EP0144869A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Grazing incidence reflection spectrometer
Assignee: Hitachi Ltd
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Filing: 1984-11-23
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Granted: —
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Expires: 2004-11-23
Abstract
Abstract The present invention consists in grazing incidence reflection spectrometer wherein light (2) is caused to incide on a surface of a sample (1), and an intensity of light (3) reflected from the sample surface is detected, thereby to measure an electronic absorption spectrum of a material adsorbed to the sample surface, characterized in that the incident light (2) is visible light or ultra-violet light, and that the incident light (2) has a predetermined glancing angle (8) to the sample surface.
Inventors
- 👤 Yusuke Hitachi Dai 4 Kyoshinryo Yajima
- 👤 Seiichi Murayama
- 👤 Kanji Tsujii
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-25 17:22
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/17; G01N21/55; G01J; G01J3/00; G01J3/28; G01J3/42; G01N21/21
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
76 words
A grazing incidence reflection spectrometer wherein light (2) is caused to incide on a surface of a sample (1), and an intensity of light (3) reflected from the sample surface is detected, thereby to measure an electronic absorption spectrum of a material adsorbed to the sample surface; characterized in that the incident light (2) is visible light or ultraviolet light, and that said incident light (2) has a predetermined glancing angle (6) to the sample surface.
Claim 2
Dependent Claim
76 words
A grazing incidence reflection spectrometer wherein light (2) is caused to incide on a surface of a sample (1), and an intensity of light (3) reflected from the sample surface is detected, thereby to measure an electronic absorption spectrum of a material adsorbed to the sample surface; characterized in that the incident light (2) is visible light or ultraviolet light, and that said incident light (2) has a predetermined glancing angle (6) to the sample surface.
Claim 3
Dependent Claim
31 words
A grazing incidence reflection spectrometer according to claim 1, wherein said incident light (2) is linearly polarized light (6) whose plane of polarization is perpendicular to a plane of incidence (5).
Claim 4
Dependent Claim
28 words
A grazing incidence reflection spectrometer according to claim 2, wherein the sample (1) is made of an opaque material, and said glancing angle (6) does not exceed 5°.
Claim 5
Dependent Claim
28 words
A grazing incidence reflection spectrometer according to claim 2, wherein the sample (1) is made of a transparent material, and said glancing angle (6) does not exceed 1°.
References Cited (Backward Citations)
No citation records indexed.
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