, at least one of said first and second conductive layers being light transparent.
Claim 33
Independent Claim
133 words
An apparatus (10;12;310;380) for providing electrical signals representative of an image projected thereon, said apparatus being of the type having an array of spaced apart light sensitive elements (32-48;120;190;318;368) formed from deposited semiconductor material (128,130,132;200;346,348,350;366) and arranged for receiving said image, said elements being capable of effecting a detectable electrical characteristic responsive to the intensity of light received ° thereon from said image; and isolation means (50-66;122;192;320) for enabling the selective detection of said electrical characteristic of each said element, said apparatus characterized by each of said light sensitive elements being formed from at least one layer of said semiconductor material (128,130;132;200;346,348,350;366) deposited over a first conductive layer (124;198;344) and covered by a second conductive layer (134;208;352) deposited over it, at least one of said first and second conductive layers being light transparent.
Claim 34
Dependent Claim
34 words
An apparatus (10;12;310;380) as defined in Claim 29, further characterized by said isolation means (50-66;122;192;320) being formed from the same at least one deposited layer of semiconductor material (128,130,132;200;346,348,350;366) as said light sensitive elements.
Claim 35
Independent Claim
91 words
An apparatus (10;12) for providing electrical signals representative of an image projected thereon, said apparatus being of the type having an array of spaced apart light sensitive elements (32-48) formed from deposited semiconductor material (128,130,132) and arranged for receiving said image, said elements being capable of effecting a detectable electrical characteristic responsive to the intensity of light received thereon from said image, and isolation means (122) for enabling the selective detection of said electrical characteristic of each said element; said apparatus characterized by said light sensitive elements comprising photovoltaic cells (120).
Claim 36
Independent Claim
91 words
An apparatus (10;12) for providing electrical signals representative of an image projected thereon, said apparatus being of the type having an array of spaced apart light sensitive elements (32-48) formed from deposited semiconductor material (128,130,132) and arranged for receiving said image, said elements being capable of effecting a detectable electrical characteristic responsive to the intensity of light received thereon from said image, and isolation means (122) for enabling the selective detection of said electrical characteristic of each said element; said apparatus characterized by said light sensitive elements comprising photovoltaic cells (120).
Claim 37
Independent Claim
130 words
An apparatus (Figures 8, 9, and 23) for providing electrical signals representative of an image formed by projecting thereon a spatially varying intensity distribution of a first form of energy having incident energy in a first range, said apparatus characterized by an array of energy sensitive elements (120;190;318) , said elements being responsive to the impingement of a second form of energy in a second energy range different from said first energy range for effecting a detectable electrical characteristic; means (121;191;370) overlying said energy sensitive elements, said means responsive to said spatially varying distribution of said first form of energy, for converting said first form of energy to said second form of energy; and means (122;192;320) for enabling the selective detection of said electrical characteristic of said energy sensitive elements.
Claim 38
Independent Claim
130 words
An apparatus (Figures 8, 9, and 23) for providing electrical signals representative of an image formed by projecting thereon a spatially varying intensity distribution of a first form of energy having incident energy in a first range, said apparatus characterized by an array of energy sensitive elements (120;190;318) , said elements being responsive to the impingement of a second form of energy in a second energy range different from said first energy range for effecting a detectable electrical characteristic; means (121;191;370) overlying said energy sensitive elements, said means responsive to said spatially varying distribution of said first form of energy, for converting said first form of energy to said second form of energy; and means (122;192;320) for enabling the selective detection of said electrical characteristic of said energy sensitive elements.
Claim 39
Dependent Claim
25 words
An apparatus (Figures 8, 9 and 23) as defined in Claim 32 further characterized by each said energy sensitive element (120;190;318) including deposited semiconductor material.
Claim 40
Dependent Claim
39 words
An apparatus (Figures 8, 9, and 23) as defined in Claim 32 further characterized by said means for converting (121;191;370) being arranged to convert electromagnetic energy in the first energy range to electromagnetic energy in the second energy range.
Claim 41
Dependent Claim
34 words
An apparatus (Figures 8, 9 and 23) as defined in Claim 34 further characterized by said electromagnetic energy in the first energy range corresponding to X-rays having photon energies in the first energy range.
