Semiconductor laser array
Abstract
Abstract A semiconductor laser array includes a p-GaAs substrate, a p-Ga 1-x Al x As cladding layer, a Ga 1-y Al y As active tayer, an n-Ga 1-z Al z As optical guide layer, an n-Ga 1-x Al- x As cladding layer and an n-GaAs cap layer formed by the liquid phase epitaxial growth method. A plurality of stripe shaped grooves are formed from the surface of the n-GaAs cap layer so that the bottom of the groove reaches the intermediate of the n-Ga 1-z Al z As optical guide layer. A Ga 1-b Al b As high resistance layer is filled in the plurality of stripe shaped-grooves so that injecting current is divided into the plural pathes, and each laser emitting region is optically, phase coupled to each other with the phase difference of zero degree.
Inventors
- 👤 Seiki Yano
- 👤 Sadayoshi Matsui
- 👤 Saburo Yamamoto
- 👤 Mototaka Taneya
Bibliographic Details
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