EP0132206A2
Expired / Lapsed
EP
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Process for fabricating optical wave-guiding components and components made by the process
Assignee: Fairchild Semiconductor Corp
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Filing: 1984-07-19
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Granted: —
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Expires: 2004-07-19
Abstract
Abstract Optical wave-guiding components and a process for fabricating such components in a substrate using conventional integrated circuit fabrication techniques. Ions of a suitable dopant are selectively implanted in a silcon substrateto create an interior region defining a wave-guiding region of a first index of refraction. A wave confining region surrounding the wave-guiding region is created by oxidising the silicon substrate. The wave confining region has an index of refraction lowerthan that of the interiorwave-guiding region defined by the implanted dopant. Various configurations of components, from which various optical component characteristics can be obtained, are disclosed. The optical components also may be combined with electronic circuit components formed on the same silicon substrate.
Inventors
- 👤 Robert J. Strain
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-29 21:17
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; G02B6/134; G02B6/1347
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
119 words
A process for fabricating an optical wave-guiding component in a substrate (10) characterized by comprising the steps of : selectively implanting ions of a dopant into the substrate to create an interior region of the substrate having a first index of refraction and defining the desired extend of a light wave guiding region (18) in the substrate: and processing the substrate to modify at least the portion of the substrate surrounding the interior region thereof in order to reduce any optical imperfections caused by implanting ions and to insure a second index of refraction in said surrounding portion less than said first index of refraction thereby creating a light wave confining region (20) surrounding the light wave guiding region.
Claim 2
Dependent Claim
119 words
A process for fabricating an optical wave-guiding component in a substrate (10) characterized by comprising the steps of : selectively implanting ions of a dopant into the substrate to create an interior region of the substrate having a first index of refraction and defining the desired extend of a light wave guiding region (18) in the substrate: and processing the substrate to modify at least the portion of the substrate surrounding the interior region thereof in order to reduce any optical imperfections caused by implanting ions and to insure a second index of refraction in said surrounding portion less than said first index of refraction thereby creating a light wave confining region (20) surrounding the light wave guiding region.
Claim 3
Dependent Claim
62 words
The process of claim 1 characterized in that said step of implanting ions into the substrate comprises : producing a first layer (12) on the substrate; removing a portion of the first layer to define a first opening in the first layer corresponding approximately to the desired extent of the interior region; and implanting ions into the substrate through said first opening.
Claim 4
Dependent Claim
27 words
The process of claim 2 characterized in that said substrate is silicon and the dopant is taken from the group consisting of boron, phosphorous, arsenic and germanium.
Claim 5
Dependent Claim
12 words
The process of claim 3 characterized in that the dopant is boron.
Claim 6
Dependent Claim
21 words
The process of claim 3 or 4 characterized in that the step of processing the substrate comprises oxidizing the silicon substrate.
Claim 7
Dependent Claim
82 words
The process of claim 5 characterized in that said step of processing comprises : producing a second layer (14) on the substrate and on the first layer; removing a portion of the second layer to define a second opening in the second layer corresponding approximately to the desired extent of the light wave confining region; and oxidizing the silicon substrate through said second opening to a depth below said interior region to provide grown silicon dioxide surrounding the light wave guiding region.
Claim 8
Dependent Claim
64 words
The process of claim 6 characterized in that said first layer (12) is an oxide layer deposited on the substrate and said second layer (14) is a silicon nitride layer overlying said oxide layer, a portion of said first layer being removed to define said second opening corresponding approximately to the desired extent of the light wave confining region before oxidizing the silicon substrate.
Claim 9
Dependent Claim
76 words
An optical wave-guiding component characterized by comprising a silicon substrate (10): an interior region (18) of the substrate of a first index of refraction said interior region containing selectively implanted ions of a dopant defining an optical wave-guiding region; and an oxidized region (20) surrounding said interior region (18) and having a second index of refraction higher than said first index of refraction, said oxidized region defining a light confining region surrounding said interior, guiding region.
Claim 10
Dependent Claim
76 words
An optical wave-guiding component characterized by comprising a silicon substrate (10): an interior region (18) of the substrate of a first index of refraction said interior region containing selectively implanted ions of a dopant defining an optical wave-guiding region; and an oxidized region (20) surrounding said interior region (18) and having a second index of refraction higher than said first index of refraction, said oxidized region defining a light confining region surrounding said interior, guiding region.
Claim 11
Dependent Claim
25 words
An optical wave-guiding component according to claim 8 characterized in that the dopant is taken from the group consisting of boron, phosphorous, arsenic and germanium.
Claim 12
Dependent Claim
15 words
An optical wave-guiding component according to claim 9 characterized in that the dopant is boron.
Claim 13
Dependent Claim
54 words
An optical wave-guiding component according to any one of claim 8 to 10 characterized in that said component is an optical coupler, said component including at least two separately interior wave-guiding regions (24a, 24b) coupled by a coupling region (25) containing selectively implanted ions of a dopant and extending between said two wave-guiding regions.
Claim 14
Dependent Claim
52 words
An optical wave-guiding component according to any one of claim 8 to 10 characterized in that said component includes a tapered portion (30,32) of at least said oxidized region wherein, in said tapered portion, the silicon substrate is closer to the wave-guiding region (18) than in non-tapered portions of the oxidized region.
Claim 15
Dependent Claim
24 words
An optical wave-guiding component according to claim 12 characterized in that the tapered portion (32) includes both the oxidized region and the interior region.
Claim 16
Dependent Claim
33 words
An optical wave-guiding component according to any one of claim 8 to 10 characterized by including electronic circuit component (34) formed on the silicon substrate in cooperative relationship to the optical wave-guiding component.
Claim 17
Dependent Claim
44 words
An optical wave-guiding component according to claim 14 characterized in that said electronic circuit component (34) is a diode formed by diffusing a dopant into the silicon substrate, the diode communicating with the optical wave-guiding component to detect light waves guided by said component.
References Cited (Backward Citations)
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