EP0154429A2
Expired / Lapsed
EP
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Tomographic testing apparatus
Assignee: Toshiba Corp
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Filing: 1985-02-13
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Granted: —
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Expires: 2005-02-13
Abstract
Abstract 57 tomographic testing apparatus employs two data collection modes. One of these modes is a reference data collection mode in which almost all of the prescribed image data (X1, X2, X4, X5, X7, X8 and X10) of a reference sample is obtained. The reference sample has no defect. The other of these modes is a measurement mode in which a predetermined small number of image data (Y3, Y6 and Y9) of an inspection sample is obtained. The inspection sample to be tested may have defective portions. The tomographic image of the inspection sample is obtained from the combination (X1, X2, Y3, X4, X5, Y6, X7, X8, Y9 and X10) of the inspection sample image data (Y3, Y6 and Y9) and the reference sample image data (X1, X2, X4, X5, X7, X8 and X10) from which specific data (X3, X6 and X9) corresponding to the inspection sample image data (Y3, Y6 and Y9) is deleted.
Inventors
- 👤 Kazunori Masanobu
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 13:52
CPC Classifications
A; A61; A61B; A61B6/00; A61B6/58; A61B6/582; A61B6/583; G; G06; G06T; G06T12/00; Y; Y10; Y10S; Y10S378/00; Y10S378/901
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
167 words
A tomographic apparatus for testing an object material which is either a reference sample or an inspection sample, comprising: scanner means (1-8; 21X-30X) for generating and scanning a radiation beam (FB) within a given plane in which said object material (4; 31X) is located, and providing a scanner output (E3; E23X) containing radiation absorption information of a given slice of said object material (4; 31X); reconstruction means (9-13, 21, 22, 220; 32X-39X), coupled to said scanner means (3; 23X), for reconstructing a tomographic image from said scanner output (E3; E23X) to provide reference image data (D21Y; D34X) and inspection image data (D21X; D35XB), for storing said reference image data (D21Y; D34X), and for providing tomographic image data (DT; D39X) corresponding to the stored reference image data (D21Y; D34X) and said inspection image data (D21X; D35XB); and display means (14, 15; 40X, 42X) coupled to said reconstruction means (12; 38X) for displaying a tomographic image of said inspection sample in accordance with said tomographic image data (DT; D39X).
Claim 2
Dependent Claim
167 words
A tomographic apparatus for testing an object material which is either a reference sample or an inspection sample, comprising: scanner means (1-8; 21X-30X) for generating and scanning a radiation beam (FB) within a given plane in which said object material (4; 31X) is located, and providing a scanner output (E3; E23X) containing radiation absorption information of a given slice of said object material (4; 31X); reconstruction means (9-13, 21, 22, 220; 32X-39X), coupled to said scanner means (3; 23X), for reconstructing a tomographic image from said scanner output (E3; E23X) to provide reference image data (D21Y; D34X) and inspection image data (D21X; D35XB), for storing said reference image data (D21Y; D34X), and for providing tomographic image data (DT; D39X) corresponding to the stored reference image data (D21Y; D34X) and said inspection image data (D21X; D35XB); and display means (14, 15; 40X, 42X) coupled to said reconstruction means (12; 38X) for displaying a tomographic image of said inspection sample in accordance with said tomographic image data (DT; D39X).
Claim 3
Dependent Claim
24 words
A tomographic apparatus according to claim 1, characterized in that said reconstruction means includes: memory means (13) for storing said inspection image data (D21X).
Claim 4
Dependent Claim
95 words
A tomographic apparatus according to claim 1, characterized in that said reconstruction means includes: reference memory means (22) for storing reconstructed reference image data (D21Y) representing said reference sample; and back projector means (12) responsive to the reconstructed reference image data (D21Y) from said reference memory means (22) and to the scanner output (E3) containing information of said inspection sample, for reconstructing said inspection image data (D21X) from the scanner output information (E3), and providing said tomographic image data in accordance with the reconstructed reference image data (D21Y) and the reconstructed inspection image data (D21X).
Claim 5
Dependent Claim
82 words
A tomographic apparatus according to claim 1, characterized in that said reconstruction means reconstructs said scanner output (E3; E23X) to provide said reference image data (D21Y; D34X) which corresponds to a reconstructed image of said reference sample if said object material (4; 31X) is said reference sample, and reconstructs said scanner output (E3; E23X) to provide said inspection image data (D21X; D35XB) which corresponds to a reconstructed image of said inspection sample if said object material (4; 31X) is said inspection sample.
Claim 6
Dependent Claim
59 words
A tomographic apparatus according to claim 1, characterized in that an image displayed at said display means (15) contains a plurality of different artifacts (a in Fig. 3) each of which passes a portion (d in Fig. 3) of defect in said inspection sample (4), said portion (d) representing the difference between said reference sample and said inspection sample.
Claim 7
Dependent Claim
32 words
A tomographic apparatus according to claim 5, characterized by further comprising: means (grating in Fig. 3) for measuring the position of said defect at the cross-point (d) of said plural artifacts (a).
Claim 8
Dependent Claim
30 words
A tomographic apparatus according to claim 5, further comprising: means (grating in Fig. 3) for measuring the size of said defect at the cross-point (d) of said plural artifacts (a).
Claim 9
Dependent Claim
61 words
A tomographic apparatus according to claim 1, characterized in that said reference image data (D21Y) lacks information corresponding to said inspection image data (D21X), said inspection image data (D21X) lacks information corresponding to said reference image data (D21Y), ' and said tomographic image data (DT) corresponds to the sum of said reference image data (D21Y) and said inspection image data (D21X).
