EP0128026A2
Expired / Lapsed
EP
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Improved reflectivity and resolution X-ray dispersive and reflective structures and method of making the structures
Assignee: Energy Conversion Devices Inc
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Filing: 1984-06-01
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Granted: —
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Expires: 2004-06-01
Abstract
Abstract X-ray dispersive and reflective structures (110) and materials are provided which exhibit improved resolution and reflectivity in specific ranges of interest without substantial fluorescence or absorption edges. The structures (110) are formed of metallic and non-metallic layer pairs and can include a buffer layer between each layer to prevent interdiffusion to stabilize the structures. The materials can be thermally activated to control the desired properties, during or post deposition. The structures (110) can be deposited by ion beam absorption techniques to form the structures in a precise manner. The index of the refraction of the structures (110) can be continuously varying throughout the structures (110).
Inventors
- 👤 John Edward Keem
- 👤 Steven Alan Flessa
- 👤 Keith Laverne Hart
- 👤 Stanford Robert Ovshinsky
- 👤 James Leslie Wood
- 👤 Lennard Sztaba
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-03 18:34
CPC Classifications
G; G21; G21K; G21K1/00; G21K1/06; B; B82; B82Y; B82Y10/00; G21K1/062; G21K2201/00; G21K2201/06; G21K2201/061; G21K2201/062; G21K2201/067; Y; Y10; Y10T; Y10T428/00; Y10T428/26; Y10T428/261
Claims Analysis
Total Claims: 50
Claim 1
Independent Claim
58 words
An improved X-ray dispersive structure (22, 30, 110) characterized by: a plurality of layer pairs formed on one another, said layer pairs having X-ray dispersive properties over a predetermined range of interest, one layer of each of said layer pairs includes boron and the second layer of each of said layer pairs is formed from a metallic material.
Claim 2
Dependent Claim
58 words
An improved X-ray dispersive structure (22, 30, 110) characterized by: a plurality of layer pairs formed on one another, said layer pairs having X-ray dispersive properties over a predetermined range of interest, one layer of each of said layer pairs includes boron and the second layer of each of said layer pairs is formed from a metallic material.
Claim 3
Dependent Claim
19 words
The structure (22, 30, 110) according to claim 1 further characterized by: said boron including layer further includes carbon.
Claim 4
Dependent Claim
39 words
The structure (22, 30, 110) according to any one of claims 1 or 2 further characterized by; said boron including layer is B 4 C and said predetermined range of interest includes wave-0 0 lengths of 9.75A to 44.7A.
Claim 5
Dependent Claim
38 words
The structure (22, 30, 110) according to any one of claims 1 through 3 further characterized by: said metallic material layer contains at least one of the group consisting of Hf, W, Re, Ta, Pt, Ir and Au.
Claim 6
Dependent Claim
34 words
The structure (22, 30, 110) according to claim 1 further characterized by: a buffer layer formed between each metallic and boron including layer to prevent any interaction between said metallic and boron including layers.
Claim 7
Dependent Claim
26 words
The structure (22, 30, 110) according to claim 5 further characterized by: said buffer layer is formed from Si about 0 o 1.3A to 5.0A thick.
Claim 8
Independent Claim
57 words
A method of making an improved X-ray dispersive structure characterized by: forming a plurality of layer pairs on one another to have X-ray dispersive properties over a predetermined range of interest, including boron in one layer of each of said layer pairs and forming the second layer of each of said layer pairs from a metallic material.
Claim 9
Independent Claim
57 words
A method of making an improved X-ray dispersive structure characterized by: forming a plurality of layer pairs on one another to have X-ray dispersive properties over a predetermined range of interest, including boron in one layer of each of said layer pairs and forming the second layer of each of said layer pairs from a metallic material.
Claim 10
Dependent Claim
18 words
The method according to claim 7 further characterized by: forming said boron including layer and including carbon therein.
Claim 11
Independent Claim
39 words
The method according to any one of claims 7 or 8 further characterized by: forming said boron including layer from B 4 C and forming said predetermined range of interest 0 o to include wavelengths of 9.75A to 44.7A.
Claim 12
Independent Claim
36 words
The method according to any one of claims 7 through 9 further characterized by: forming said metallic material layer from at least one of the group consisting of Hf, W, Re, Ta, Pt, Ir and Au.
