Optical system for projection display using spatial light modulator (1111111)

Claim 2

An electronic display device comprising: a light source; a first optical system for forming a substantially collinear beam of light from said light source; a Schlierin optical device having alternating reflecting and transmitting portions for forming respective reflecting and transmitting optical paths, said Schlierin optical device disposed to receive light from said first optical system at an angle; a second optical system disposed to receive light from one of said reflecting or transmitting optical paths of said Schlierin optical device for focusing light received from said Schlierin optical device to a focal point; a deformable mirror device disposed near said focal point for receiving light from said second optical system, said deformable mirror device having a matrix of a plurality of individually electrically deformable mirror cells, each mirror cell normally reflecting light received from portions of said Schlierin optical device back to similar type portions and being electrically deformable to reflect at least some light received from portions of said Schlierin optical device back to opposite type portions; and a viewing screen disposed for receiving light reflected by deformed mirror cells of said deformable mirror device.

Claim 3

An electronic display device as claimed in Claim 1, further comprising; a third optical system disposed to receive light from the other of said reflecting or transmitting optical paths of said Schlierin optical device than said second optical system for focusing light received from said Schlierin optical device to a second focal point; and a second deformable mirror device disposed near said second focal point for receiving light from said third optical system, said deformable mirror device having a matrix of a plurality of individually electrically deformable mirror cells, each mirror cell normally reflecting light received from portions of said Schlierin optical device back to similar type portions and being electrically deformable to reflect at least some light received from portions of said Schlierin optical device back to opposite type portions.

Claim 4

An electronic display device as claimed in Claim 2, further comprising: a first color filter disposed between said Schlierin optical device and said deformable mirror device; and a second color filter different from said first filter disposed between said Schlierin optical device and said second deformable mirror device.

Claim 5

An electronic display device as claimed in Claim 2, further comprising: a third filter disposed between said Schlierin optical device and said deformable mirror device for transmitting only )a first type of light; a fourth filter disposed between said Schlierin optical device and said second deformable mirror device for transmitting only a second type of light different from said first type of light; 5 a fifth filter disposed between said viewing screen and a first one of an observer's eyes for transmitting only said first type of light; and a sixth filter disposed between said viewing screen and a second one of an observer's eyes for transmitting only said second type of light.

Claim 6

An electronic display device as claimed in Claim 2, wherein: said deformable mirror device and said second deformable device are aligned whereby individual mirror cells are disposed in a first direction in said deformable mirror device control the illumination of a first set of alternating spots on said viewing screen and individual mirror cells disposed in said first direction in said second deformable mirror device control the illumination of a second set of alternating spots disposed in said first direction on said viewing screen.

Claim 7

An electronic display device as-claimed in Claim 1, wherein said deformable mirror device comprises: a plurality of row conductors; a plurality of column conductors; a plurality of charge storage cells disposed at the intersections of said row conductors and said column conductors, each charge storage cell having a light modulator cell associated therewith, the light modulation of each of said Light modulator cell corresponding to the charge stored in said associated charge storage cell; a row decode means connected to said row conductors for receiving a digital row signal and coupling a predetermined voltage to a selected one of said row conductors corresponding to said digital row signal, thereby selecting one of said rows; a column drive means connected to said column conductors for receiving a digital column signal of more than one bit for each column conductor and generating a column drive signal on each of said column conductors proportional to said corresponding digital column signal, thereby storing a charge corresponding to said column drive signal in the charge storage cells of said selected row; a column sensor connected to said column conductors for sensing the charge stored in charge storage cells of said selected row and generating a digital column signal of more than one bit for each column conductor; and a column latch connected to said column drive means and to said column sensor for storing therein the digital column signals generated by said column sensor and for applying the digital column signals stored therein to said column drive means.

Claim 8

An electronic display system as claimed in Claim 6, further comprising: a refresh counter connected to said row decode means for storing therein a digital row signal corresponding to one of said plurality of row conductors; and a sequencing means connected to said row decode means, said refresh counter, said column drive means, said column sensor means and said column latch means for periodically enabling the following automatic refresh sequence: 1) applying the digital row signal stored in said refresh counter to said row decode means for selecting a row conductor corresponding to said digital row signal; 2) enabling said column sensor to sense the charge stored in each charge storage cell in said selected row and generate a corresponding set of digital column signals; 3) storing said digital column signals in said column Ilatch; 4) applying said digital column signals stored in said column latch to said column drive means, thereby causing said column drive means to store a charge in each charge storage cell in said selected row proportional to said ¡corresponding digital column signal; and 5) incrementing the digital row signal stored in said refresh counter to correspond to the next sequential row conductor.

Claim 9

A spatial light modulating device as claimed in Claim 7, further comprising: a command input means connected to said sequencing means for receiving a multibit command input; and said sequencing means further includes means for alternately enabling said automatic refresh sequence and enabling a command sequence corresponding to a received command input.

Claim 10

An electronic display device as claimed in Claim 8, wherein: said multibit command input includes a write data command and a read data command; and said sequencing means includes means for enabling said command sequence to store a charge corresponding to received data in specified locations within said-plurality of charge storage cells in response to a write data command and for enabling said command sequence to output data corresponding to said charge stored in specified locations within said plurality of charge storage cells i: response to a read data command.

Claim 11

An electronic display system comprising: a first projection system including; 1) a first light source, 2) a first spatial light modulating means disposed to receive light from said first light source, said first spatial light modulating means having a plurality of individually electrically controllable modulator cells for modulating light received from said first light source, and 3) a first viewing neans for presenting light modulated by said first spatial light modulating means to a first one of an observer's eyes; and a second projection system including; 1) a second light source, 2) a second spatial light modulating means disposed to receive light from said second light source, said second spatial light modulating means having a plurality of individually electrically controllable modulator cells for modulating light received from said second light source, and 3) a second viewing means for presenting light modulated by said second spatial light modulating means to a second one of an observer's eyes.

Claim 12

An electronic display system comprising: a first projection system including; 1) a first light source, 2) a first spatial light modulating means disposed to receive light from said first light source, said first spatial light modulating means having a plurality of individually electrically controllable modulator cells for modulating light received from said first light source, and 3) a first viewing neans for presenting light modulated by said first spatial light modulating means to a first one of an observer's eyes; and a second projection system including; 1) a second light source, 2) a second spatial light modulating means disposed to receive light from said second light source, said second spatial light modulating means having a plurality of individually electrically controllable modulator cells for modulating light received from said second light source, and 3) a second viewing means for presenting light modulated by said second spatial light modulating means to a second one of an observer's eyes.

Claim 15

i 12. A method of fabrication of spatial light modulators, comprising the steps of: (a) deposit a spacer layer on a conducting substrate; (b) deposit a reflecting layer on said spacer layer; (c) pattern said reflecting layer to define a plurality of pixel elements and electrodes; and (d) plasma etch said spacer layer to form wells under said pixel elements, thereby freeing said pixel elements from said spacer layer and permitting them to be electrostatically deflected by signals applied between said electrodes and said substrate.

Claim 16

i 12. A method of fabrication of spatial light modulators, comprising the steps of: (a) deposit a spacer layer on a conducting substrate; (b) deposit a reflecting layer on said spacer layer; (c) pattern said reflecting layer to define a plurality of pixel elements and electrodes; and (d) plasma etch said spacer layer to form wells under said pixel elements, thereby freeing said pixel elements from said spacer layer and permitting them to be electrostatically deflected by signals applied between said electrodes and said substrate.