Claim 10
Dependent Claim
79 words
A tomographic apparatus according to claim 8, characterized in that said reconstruction means includes: reference image memory means (22) for storing said reference image data (D21Y) when said object material (4) is said reference sample; inspection image memory means (13) for storing said inspection image data (D21X) when said object material (4) is said inspection sample; and means (220) for combining said reference image data (D21Y) with said inspection image data (D21X) to provide said tomographic image data (DT).
Claim 11
Dependent Claim
30 words
A tomographic apparatus according to claim 1, characterized in that said display means includes: image converter means (14; 40X) for modifying the gradation of said tomographic image data (DT; D39X).
Claim 12
Dependent Claim
59 words
A tomographic apparatus according to claim 1, characterized in that said reconstruction means includes: difference means (34X-36X) for providing boundary data (D36X) corresponding to the difference between said reference image data (D34X) and said inspection image data (D35XB), said boundary data (D36X) representing the difference between a boundary region of said inspection sample and that of said reference sample.
Claim 13
Dependent Claim
60 words
A tomographic apparatus according to claim 11, characterized in that said display means includes: image converter means (40X) for modifying (ST116 in Fig. 16) said boundary data (D36X) so that a tomographic image displayed at said display means (42X) exaggeratedly exhibits the portion (Fig. 11) of said difference between said reference image data (D34X) and said inspection image data (D35XB).
Claim 14
Dependent Claim
121 words
A tomographic apparatus according to claim 1, characterized in that said reconstruction means includes: difference means (34X-36X) for providing boundary data (D36X) corresponding to the difference between said reference image data (D34X) and said inspection image data (D35XB), said boundary data (D36X) representing the difference between a boundary region of said inspection sample and that of said reference sample; reference image memory means (22) for storing said reference image data (D21Y) when said object material is said reference sample; inspection image memory means (13) for storing said inspection image data (D21X) when said object material is said inspection sample; means (220) for combining said reference image data (D21Y) with said inspection image data (D21X) to provide said tomographic image data (DT).
Claim 15
Dependent Claim
56 words
A tomographic apparatus according to claim 13, characterized in that said display means includes: image converter means (14) for modifying said boundary data (D36X) so that a tomographic image displayed at said display means (15) exaggeratedly exhibits the portion (Fig. 11) of said difference between said reference image data (D34X) and said inspection image data (D35XB).
Claim 16
Dependent Claim
82 words
A tomographic apparatus according to claim 8, characterized in that said scanner means includes: system controller means (7), being responsive to a predetermined sequence, for obtaining said reference image data (D21Y) which lacks the information of said inspection image data (D21X), obtaining said inspection image data (D21X) which lacks the information of said reference image data (D21Y), and obtaining the reconstructed tomographic image data (DT) which corresponds to the sum of said reference image data (D21Y) and said inspection image data (D21X).
Claim 17
Dependent Claim
51 words
A tomographic apparatus according to claim 12, characterized in that said scanner means includes: system controller means (28X), being responsive to a predetermined sequence, for effecting the modifying function of said image converter means (40X), so that the amount of said difference (1) is expanded (1 to L in Fig. 11).
Claim 18
Dependent Claim
158 words
A tomographic testing method, comprising the steps of: obtaining, by means of a CT scanning, a first given number of reference image data (e.g., Xl, X2, X4, X5, X7, X8, X10) of a reference sample having no defect; obtaining, by means of the CT scanning, a second given number of inspection image data (e.g., Y3, Y6, Y9) of an inspection sample having defective portions, said second given number being smaller than said first given number; combining said inspection image data (Y3, Y6, Y9) with said reference image data (Xl, X2, X4, X5, X7, X8, X10) from which specific data (X3, X6, X9) corresponding to said inspection image data (Y3, Y6, Y9) is deleted, and providing tomographic image data (Xl, X2, Y3, X4, X5, Y6, X7, X8, Y9, X10) representing said inspection sample; and displaying a tomographic image of said inspection sample in accordance with said tomographic image data (Xl, X2, Y3, X4, X5, Y6, X7, X8, Y9, X10).
Claim 19
Dependent Claim
158 words
A tomographic testing method, comprising the steps of: obtaining, by means of a CT scanning, a first given number of reference image data (e.g., Xl, X2, X4, X5, X7, X8, X10) of a reference sample having no defect; obtaining, by means of the CT scanning, a second given number of inspection image data (e.g., Y3, Y6, Y9) of an inspection sample having defective portions, said second given number being smaller than said first given number; combining said inspection image data (Y3, Y6, Y9) with said reference image data (Xl, X2, X4, X5, X7, X8, X10) from which specific data (X3, X6, X9) corresponding to said inspection image data (Y3, Y6, Y9) is deleted, and providing tomographic image data (Xl, X2, Y3, X4, X5, Y6, X7, X8, Y9, X10) representing said inspection sample; and displaying a tomographic image of said inspection sample in accordance with said tomographic image data (Xl, X2, Y3, X4, X5, Y6, X7, X8, Y9, X10).
Claim 20
Dependent Claim
59 words
A tomographic testing method according to claim 17, further comprising the steps of: detecting a plurality of different artifacts (a in Fig. 3) each of which passes a portion (d in Fig. 3) of defect in said inspection sample; and measuring the position or size of said defect in accordance with the cross-point (d) of said plural artifacts (a).
References Cited (Backward Citations)
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