Claim 13
Dependent Claim
31 words
The method according to claim 7 further characterized by: forming a buffer layer between each metallic and boron including layer to prevent any interaction between said metallic and boron including layers.
Claim 14
Dependent Claim
22 words
The method according to claim 11 further characterized by: forming said buffer layer from Si between 0 o 1.3A and 5.0A thick.
Claim 15
Dependent Claim
67 words
An improved X-ray dispersive structure (22, 30, 110) characterized by: a plurality of layer pairs formed on one another, said layer pairs having X-ray dispersive properties over a predetermined range of interest, one layer of each of said layer pairs includes carbon and the second layer of each of said layer pairs is formed from a metallic material, said metallic material containing at least Hf or Re.
Claim 16
Dependent Claim
67 words
An improved X-ray dispersive structure (22, 30, 110) characterized by: a plurality of layer pairs formed on one another, said layer pairs having X-ray dispersive properties over a predetermined range of interest, one layer of each of said layer pairs includes carbon and the second layer of each of said layer pairs is formed from a metallic material, said metallic material containing at least Hf or Re.
Claim 17
Dependent Claim
17 words
The structure (22, 30, 110) according to claim 13 further characterized by: said metallic material is Hf:W.
Claim 18
Dependent Claim
30 words
The structure (22, 30, 110) according to claim 13 further characterized by: said metallic material layer includes at least one of the group consisting of Ta, Pt, Ir and Au.
Claim 19
Dependent Claim
30 words
The structure (22, 30, 110) according to any one of claims 13 through 15 further characterized by: said predetermined range of interest includes 0 o wavelengths of 9.75A to 19.0A.
Claim 20
Dependent Claim
34 words
The structure (22, 30, 110) according to claim 13 further characterized by: a buffer layer formed between each metallic and carbon including layer to prevent any interaction between said metallic and carbon including layers.
Claim 21
Dependent Claim
26 words
The structure (22, 30, 110) according to claim 17 further characterized by: said buffer layer is formed from Si about 0 o 1.3A to 5.0A thick.
Claim 22
Independent Claim
66 words
A method of making an improved X-ray dispersive structure characterized by: forming a plurality of layer pairs on one another to have X-ray dispersive properties over a predetermined range of interest, including carbon in one layer of each of said layer pairs and forming the second layer of each of said layer pairs from a metallic material, said metallic material containing at least Hf or Re.
Claim 23
Independent Claim
66 words
A method of making an improved X-ray dispersive structure characterized by: forming a plurality of layer pairs on one another to have X-ray dispersive properties over a predetermined range of interest, including carbon in one layer of each of said layer pairs and forming the second layer of each of said layer pairs from a metallic material, said metallic material containing at least Hf or Re.
Claim 24
Dependent Claim
16 words
The method according to claim 19 further characterized by: forming said metallic material layer of Hf:W.
Claim 25
Dependent Claim
28 words
The method according to claim 19 further characterized by: forming said metallic material layer from at least one of the group consisting of Ta, Pt, Ir and Au.
Claim 26
Independent Claim
29 words
The method according to any one of claims 19 through 21 further characterized by: forming said predetermined range of interest 0 o to include wavelengths of 9.75A to 19.0A.
Claim 27
Dependent Claim
31 words
The method according to claim 19 further characterized by: forming a buffer layer between each metallic and carbon including layer to prevent any interaction between said metallic and carbon including layers.
Claim 28
Dependent Claim
22 words
The method according to claim 23 further characterized by: forming said buffer layer from Si between o o 1.3A and 5.0A thick.
Claim 29
Dependent Claim
58 words
An improved X-ray dispersive structure (22, 30, 110) characterized by: a plurality of layer pairs formed on one another, said layer pairs having X-ray dispersive properties over a predetermined range of interest, one layer of each of said layer pairs includes silicon and the second layer of each of said layer pairs is formed from a metallic material.
Claim 30
Dependent Claim
58 words
An improved X-ray dispersive structure (22, 30, 110) characterized by: a plurality of layer pairs formed on one another, said layer pairs having X-ray dispersive properties over a predetermined range of interest, one layer of each of said layer pairs includes silicon and the second layer of each of said layer pairs is formed from a metallic material.
