Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
138 words
An apparatus for applying optical energy to selectively remove material carried upon a substrate (56), the apparatus comprising optical generation means (12) for generating optical energy in a primary beam, partitioning means (16, 28, 38) for dividing the primary beam into a plurality of derivative beams (18, 20, 32, 36, 42, 48), redirective means (50) for redirecting the derivative beams to form a plurality of working beams (33, 35, 43, 49) which impinge on the substrate (56), focusing means (54) for focusing each of the plurality of working beams (33, 35, 43, 49) upon the substrate, and transport means (76) for transporting the substrate (56) in a direction transverse of the plurality of working beams (33, 35, 43, 49) to effect removal of material from the substrate (56) by the plurality of working beams (33, 35, 43, 49).
Claim 2
Independent Claim
138 words
An apparatus for applying optical energy to selectively remove material carried upon a substrate (56), the apparatus comprising optical generation means (12) for generating optical energy in a primary beam, partitioning means (16, 28, 38) for dividing the primary beam into a plurality of derivative beams (18, 20, 32, 36, 42, 48), redirective means (50) for redirecting the derivative beams to form a plurality of working beams (33, 35, 43, 49) which impinge on the substrate (56), focusing means (54) for focusing each of the plurality of working beams (33, 35, 43, 49) upon the substrate, and transport means (76) for transporting the substrate (56) in a direction transverse of the plurality of working beams (33, 35, 43, 49) to effect removal of material from the substrate (56) by the plurality of working beams (33, 35, 43, 49).
Claim 3
Dependent Claim
49 words
An apparatus according to claim 1, which further comprises phase retarder means (22, 24) for shifting the vector orientation of at least some of the plurality of derivative beams (18, 20) so that each of the plurality of working beams (33, 35, 43, 49) has a substantially equal intensity.
Claim 4
Dependent Claim
43 words
An apparatus according to claim 1 or 2, which further comprises beam expander means (70) for expanding the primary beam to reduce the energy concentration upon optical elements of the apparatus located in between the optical generation means (12) and the substrate (56).
Claim 5
Dependent Claim
60 words
An apparatus according to claim 1, 2 or 3, wherein the focusing means comprises lens means (54) configured to focus each of the plurality of working beams (33, 35, 43, 49) upon the substrate (56) in a substantially elliptical pattern, the major axis of the substantially elliptical pattern being substantially aligned with the direction of transport of the substrate (56).
Claim 6
Independent Claim
26 words
An apparatus according to any one of the preceding claims, which further comprises evacuation means adjacent the substrate (56) for evacuating material removed by the apparatus.
Claim 7
Independent Claim
35 words
An apparatus according to any one of the preceding claims, wherein the partitioning means comprise a plurality of beam splitters (16, 28, 38) and the reflective means comprises a plurality of mirrors (34, 46, 50).
Claim 8
Independent Claim
105 words
An apparatus according to any one of the preceding claims wherein the partitioning means comprises first partitioning means (16) for dividing the primary beam into a first derivative beam (18) and a second derivative beam (20), and a plurality of subsequent partitioning means (28, 38), at least one (28) of the plurality of subsequent partitioning means being associated with the first derivative beam (18) and at least one (38) of the plurality of subsequent partitioning means being associated with the second derivative beam (20) for dividing the first and second derivative beams (18, 20) into a plurality of subsequent derivative beams (32, 36, 42, 48).