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EP0154482A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Coating process

Assignee: Nortel Networks Ltd
•
Filing: 1985-02-25
•
Granted: —
•
Expires: 2005-02-25
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Abstract

Abstract A substrate surface, e.g. an electrical component or an optical fibre, is provided with a film coating by pulsed plasma deposition. The film comprises a lower layer com- patFble with the substrate and an upper layer that provides hermeticity. There is a graded transition between the layers.

Inventors

  • 👤 Rudolf August Herbert Heinecke
  • 👤 Suresh Mishrilal Ojha

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-01 06:15
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/34; C03C17/3411; C03C17/3429; C03C17/3435; C03C17/3441; C03C17/42; C03C25/00; C03C25/10; C03C25/104; C03C25/106; C03C25/1061; C03C25/12; C03C25/22; C03C25/223; C23; C23C; C23C16/00; C23C16/02; C23C16/0209; C23C16/44; C23C16/50; C23C16/515; C03C2217/00; C03C2217/90; C03C2217/91

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 68 words
1 . A process for providing an hermetic coating on a substrate surface, the process including depositing on said surface a first coating of a material compatible with said surface, and depositing a second coating of a further material on said first coating, characterised in that there is a graded interchange between the first and second materials, and that said coatings are deposited from a pulsed radio-frequency plasma.
Claim 2
Dependent Claim 68 words
1 . A process for providing an hermetic coating on a substrate surface, the process including depositing on said surface a first coating of a material compatible with said surface, and depositing a second coating of a further material on said first coating, characterised in that there is a graded interchange between the first and second materials, and that said coatings are deposited from a pulsed radio-frequency plasma.
Claim 3
Dependent Claim 16 words
A process as claimed in claim 1, characterised in that said first coating comprises silicon carbide.
Claim 4
Dependent Claim 18 words
A process as claimed in claim 1 or 2, characterised in that said second coating is silicon nitride.
Claim 5
Dependent Claim 24 words
A process as claimed in claim 2 or 3, characterised in that said coatings are deposited from gas mixtures of nitrogen, acetylene and silane.
Claim 6
Dependent Claim 22 words
A process as claimed in claim 2, 3 or 4, characterised in that said substrate is provided with a precoat of carbon.
Claim 7
Dependent Claim 25 words
A process as claimed in any one of claims 1 to 5, characterised in that the pulse width is from 100 to 250 µ sec.
Claim 8
Dependent Claim 38 words
A process for providing an hermetic coating on a substrate surface, the process including depositing sequentially from a pulsed radio frequency plasma a first oxide layer, a second carbide or nitride layer and a third organic polymeric layer.
Claim 9
Dependent Claim 38 words
A process for providing an hermetic coating on a substrate surface, the process including depositing sequentially from a pulsed radio frequency plasma a first oxide layer, a second carbide or nitride layer and a third organic polymeric layer.
Claim 10
Dependent Claim 21 words
A process as claimed in any one of claims 1 to 6, characterised in that said substrate comprises an optical fibre.
Claim 11
Dependent Claim 12 words
An optical fibre treated by a process as claimed in claim 8.

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