§
Luxuse
Patent Intelligence
Sign In
← Back to Patent Explorer
EP0163745A1 Expired / Lapsed EP ⏱️ 0.0 years remaining

Quadrupole particle accelerator

Assignee: Hitachi Ltd
•
Filing: 1984-11-22
•
Granted: —
•
Expires: 2004-11-22
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract A quadrupole particle accelerator has quadrupole electrodes (22), (24), (26) and (28) having corrugated surfaces which oppose each other, and an external resonant circuit. The external resonant circuit is constituted by capacitors which are formed by the opposing electrodes (22), (26), and (24), (28), a variable capacitor (36) provided in parallel to the capacitors, and a coil (34). The resonant frequency may be varied. The quadrupole electrodes (22), (24), (26) and (28) may be supplied with a direct current and an alternating current which are superposed. The thus arranged accelerator may be employed in an ion implantation apparatus. Thus, it becomes possible to implant a large-current ion beam on the order of several hundred keV to several MeV.

Inventors

  • 👤 Noriyuki Sakudo
  • 👤 Katsumi Tokiguchi
  • 👤 Hidemi Koike
  • 👤 Osami Okada
  • 👤 Norio Saitou
  • 👤 Susumu Ozasa

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-03 18:20
CPC Classifications
H; H05; H05H; H05H7/00; H05H7/02; H01; H01J; H01J37/00; H01J37/30; H01J37/3002; H01J37/3007; H01J37/317; H01J37/3171; H05H7/14; H05H7/18; H05H9/00

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 36 words
In a charged particle accelerator of the construction in which the opposing surfaces of quadrupole electrodes are undulated, the charged particle accelerator using quadrupole electrodes wherein a radio-frequency resonance circuit is provided outside the accelerating tube.
Claim 2
Dependent Claim 36 words
In a charged particle accelerator of the construction in which the opposing surfaces of quadrupole electrodes are undulated, the charged particle accelerator using quadrupole electrodes wherein a radio-frequency resonance circuit is provided outside the accelerating tube.
Claim 3
Dependent Claim 39 words
A charged particle accelerator using quadrupole electrodes according to claim 1, wherein the resonance circuits are provided in a plurality of number, and a plurality of dissimilar radio-frequency electric fields are applied to the electrodes in a superposed manner.
Claim 4
Dependent Claim 19 words
A charged particle accelerator using quadrupole electrodes according to claim 1 or 2, wherein the resonance frequency is variable.
Claim 5
Dependent Claim 29 words
A charged particle accelerator using quadrupole electrodes according to claim 1, wherein a direct current and an alternating current are applied in a superposed manner to the quadrupole electrodes.

References Cited (Backward Citations)

No citation records indexed.

USPTO Annuity & Maintenance Windows

Maintenance schedule is calculated for granted US utility patents.

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag