Method of producing a semiconductor device comprising a selective vapour growth technique

Abstract

Abstract Disclosed is a method of producing a semiconductor device, comprising the steps of introducing an impurity of one conductivity type into a semiconductor substrate (21) of an opposite conductivity type having an insulating film pattern (22) formed on a surface thereof, using the insulating film pattern (22) as a mask to form a diffusion layer (25a, 25b); and forming a metal film (27a to 27c) on the diffusion layer (25a, 25b) by selective vapor growth with a mixture of a metal source gas and an additive gas used as a feed gas, said vapor growth being carried out such that the distance of entry of the metal film (27a, 27b) from the edge of the insulating film pattern (22) to the interface between the insulating film pattern (22) and the diffusion layer (25a, 25b) is smaller than the depth of the pn junction of the diffusion layer (25a, 25b). The particular method makes it possible to achieve a selective vapor growth of a metal film on the diffusion layer without deteriorating the pn junction characteristics.

Inventors

• 👤 Takahiko C/O Patent Division Moriya
• 👤 Saburo C/O Patent Division Nakada

Bibliographic Details