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EP0124025A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Solid-state color imaging device and process for fabricating the same

Assignee: Toshiba Corp
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Filing: 1984-04-18
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Granted: —
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Expires: 2004-04-18
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Abstract

Abstract Color filter arrays (18) are integrally formed on the upper surface of a solid-state image sensor (19). Filter portions (W, C, Y) of the color filter arrays (18) are formed in one-to-one correspondence with picture elements (12). The filter portions (W, C, Y) are formed as focusing portions (10) having a lens effect.

Inventors

  • 👤 Yasuo C/O Patent Division Takemura
  • 👤 Masataka C/O Patent Division Miyamura
  • 👤 Yoshinori C/O Patent Division Takizawa

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-09 06:47
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/80; H10F39/805; H10F39/8057; H04; H04N; H04N25/00; H04N25/10; H04N25/11; H04N25/13; H04N25/133; H10F39/8053; H10F39/011; H10F39/024

Claims Analysis

Total Claims: 17
Claim 1
Independent Claim 76 words
A solid-state color imaging device having a color filter array which is integrally formed with a solid-state image sensor.and which has color filter portions corresponding to a plurality of picture elements, said solid-state image sensor being arranged such that said plurality of picture elements are arrayed on one surface in a two-dimensional array, characterized in that said color filter portions are formed as focusing portions (10) in one-to-one correspondence with the plurality of picture elements (12).
Claim 2
Dependent Claim 76 words
A solid-state color imaging device having a color filter array which is integrally formed with a solid-state image sensor.and which has color filter portions corresponding to a plurality of picture elements, said solid-state image sensor being arranged such that said plurality of picture elements are arrayed on one surface in a two-dimensional array, characterized in that said color filter portions are formed as focusing portions (10) in one-to-one correspondence with the plurality of picture elements (12).
Claim 3
Dependent Claim 24 words
A device according to claim 1, characterized in that only full-color light-transmitting filter portions (W) of said color filter array comprise said focusing portions.
Claim 4
Dependent Claim 36 words
A device according to claim 1, characterized in that all of said color filter portions (W, C, Y or R, G, B) in one-to-one correspondence with said picture elements (12) are used as said focusing portions.
Claim 5
Independent Claim 23 words
A device according to claims 1, 2, and 3, characterized in that each of said focusing portions (10) has a convex lens shape.
Claim 6
Independent Claim 45 words
A device according to any of claims 1 to 4, characterized in that the edges of every adjacent color filter portions of said color filter portions, which correspond to every adjacent picture elements of said plurality of picture elements, are spaced apart from each other.
Claim 7
Independent Claim 42 words
A device according to any of claims 1 to 4, characterized in that the edges of every adjacent color filter portions of said color filter portions, which correspond to every adjacent picture elements of said plurality of picture elements overlap each other.
Claim 8
Dependent Claim 36 words
A device according to claim 6, characterized in that an intermediate layer of a transparent resist is formed at least between overlapping edges of said every adjacent color filter portions so as to prevent color mixing.
Claim 9
Independent Claim 29 words
A device according to any of claims 1 to 7, characterized in that said color filter portions are directly formed on a base layer formed on a semiconductor substrate.
Claim 10
Independent Claim 59 words
A device according to any of claims 1 to 7, characterized in that first color filter portions of said color filter portions are directly formed on a surface of a base layer on a semiconductor substrate, and second color filter portions of said color filter portions are formed on the surface of said base layer through an intermediate layer.
Claim 11
Independent Claim 41 words
A device according to any of claims 1 to 7, characterized in that said color filter portions comprise first, second and third color filter portions which are directly formed on a surface of a base layer formed on a semiconductor substrate.
Claim 12
Dependent Claim 330 words
ll. A process for fabricating a solid-state color imaging device, comprising at least: a first step for forming a base layer on a solid-state image sensor having a plurality of picture elements arrayed in a two-dimensional array so as to provide an even surface of said solid-state image sensor; a second step for forming a first convex lens-like dye receiving portion layer of a transparent resist on even surface portions of said base layer which correspond to first predetermined picture elements of said plurality of picture elements; a third step for dipping a solid-state image sensor structure having said first dye receiving portion layer in a first dye solution so as to dye said first dye receiving portion layer in a first color; a fourth step for forming an intermediate layer on first color filter portions obtained by the third step and on a remaining portion of said base layer surface so as to prevent color mixing; a fifth step for forming a second convex lens-like dye receiving portion layer of a transparent resist on portions of said intermediate layer, obtained by the fourth step, which correspond to second predetermined picture elements of said plurality of picture elements; a sixth step for dipping a resultant solid-state image sensor structure having said second dye receiving portion layer in a second dye solution so as to dye said second dye receiving portion layer in a second color; a seventh step for forming an intermediate layer on second color filter portions obtained by the sixth step and on a remaining portion of said base layer surface so as to prevent color mixing; an eighth step for forming a third convex lens-like dye receiving portion layer of a transparent resist on portions of said intermediate layer, obtained by the seventh step, which correspond to third predetermined picture elements of said plurality of picture elements; and a ninth step for forming an overcoat layer to cover a surface of said third dye receiving portion layer.
Claim 13
Dependent Claim 330 words
