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EP0154504A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Superlattice electrooptic devices

Assignee: ExxonMobil Technology and Engineering Co
•
Filing: 1985-02-27
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Granted: —
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Expires: 2005-02-27
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Abstract

Abstract Electrooptic devices for the modulation and conversion of light which include semiconductor superlattices which have large electrooptic and non-linear optical coefficients due to their built-in electric fields. These materials can be deposited at low temperatures onto virtually any substrate.

Inventors

  • 👤 Charles Blakely Roxlo

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-10-25 19:28
CPC Classifications
B; B82; B82Y; B82Y20/00; G; G02; G02F; G02F1/00; G02F1/0009; G02F1/0018; G02F1/01; G02F1/015; G02F1/017; G02F1/21; G02F1/218; G02F1/35; G02F1/355; G02F1/3556

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 18 words
An electrooptic device whose active material comprises an superlattice which includes a multilayered material having non-zero electrooptic coefficients.
Claim 2
Dependent Claim 18 words
An electrooptic device whose active material comprises an superlattice which includes a multilayered material having non-zero electrooptic coefficients.
Claim 3
Dependent Claim 25 words
An electrooptic device whose active material comprises an superlattice which includes a multilayered material whose optical index of refraction changes with an applied electric field.
Claim 4
Dependent Claim 25 words
An electrooptic device whose active material comprises an superlattice which includes a multilayered material whose optical index of refraction changes with an applied electric field.
Claim 5
Dependent Claim 18 words
An electrooptic device whose active material comprises an amorphous superlattice which includes a multilayered material which is anisotropic.
Claim 6
Dependent Claim 18 words
An electrooptic device whose active material comprises an amorphous superlattice which includes a multilayered material which is anisotropic.
Claim 7
Independent Claim 15 words
A device according to either of claims 1 and 2 wherein said superlattice is amorphous.
Claim 8
Independent Claim 19 words
A device according to either of claims 3 and 4 wherein the superlattice includes layers of a-Si:H/a-SiN x :H.
Claim 9
Dependent Claim 15 words
A device according to claim 4 wherein the superlattice includes layers of a-SiH/a-SiC x :H.
Claim 10
Dependent Claim 47 words
An electrooptic device whose active material comprises an amorphous superlattice which includes a multilayered material wherein layers 1, 3, 5... have one value of quadratic electrooptic coefficients and layers 2, 4, 6... have one value of quadratic electrooptic coefficients different from that for layers 1, 3, 5...
Claim 11
Dependent Claim 47 words
An electrooptic device whose active material comprises an amorphous superlattice which includes a multilayered material wherein layers 1, 3, 5... have one value of quadratic electrooptic coefficients and layers 2, 4, 6... have one value of quadratic electrooptic coefficients different from that for layers 1, 3, 5...

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