EP0136050A1
Expired / Lapsed
EP
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Method of bonding crystalline silicon bodies
Assignee: Toshiba Corp
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Filing: 1984-08-20
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Granted: —
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Expires: 2004-08-20
Abstract
Abstract A method of bonding two single-crystal silicon bodies comprises the steps of: (i) mirror-polishing the contact surfaces of the bodies to reduce the surface roughness to 500A or less; (ii) removing contaminant from the mirror-polished surfaces; and (iii) bringing the surfaces into mutual contact so that substantially no foreign substance enter the gap between these surfaces.
Inventors
- 👤 Masaru C/O Patent Division Shimbo
- 👤 Kiyoshi C/O Patent Division Fukuda
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-29 01:38
CPC Classifications
B; B23; B23K; B23K20/00; B23K20/24; C; C30; C30B; C30B29/00; C30B29/02; C30B29/06; C30B33/00; G; G01; G01L; G01L19/00; G01L19/14; G01L19/147; H; H10; H10P; H10P10/00; H10P10/12; H10P10/128
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
54 words
A method of bonding two single-crystal silicon bodies comprising the steps of: mirror-polishing surfaces of the bodies to reduce the surface roughness to 500A or less; cleaning the mirror-polished surfaces to remove contaminent therefrom; and bringing the surfaces into mutual contact so that substantially no foreign substance enters the gap ' between these surfaces.
Claim 2
Independent Claim
54 words
A method of bonding two single-crystal silicon bodies comprising the steps of: mirror-polishing surfaces of the bodies to reduce the surface roughness to 500A or less; cleaning the mirror-polished surfaces to remove contaminent therefrom; and bringing the surfaces into mutual contact so that substantially no foreign substance enters the gap ' between these surfaces.
Claim 3
Dependent Claim
15 words
The method according to claim 1, characterized in that said mirror polishing is optical polishing.
Claim 4
Dependent Claim
37 words
The method according to claim 1, characterized in that said cleaning is at least one of the process group consisting of water-washing, treatment with a surfactant, treatment with an organic solvent and treatment with an acid solution.
Claim 5
Dependent Claim
39 words
The method according to claim 1, characterized in that said step of bringing the surfaces of the bodies into mutual contact is carried out in a clean room wherein 20 or less foreign particles exist in every cubic meter.
Claim 6
Dependent Claim
28 words
The method according to claim 1, characterized by further comprising the step of heating the bonded structure formed by bringing the surfaces of the bodies into mutual contact.
Claim 7
Dependent Claim
21 words
The method according to claim 5, characterized in that said heating step is to heat the bodies to at least 300°C.
Claim 8
Dependent Claim
17 words
The method according to claim 6, characterized in that said bodies are heated to 600 to 1250°C.
Claim 9
Dependent Claim
33 words
The method according to claim 1, characterized in that a step of forming thermal oxide layers on the mirror-polished surfaces of the bodies is further included before bringing the surfaces into mutual contact.
References Cited (Backward Citations)
No citation records indexed.
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