Claim 42
Dependent Claim
35 words
An apparatus (Figures 8, 9, and 23) as defined in Claim 34 further characterized by said electromagnetic energy in the second energy range corresponding to visible light having photon energies in the second energy range.
Claim 43
Dependent Claim
46 words
An apparatus (Figures 8, 9, and 23) as defined in Claim 32 further characterized by said converting means (121;191;370) being arranged to convert an accelerated beam of particles with energies in the first energy range into electromagnetic energy with photon energies in the second energy range.
Claim 44
Dependent Claim
22 words
An apparatus (Figures 8, 9 and 23) as defined in Claim 37 further characterized by said electromagnetic energy corresponding to visible light.
Claim 45
Dependent Claim
24 words
An apparatus (Figures 9 and 23) as defined in Claim 32 further characterized by said electrical characteristic being the electrical conductivity of said elements.
Claim 46
Dependent Claim
20 words
An apparatus (Figure 8) as defined in Claim 32 further characterized by said energy sensitive elements (120) comprising photovoltaic cells.
Claim 47
Dependent Claim
46 words
An apparatus (Figures 8, 9, and 23) as defined in Claim 32 further characterized by said enabling means (122;192;320) including a plurality of electrical conductors (20,22,24;150;316;26,28,30;126,314), and at least one isolation means (122;192;320) between a given energy sensitive element and at least one of said conductors.
Claim 48
Dependent Claim
29 words
An apparatus (Figures 8 and 23) as defined in Claim 41 further characterized by said isolation means (122;320) including a diode (122;320) associated with each said energy sensitive element.
Claim 49
Dependent Claim
25 words
An apparatus (Figures 8 and 23) as defined in Claim 42 further characterized by each said diode (122;320) being formed of deposited semiconductor material (136,138,140;346,348,350).
Claim 50
Dependent Claim
32 words
An apparatus (Figure 9) as defined in Claim 41 further characterized by said isolation means (192) incuding a thin film field effective transistor associated with each of said energy sensitive elements (190).
Claim 51
Dependent Claim
23 words
An apparatus (Figures 8 and 9) as defined in Claim 34 further characterized by said converting means comprising layer of phoshorescent material (121b,191b).
Claim 52
Dependent Claim
42 words
An apparatus (Figures 8 and 9) as defined in Claim 45 further characterized by said converting means including: a layer of transparent insulating material (121a,191a); and a deposited metal layer (121c, 191c) with said layer (121b, 191b) of photphorescent material positioned therebetween.
Claim 53
Dependent Claim
22 words
An apparatus (Figure 23) as defined in Claim 34 further characterized by said converting means (370) comprising a layer of fluorescent material.
Claim 54
Dependent Claim
210 words
Incident radiation sensing apparatus (310;380;390) of the type having a substrate (341), an array of photosensitive elements (312) formed as an integrated circuit on said substrate; said apparatus being characterized: a) by each of said photosensitive elements having: i) capacitor means (322) for storing charge; ii) conductive means (314,316,326,332,334,336) for charging said capacitor means to a preselected magnitude; iii) blocking means (320) for inhibiting the discharge of charge stored on said capacitor means; and iv) photoresponsive means (318;368) formed from deposited semiconductor material (346,348,350;366) for generating charge carriers at a rate responsive to the intensity of radiation incident upon said photoresponsive means, said photoresponsive means being connected to said capacitor means so that said charge carriers reduce the magnitude of the charge on said capacitor means as a function of the magnitude of, and the time incidence of, said incident radiation; and b) by said apparatus further including means (314,316,326,332,334,336,338) for sensing the magnitude of charge remaining on a given said capacitor means a preselected period of time after its said charging by said conductive means, thereby to produce a signal corresponding to the time integral of the magnitude of the incident radiation impinging on said photoresponsive means connected to said given capacitor means during said preselected period of time.