Claim 31
Dependent Claim
21 words
The structure (22, 30, 110) according to claim 25 further characterized by: said silicon including layer also includes B or C.
Claim 32
Dependent Claim
37 words
The structure (22, 30, 110) according to any one of claims 25 or 26 further characterized by: said metallic layer contains at least one of the group consisting of Hf, W, Re, Ta, Pt, Ir and Au.
Claim 33
Independent Claim
57 words
A method of making an improved X-ray dispersive structure characterized by: forming a plurality of layer pairs on one another to have X-ray dispersive properties over a predetermined range of interest, including silicon in one layer of each of said layer pairs and forming the second layer of each of said layer pairs from a metallic material.
Claim 34
Independent Claim
57 words
A method of making an improved X-ray dispersive structure characterized by: forming a plurality of layer pairs on one another to have X-ray dispersive properties over a predetermined range of interest, including silicon in one layer of each of said layer pairs and forming the second layer of each of said layer pairs from a metallic material.
Claim 35
Dependent Claim
19 words
The method according to claim 28 further characterized by: forming said silicon including layer to include B or C.
Claim 36
Independent Claim
36 words
The method according to any one of claims 28 or 29 further characterized by: forming said metallic material layer from at least one of the group consisting of Hf, W, Re, Ta, Pt, Ir and Au.
Claim 37
Dependent Claim
46 words
An X-ray dispersive LB replacement structure (22, 30, 110) characterized by: a plurality of layer pairs formed on one another, said layers alternately being formed of amorphous materials to reflect wavelengths in the 0 0 range of 18.0A to 67.6A with greater intensity than LB films.
Claim 38
Dependent Claim
46 words
An X-ray dispersive LB replacement structure (22, 30, 110) characterized by: a plurality of layer pairs formed on one another, said layers alternately being formed of amorphous materials to reflect wavelengths in the 0 0 range of 18.0A to 67.6A with greater intensity than LB films.
Claim 39
Dependent Claim
34 words
The structure (22, 30, 110) according to claim 31 further characterized by: said layers are formed of two different materials, one metallic and one non-metallic, said non-metallic layer including at least C or B.
Claim 40
Dependent Claim
32 words
The structure (22, 30, 110) according to claim 31 further characterized by: a buffer layer formed between each metallic and non-metallic layer to prevent substantial interaction between said metallic and non-metallic layers.
Claim 41
Dependent Claim
19 words
The structure (22, 30, 110) according to claim 31 further characterized by: said LB film is an LOD film.
Claim 42
Dependent Claim
19 words
The structure (22, 30, 110) according to claim 31 further characterized by: said LB film is a Myristate film.
Claim 43
Dependent Claim
26 words
The structure (22, 30, 110) according to any one of claims 31 through 33 further characterized by: said layer pairs are formed of tungsten and silicon.
Claim 44
Dependent Claim
46 words
An X-ray dispersive map replacement structure (22, 30, 110) characterized by: a plurality of layer pairs formed on one another, said layers alternately being formed of amorphous materials to reflect wavelengths in the 0 0 range of 9.89A to 18.30A with greater intensity than map crystals.
Claim 45
Dependent Claim
46 words
An X-ray dispersive map replacement structure (22, 30, 110) characterized by: a plurality of layer pairs formed on one another, said layers alternately being formed of amorphous materials to reflect wavelengths in the 0 0 range of 9.89A to 18.30A with greater intensity than map crystals.
Claim 46
Dependent Claim
34 words
The structure (22, 30, 110) according to claim 37 further characterized by: said layers are formed of two different materials, one metallic and one non-metallic, said non-metallic layer including at least C or B.
Claim 47
Dependent Claim
32 words
The structure (22, 30, 110) according to claim 37 further characterized by: a buffer layer formed between each metallic and non-metallic layer to prevent substantial interaction between said metallic and non-metallic layers.
Claim 48
Dependent Claim
26 words
The structure (22, 30, 110) according to any one of claims 37 or 38 further characterized by: said layer pairs are formed of tungsten and silicon.
Claim 49
Dependent Claim
19 words
The structure (22, 30, 110) according to claim 37 further characterized by: said map crystal is a TAP crystal.
Claim 50
Dependent Claim
19 words
The structure (22, 30, 110) according to claim 37 further characterized by: said map crystal is a RAP crystal.
References Cited (Backward Citations)
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