EP0125692A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Laser machining apparatus
Assignee: NEC Corp
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Filing: 1984-05-15
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Granted: —
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Expires: 2004-05-15
Abstract
Abstract he invention relates to a laser machining apparatus of the type using a mask generator which predetermines a shape to be produced by a laser beam. The laser machining apparatus comprises a laser (1), a first optical system (2') for converting a laser beam emanating from said laser (1) into a parallel beam, means (3', 6') for generating a transparent optical apperture by controlling an optical material, means for directing the parallel beam towards said optical aperture generating means (3', 6'), and a second optical system (24) for imaging the optical aperture to a sample (4) which is laid on a marking table. The apparatus allows an aperture to be generated or changed easily and in a shorttime.
Inventors
- 👤 Masakazu Nakano
- 👤 Yoichi Yoshino
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-04 19:37
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/135; B; B23; B23K; B23K26/00; B23K26/02; B23K26/06; B23K26/064; B23K26/066; G02F1/03; G02F1/0338
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
103 words
A laser machining apparatus, comprising: (5) a) a marking tablet; (1) b) a laser; (2) c) a first optical system/for converting a laser beam (1) emanating from said laserlinto a parallel beam; (3,6) d) means/for generating a transparent optical aperture by controlling an optical material in one of electrical and optical manners; e) means for. directing the parallel beam output from the (2) first optical systemltoward said optical aperture generating means (3,6); and (23,24) f) a second optical system/for imaging the optical aperture (3,6) generated by the optical aperture generating means/to a (4) ( 5 ) samplelwhich is laid on the marking table.
Claim 2
Dependent Claim
103 words
A laser machining apparatus, comprising: (5) a) a marking tablet; (1) b) a laser; (2) c) a first optical system/for converting a laser beam (1) emanating from said laserlinto a parallel beam; (3,6) d) means/for generating a transparent optical aperture by controlling an optical material in one of electrical and optical manners; e) means for. directing the parallel beam output from the (2) first optical systemltoward said optical aperture generating means (3,6); and (23,24) f) a second optical system/for imaging the optical aperture (3,6) generated by the optical aperture generating means/to a (4) ( 5 ) samplelwhich is laid on the marking table.
Claim 3
Dependent Claim
59 words
A laser machining apparatus as claimed in claim 1, in which the optical aperture generating means comprises polarizing and separating means for separating the parallel beam into polarized components which are perpendicular to each other, a light valve controlled in one of electrical and optical manners to vary a polarization characteristic, and control means for controlling said light valve.
Claim 4
Dependent Claim
113 words
A laser machining apparatus as claimed in claim 2, in which the light valve comprises a first glass substrate having a first transparent electrode and a first liquid crystal orienting film which are sequentially deposited in said order, and a second glass substrate having a second transparent electrode, a photoconductive film, a light intercepting film, a reflecting film for reflecting the laser beam, and a second liquid crystal orienting layer which are sequentially deposited in said order, a cell arranged such that said first and second liquid crystal orienting layers set up directions of orientation which are angled 45 degrees to each other, and a twisted nematic liquid crystal filled in the cell.
Claim 5
Dependent Claim
52 words
A laser machining apparatus as claimed in claim 3, in which the control means comprises a cathode ray tube for displaying at least one of necessary characters and figures, means for controlling said cathode ray tube, and an optical system for imaging a picture on the cathode ray tube to the cell.
Claim 6
Dependent Claim
103 words
A laser machining apparatus as claimed in claim 2, in which the light valve comprises a first glass substrate having a first transparent electrode and a first liquid crystal orienting film which are deposited in said order, and a second glass substrate having transverse electrodes, vertical electrodes, a reflecting film for reflecting the laser light, and a second liquid crystal orienting layer which are deposited sequentially in said order, a cell arranged such that the first and second liquid crystal orienting films set up directions of orientation which are parallel to each other, and an n-type cholesteric liquid crystal filled in the cell.
Claim 7
Dependent Claim
42 words
A laser machining apparatus as claimed in claim 5, in which a polarization characteristic of the liquid crystal is controlled by heat which is generated at intersecting points of the matrix electrode which is made up of the transverse and vertical electrodes.
Claim 8
Dependent Claim
96 words
A laser machining apparatus as claimed in claim 2, in which the light valve comprises a first glass substrate having transparent transverse electrodes and a first liquid crystal orienting film which are sequentially deposited in said order, a second glass substrate having vertical electrodes, a reflecting film for reflecting the laser light, and a second liquid orienting layer which are sequentially deposited in said order, a cell arranged such that the first and second orienting films have directions of orientations which are perpendicular to each other, and a p-type cholesteric liquid crystal filled in the cell.
Claim 9
Dependent Claim
40 words
A laser machining apparatus as claimed in claim 7, in which a polarization characteristic of the liquid crystal is controlled by varying an electric field applied to the liquid crystal by supplying drive signals to the transverse and vertical electrodes.
Claim 10
Dependent Claim
88 words
A laser machining apparatus as claimed in claim 2, in which the light valve comprises a first glass substrate having vertical electrodes and a first liquid crystal orienting film which are sequentially deposited in said order, a second glass substrate having transverse electrodes and a second liquid crystal orienting film which are sequentially deposited in this order, a cell arranged such that the first and second orienting films have directions of orientations which are perpendicular to eacL other, and a twisted nematic liquid crystal filled in said cell.
Claim 11
Dependent Claim
40 words
A laser machining apparatus as claimed in claim 9, in which a polarizing characteristic of the liquid crystal is controlled by varying an electric field applied to the liquid crystal by appling drive signals to the transverse and vertical electrodes.
Claim 12
Dependent Claim
40 words
A laser machining device as claimed in any of claims 2 to 10, in which the polarizing and separating means is disposed at the rear of an optical path through which the laser light transmitted through the light valve propagates.
Claim 13
Dependent Claim
39 words
A laser machining apparatus as claimed in claim 2, in which the light valve comprises an electrooptical crystal, and a first transparent electrode and a second transparent electrode which are positioned respectively on opposite ends of said electrooptical crystal.
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