Claim 55
Dependent Claim
210 words
Incident radiation sensing apparatus (310;380;390) of the type having a substrate (341), an array of photosensitive elements (312) formed as an integrated circuit on said substrate; said apparatus being characterized: a) by each of said photosensitive elements having: i) capacitor means (322) for storing charge; ii) conductive means (314,316,326,332,334,336) for charging said capacitor means to a preselected magnitude; iii) blocking means (320) for inhibiting the discharge of charge stored on said capacitor means; and iv) photoresponsive means (318;368) formed from deposited semiconductor material (346,348,350;366) for generating charge carriers at a rate responsive to the intensity of radiation incident upon said photoresponsive means, said photoresponsive means being connected to said capacitor means so that said charge carriers reduce the magnitude of the charge on said capacitor means as a function of the magnitude of, and the time incidence of, said incident radiation; and b) by said apparatus further including means (314,316,326,332,334,336,338) for sensing the magnitude of charge remaining on a given said capacitor means a preselected period of time after its said charging by said conductive means, thereby to produce a signal corresponding to the time integral of the magnitude of the incident radiation impinging on said photoresponsive means connected to said given capacitor means during said preselected period of time.
Claim 56
Dependent Claim
42 words
Incident radiation sensing apparatus (310;380;390) as defined in Claim 48 further characterized by: a plurality of intersecting lines (314,316) being formed on said substrate; and said conductive means (314,316,326,332,334,336) associated with each photosensitive element (312) including a pair of such intersecting lines.
Claim 57
Dependent Claim
36 words
Incident radiation sensing apparatus (310;380;390) as defined in Claim 49, further characterized by said means (314,316,326,332,334,336,338) for sensing the magnitude of charge also including said pair of intersecting lines (314,316) associated with each photosensitive element (312).
Claim 58
Dependent Claim
74 words
Incident radiation sensing apparatus (310;380;390) as defined in Claim 49, further characterized by: said plurality of intersecting lines (314,316) including a plurality of generally parallel x lines (314) and a plurality of generally parallel y lines (316) crossing said x lines; said photosensitive elements (312) being formed at the crossings of said x and y lines; and said conductive means (314,316,326,332,334,336) associated with each photosensitive element including one x line and one y line.
Claim 59
Dependent Claim
48 words
Incident radiation sensing apparatus (310;380;390) as defined in Claim 48, further characterized by said blocking means (320) being connected between said capacitor means (322) and at least a part of said conductive means (316) so as to inhibit the discharge of said capacitor means through said conductive means.
Claim 60
Dependent Claim
23 words
Incident radiation sensing apparatus (310;380;390) as defined in Claim 48, further characterized by said blocking means (320) including a semiconductor blocking junction (346-348,348-350,366-344).
Claim 61
Dependent Claim
66 words
Incident radiation sensing apparatus (310;380;390) as defined in Claim 48, further characterized by: said conductive means - (314,316,326,332,334,336) for charging including means (314,316,326,332,334,336) for recharging said capacitor means (322) after the expiration of said preselected period of time; and said means (314,316,326,332,334,336,338) for sensing the magnitude of charge including means (336,338) for sensing the amount of current which flows during said recharging of said capacitor means.
Claim 62
Dependent Claim
48 words
Incident radiation sensing apparatus (310;380;390) as defined in Claim 48, further characterized by: said capacitor means (322) being a capacitor formed of two spaced apart electrodes (344,352); and said deposited semiconductor material (346,348,350;366) of said photoresponsive means (318,368) being located between, and is electrically connected to, said electrodes.
Claim 63
Dependent Claim
57 words
Incident radiation sensing apparatus (310;380;390) as defined in Claim 56, further characterized by: said electrodes (344;352) of said capacitor (322) being vertically arrayed with respect to each other and said substrate (341); and said semiconductor material (346,348,350;366) of said photoresponsive means (318;368) being deposited between said electrodes (344;352) so as to act as a dielectric between them.
Claim 64
Dependent Claim
27 words
Incident radiation sensing apparatus (310;380;390) as defined in Claim 48, further characterized by said semiconductor material (346,348,350;366) of said photoresponsive means (318;368) including an amorphous semiconductor alloy.
Claim 65
Dependent Claim
27 words
Incident radiation sensing apparatus (310;380;390) as defined in Claim 57, further characterized by said amorphous semiconductor alloy (346,348,350;366) being an alloy of silicon including hydrogen or fluorine.
Claim 66
Dependent Claim
44 words
Incident radiation sensing apparatus (310;380;390) as defined in Claim 55, further characterized by said deposited semiconductor material (346,348,350;366) forming at least one semiconductor blocking junction (346-348;348-350;344-366) which inhibits the discharge of said capacitor 322 in the absence of radiation incident upon said semiconductor material.
Claim 67
Dependent Claim
54 words
Incident radiation sensing apparatus (310;380;390) as defined in Claim 59, further characterized by said deposited semiconductor material (346;348;350) being formed in at least two layers (346;348;350) having their Fermi levels positioned differently relative to the energy levels of their conduction and valance bands, so as to form said blocking junction (346-348;348-350) in said layers.
Claim 68
Dependent Claim
82 words
Incident radiation sensing apparatus (310;380;390) as defined in Claim 60, further characterized by said deposited semiconductor material (346;348;350) including three layers (346;348;350), including a bottom layer (346) closest to said substrate formed of a first conductivity type, an intermediate layer (348) formed of a substantially intrinsic type, and a top layer (350) formed of a second conductivity type, said first and second conductivity types being selected so the semiconductor junctions between said layers form said at least one semiconductor blocking junction (346-348;348-350).
Claim 69
Dependent Claim
45 words
Incident radiation sensing apparatus (Figure 21) as defined in Claim 59, further characterized by at least one of said electrodes (344) of said capacitor (322) being formed of metal which forms said blocking junction (344-366) with said semiconductor material (366) of said photoresponsive means (368).
Claim 70
Dependent Claim
27 words
Incident radiation sensing apparatus (Figure 22) as defined in Claim 56, further characterized by said deposited semiconductor material (348) of said photoresponsive means (368) forming a photoresistor.
Claim 71
Dependent Claim
40 words
Incident radiation sensing apparatus (Figure 22) as defined in Claim 63, further characterized by said deposited semiconductor material (348) between said electrodes (344;352) of said capacitnr (322) being formed of a single layer of substantially intrinsic amorphous semiconductor alloy (348).
Claim 72
Dependent Claim
100 words
Incident radiation sensing apparatus (Figure 24) as defined in Claim 48, further characterized by being for use in forming an image of a document (384) placed in close proximity to said array of photosensitive elements (312), said sensing apparatus including a transparent spacing means (382) for positioning said document, when it is placed against said spacing means, in spaced-apart proximity to said array of photosensitive elements, sufficiently close to said array so that individual photosensitive elements of said array sense the amount of light leaving the surface of the portions (386;388) of the document placed in close proximity to them.
Claim 73
Dependent Claim
47 words
Incident radiation sensing apparatus (Figure 24) as defined in Claim 65, further characterized by said integrated circuit (380) in which said array is formed being a large area integrated circuit with said array of photosensitive elements (312) being at least 11 inches long and 8-1/2 inches wide.
Claim 74
Dependent Claim
79 words
Incident radiation sensing apparatus (Figure 24) as defined in Claim 65, further characterized by said integrated circuit (380) being formed so that light can pass through said integrated circuit between said photosensitive elements (312) to illuminate a portion of a document (384) placed in close proximity to said photosensitive elements without directly illuminating said photosensitive elements, whereby individual photosensitive elements sense the amount of light reflected from the portion (386;388) of the document placed in close proximity to them.
Claim 75
Dependent Claim
101 words
Incident radiation sensing apparatus (Figure 23) as defined in Claim 48, further characterized by being for use in sensing an X-ray image, said apparatus further comprising converting means (370) overlying said photosensitive elements (312) for producing radiation in response to the impingement of X-rays upon said converting means, said produced radiation having a frequency which causes the generation of charge carriers in said photoresponsive means (318) of said photosensitive elements, whereby a given photoresponsive means of a given photosensitive element generates charge carriers in correspondence to the amount of X-ray radiation incident upon a portion of said converting means overlying it.
Claim 76
Dependent Claim
35 words
Incident radiation sensing apparatus (Figure 23) as defined in Claim 68, further characterized by said converting means (370) comprising a layer of fluorescent material placed in close proximity to said array of photosensitive elements (312).
