EP0155145A2
Expired / Lapsed
EP
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Piezoelectric resonating device
Assignee: Toshiba Corp
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Filing: 1985-03-07
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Granted: —
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Expires: 2005-03-07
Abstract
Abstract A piezoelectric resonating device described comprises a substrate (11), a non-piezoelectric film layer (12) formed on the substrate (11) to create an air-gap (13) between a portion of the non-piezoelectric film (12) and the substrate (11). An electrode (14) is being formed on the non-piezoelectric film and a piezoelectric film layer (15, 25, 44, 54) is formed on the non-piezoelectric film (12) and the electrode (14). Another one of electrodes (16) is formed on the piezoelectric film layer (15).
Inventors
- 👤 Hitoshi C/O Patent Division Toshiba Corp. Suzuki
- 👤 Hiroaki C/O Patent Division Toshiba Corp. Sato
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-27 16:04
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/15; H03H9/17; H03H9/171; H03H9/172; H03H9/173; H03H3/00; H03H3/007; H03H3/02; H03H3/04; H03H9/02; H03H9/02007; H03H9/02086; H03H9/02102; H03H9/02133; H03H9/46; H03H9/54; H03H9/56; H03H9/564; H10; H10N; H10N30/00; H10N30/01; H10N30/07; H10N30/074; H10N30/076; H10N30/08; H10N30/081; H10N30/082
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
89 words
A piezoelectric resonating device comprising a substrate (11, 21, 41, 51), a non-piezoelectric film layer (12, 22, 28, 42, 54) on the substrate (11, 21, 41, 51), and shaped to form a cavity; a piezoelectric film layer (15, 25, 44, 54) formed on the non-piezoelectric film layer (12, 22, 28, 42, 54) over the cavity; electrodes (14, 16; 24, 26; 43, 45, 46; 53, 55, 56) connected to the piezoelectric film layer (15, 25, 44, 54) whereby the piezoelectric film layer can be actuated, and with the cavity resonate.
Claim 2
Dependent Claim
89 words
A piezoelectric resonating device comprising a substrate (11, 21, 41, 51), a non-piezoelectric film layer (12, 22, 28, 42, 54) on the substrate (11, 21, 41, 51), and shaped to form a cavity; a piezoelectric film layer (15, 25, 44, 54) formed on the non-piezoelectric film layer (12, 22, 28, 42, 54) over the cavity; electrodes (14, 16; 24, 26; 43, 45, 46; 53, 55, 56) connected to the piezoelectric film layer (15, 25, 44, 54) whereby the piezoelectric film layer can be actuated, and with the cavity resonate.
Claim 3
Dependent Claim
141 words
A piezoelectric resonating device comprising a substrate (11, 21, 41, 51), a piezoelectric film layer (15, 25, 44, 54), and at least two of electrodes (14, 16; 24, 26; 43, 45, 46; 53, 55, 56), characterised by a non-piezoelectric film layer (12, 22, 28, 42, 52) formed on the substrate to create an air-gap (13, 23, 44, 54) between a portion of the non-piezoelectric film and the substrate (11, 21, 41, 51); and that one of the electrodes (14, 24, 43, 53) being formed on the non-piezoelectric film (12) extending to the air-gap (13); the piezoelectric film layer (15, 25, 44, 54) being formed on the non-piezoelectric film (12) and the said one of electrodes (14, 24, 43, 53); and the other one of electrodes (16, 26, 45, 55) being formed on the piezoelectric film layer (15) extending to the air-gap.
Claim 4
Dependent Claim
141 words
A piezoelectric resonating device comprising a substrate (11, 21, 41, 51), a piezoelectric film layer (15, 25, 44, 54), and at least two of electrodes (14, 16; 24, 26; 43, 45, 46; 53, 55, 56), characterised by a non-piezoelectric film layer (12, 22, 28, 42, 52) formed on the substrate to create an air-gap (13, 23, 44, 54) between a portion of the non-piezoelectric film and the substrate (11, 21, 41, 51); and that one of the electrodes (14, 24, 43, 53) being formed on the non-piezoelectric film (12) extending to the air-gap (13); the piezoelectric film layer (15, 25, 44, 54) being formed on the non-piezoelectric film (12) and the said one of electrodes (14, 24, 43, 53); and the other one of electrodes (16, 26, 45, 55) being formed on the piezoelectric film layer (15) extending to the air-gap.
Claim 5
Dependent Claim
28 words
A piezoelectric resonating device according to claim 2, wherein a dielectric film layer (27, 37) is formed on the piezoelectric film (15) and the said one electrode (16).
Claim 6
Dependent Claim
24 words
A piezoelectric resonating device according to claim 2 or 3, wherein the non-piezoelectric film layer (12, 22, 28, 42, 52) comprises Si0 2 film.
Claim 7
Dependent Claim
21 words
A piezoelectric resonating device according to claim 2 or 3, wherein the non-piezoelectric film layer comprises Si 3 N 4 film.
Claim 8
Dependent Claim
42 words
A piezoelectric resonating device according to claim 2 or 3, wherein the non-piezoelectric film layer comprises Si 3 N 4 film on the substrate (11, 21, 31, 41, 51) and a Si0 2 film formed on the Si 3 N 4 film.
Claim 9
Dependent Claim
19 words
A piezoelectric resonating device according to claim 2 to 6, wherein one of the electrodes has a L-shaped pattern.
Claim 10
Dependent Claim
21 words
A piezoelectric resonating device according to claim 1 to 7, wherein one of the electrodes has a plurality of arm portions.
Claim 11
Dependent Claim
18 words
A piezoelectric resonating device according to claim 2 to 8, wherein the piezoelectric film is a ZnO film.
Claim 12
Independent Claim
65 words
A method of making a piezoelectric resonating device according to one of claims 2 to 9, wherein the air-gap is formed by the following steps: forming a dummy film layer on the substrate; forming the non-piezoelectric film layer on the substrate and the dummy film layer; and removing the dummy film layer by soaking the substrate in a solution which dissolves the dummy film layer.
Claim 13
Dependent Claim
72 words
A piezoelectric resonating device having a substrate (31), a piezoelectric film layer (35), and at least two of electrodes (14, 24, 43, 53), characterised by a metal film (34) disposed on the substrate (31), to form an air-gap (33) between the substrate and the metal film, and serving as one of the electrodes; and the other of electrodes (36) is formed on the piezoelectric film layer (35) extending to the air-gap (33).
Claim 14
Dependent Claim
72 words
A piezoelectric resonating device having a substrate (31), a piezoelectric film layer (35), and at least two of electrodes (14, 24, 43, 53), characterised by a metal film (34) disposed on the substrate (31), to form an air-gap (33) between the substrate and the metal film, and serving as one of the electrodes; and the other of electrodes (36) is formed on the piezoelectric film layer (35) extending to the air-gap (33).
Claim 15
Dependent Claim
26 words
A piezoelectric resonating device according to claim 10, wherein a dielectric film layer (37) is formed on the piezoelectric film and the said other electrode (36).
References Cited (Backward Citations)
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