ll. A process for fabricating a solid-state color imaging device, comprising at least: a first step for forming a base layer on a solid-state image sensor having a plurality of picture elements arrayed in a two-dimensional array so as to provide an even surface of said solid-state image sensor; a second step for forming a first convex lens-like dye receiving portion layer of a transparent resist on even surface portions of said base layer which correspond to first predetermined picture elements of said plurality of picture elements; a third step for dipping a solid-state image sensor structure having said first dye receiving portion layer in a first dye solution so as to dye said first dye receiving portion layer in a first color; a fourth step for forming an intermediate layer on first color filter portions obtained by the third step and on a remaining portion of said base layer surface so as to prevent color mixing; a fifth step for forming a second convex lens-like dye receiving portion layer of a transparent resist on portions of said intermediate layer, obtained by the fourth step, which correspond to second predetermined picture elements of said plurality of picture elements; a sixth step for dipping a resultant solid-state image sensor structure having said second dye receiving portion layer in a second dye solution so as to dye said second dye receiving portion layer in a second color; a seventh step for forming an intermediate layer on second color filter portions obtained by the sixth step and on a remaining portion of said base layer surface so as to prevent color mixing; an eighth step for forming a third convex lens-like dye receiving portion layer of a transparent resist on portions of said intermediate layer, obtained by the seventh step, which correspond to third predetermined picture elements of said plurality of picture elements; and a ninth step for forming an overcoat layer to cover a surface of said third dye receiving portion layer.
Claim 14
Dependent Claim 33 words
A process according to claim 11, characterized in that said first and second color filter portions comprise cyan and yellow portions, respectively, and said third dye receiving portion layer comprises undyed filter portions.
Claim 15
Dependent Claim 39 words
A process according to claim 11, characterized in that said first and second color filter portions comprise red and green portions, and said third dye receiving portion layer is dyed to give blue filter portions before the eighth step.
Claim 16
Dependent Claim 348 words
A process for fabricating a solid-state color imaging device, comprising at least: a first step for forming a base layer on a solid-state image sensor having a plurality of picture elements arrayed in a two-dimensional array so as to provide an even surface of said solid-state image sensor; a second step for forming a first convex lens-like dye receiving portion layer of a transparent resist on the even surface portions of said base layer which correspond to first predetermined picture elements of said plurality of picture elements; a third step of dipping a solid-state image sensor structure having said first dye receiving portion layer in a first dye solution so as to dye said first dye receiving portion layer in a first color; a fourth step for dipping a resultant solid-state image sensor structure first in an aqueous solution of tannic acid and subsequently in an aqueous solution of arsenic oxide so as to solidify a dye of first color filter portions obtained by the third step and prevent color mixing; a fifth step for forming a second convex lens-like dye receiving portion layer of a transparent resist on said base layer portions of a resultant solid-state image sensor structure, obtained by the fourth step, which correspond to second predetermined picture elements of said plurality of picture elements; a sixth step for dipping a resultant solid-state image sensor structure having said second dye receiving portion layer in a second dye solution so as to dye said second dye receiving portion layer in a second color; a seventh step for forming an intermediate layer on a resultant solid-state image sensor structure obtained by the sixth step; an eighth step for forming a third convex lens-like dye receiving portion layer of a transparent resist on portions of a resultant solid-state image sensor structure, obtained by the seventh step, which correspond to third predetermined picture elements of said plurality of picture elements; and a ninth step for forming an overcoat layer to cover an entire surface of said third dye receiving portion layer and said first and second color filter portions.
Claim 17
Dependent Claim 348 words
A process for fabricating a solid-state color imaging device, comprising at least: a first step for forming a base layer on a solid-state image sensor having a plurality of picture elements arrayed in a two-dimensional array so as to provide an even surface of said solid-state image sensor; a second step for forming a first convex lens-like dye receiving portion layer of a transparent resist on the even surface portions of said base layer which correspond to first predetermined picture elements of said plurality of picture elements; a third step of dipping a solid-state image sensor structure having said first dye receiving portion layer in a first dye solution so as to dye said first dye receiving portion layer in a first color; a fourth step for dipping a resultant solid-state image sensor structure first in an aqueous solution of tannic acid and subsequently in an aqueous solution of arsenic oxide so as to solidify a dye of first color filter portions obtained by the third step and prevent color mixing; a fifth step for forming a second convex lens-like dye receiving portion layer of a transparent resist on said base layer portions of a resultant solid-state image sensor structure, obtained by the fourth step, which correspond to second predetermined picture elements of said plurality of picture elements; a sixth step for dipping a resultant solid-state image sensor structure having said second dye receiving portion layer in a second dye solution so as to dye said second dye receiving portion layer in a second color; a seventh step for forming an intermediate layer on a resultant solid-state image sensor structure obtained by the sixth step; an eighth step for forming a third convex lens-like dye receiving portion layer of a transparent resist on portions of a resultant solid-state image sensor structure, obtained by the seventh step, which correspond to third predetermined picture elements of said plurality of picture elements; and a ninth step for forming an overcoat layer to cover an entire surface of said third dye receiving portion layer and said first and second color filter portions.

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