Claim 77
Dependent Claim
33 words
Incident radiation sensing apparatus (Figure 25) as defined in Claim 48, further characterized by said apparatus including a focusing means (392) for focusing a light image upon said array of photosensitive elements (312).
Claim 78
Independent Claim
140 words
A method of sensing a spacial distribution of radiation characterized by: using a plurality of conductive address lines (314,316) to place a charge across each of a plurality of capacitor means (322); using a blocking means (320) to inhibit said charge from flowing off said capacitor means to through said conductive address lines; using a separate photoresponsive means (318;368) formed of deposited semiconductor material (346,348,350;366) which is placed electrically in parallel with each of said capacitor means to discharge the capacitor means at a rate corresponding to the intensity of incident radiation upon said photoresponsive means; and measuring the charge remaining on each of said plurality of capacitor means a given time after its charging to obtain a measurement of the time integral of the intensity of radiation which has been incident on its associated photoresponsive means since that charging.
Claim 79
Independent Claim
140 words
A method of sensing a spacial distribution of radiation characterized by: using a plurality of conductive address lines (314,316) to place a charge across each of a plurality of capacitor means (322); using a blocking means (320) to inhibit said charge from flowing off said capacitor means to through said conductive address lines; using a separate photoresponsive means (318;368) formed of deposited semiconductor material (346,348,350;366) which is placed electrically in parallel with each of said capacitor means to discharge the capacitor means at a rate corresponding to the intensity of incident radiation upon said photoresponsive means; and measuring the charge remaining on each of said plurality of capacitor means a given time after its charging to obtain a measurement of the time integral of the intensity of radiation which has been incident on its associated photoresponsive means since that charging.
Claim 80
Dependent Claim
59 words
A method as in Claim 71, further characterized by said using of a separate photoresponsive means (318) including using a photodiode (318) formed of deposited semiconductor material (346,348,350) as said photoresponsive means, and having said photodiode connected in parallel with said capacitor means (322) so that it is reverse biased by said charge placed across its associated capacitor means.
Claim 81
Dependent Claim
63 words
A method as in Claim 71, further characterized by said measuring of charge remaining on each of said plurality of capacitor means (322) including recharging each of said capacitor means using said address lines (314,316) and measuring the current flow through an address line during the recharging of each capacitor means to determine the amount by which that capacitor means had been discharged.
Claim 82
Dependent Claim
70 words
A method as in Claim 73, further characterized by; said address lines (314,316) forming an x - y array of address lines, and; both said placing of a charge across each of a plurality of capacitor means (322) and said recharging each of said capacitor means including using said x - y array of address lines to charge and recharge individual capacitor means by use of x - y addressing.
Claim 83
Independent Claim
154 words
An apparatus (10;12;310;380;390) capable of providing electrical signals representative of an image, said apparatus being of the type having a first plurality of address lines (20,22,24;150;316), a second plurality of address lines (26,28,30;126,314) electrically insulated from and crossing at angle to said first plurality of address lines to form a plurality of crossover points (70-86;152;311), and a photosensor (32-48;120;318;368) arranged to receive said image and comprising a light sensitive element associated with at least some of said crossover points, each said element being adapted to effect a detectable change in electrical conducitivity responsive to incident light and being coupled to one address line of one of said plurality of address lines; said apparatus being characterized by an isolation means (122;192;320) associated with each said light sensitive element to facilitate selective addressing of said light sensitive elements by the application of read potentials to respective pairs of said first and second pluralities of address lines.
Claim 84
Independent Claim
154 words
An apparatus (10;12;310;380;390) capable of providing electrical signals representative of an image, said apparatus being of the type having a first plurality of address lines (20,22,24;150;316), a second plurality of address lines (26,28,30;126,314) electrically insulated from and crossing at angle to said first plurality of address lines to form a plurality of crossover points (70-86;152;311), and a photosensor (32-48;120;318;368) arranged to receive said image and comprising a light sensitive element associated with at least some of said crossover points, each said element being adapted to effect a detectable change in electrical conducitivity responsive to incident light and being coupled to one address line of one of said plurality of address lines; said apparatus being characterized by an isolation means (122;192;320) associated with each said light sensitive element to facilitate selective addressing of said light sensitive elements by the application of read potentials to respective pairs of said first and second pluralities of address lines.
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